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Inpria

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uuid0000f4v

Namestring
Inpria
Legal namestring
Inpria Corporation
Websiteurl
inpria.com
Company typeenum
Private
Founded yearint
2007
Descriptiontext

Inpria Corporation is a specialty semiconductor materials supplier that designs, develops, and manufactures metal oxide photoresists for Extreme Ultraviolet (EUV) lithography. Founded in 2007 as a spin-out from Oregon State University's Department of Chemistry and headquartered in Corvallis, Oregon, the company produces photoresists built on organometallic clusters with a tin-oxide core — a chemistry distinct from conventional polymer-based resists. Inpria claims its materials deliver superior EUV absorption, eliminate the acid diffusion mechanism of chemically amplified resists, and offer unparalleled etch selectivity, enabling simpler manufacturing flows at advanced nodes.

The company's products are sold as part of a holistic solution that includes photoresists, developer, and ancillary materials. Manufacturing is conducted at an advanced plant in Corvallis designed to meet semiconductor industry standards with integrated Statistical Process Control. Inpria sells exclusively to semiconductor manufacturers that have adopted EUV lithography, engaging through deep enterprise co-development relationships rather than transactional sales. Its only publicly named customer is SK hynix, with which it announced co-development of metal oxide resists for next-generation DRAM in August 2022. An investor syndicate including TSMC, Samsung Ventures, Intel Capital, and SK Hynix — each major logic and memory manufacturer — signals broad strategic alignment with leading-edge fabs.

Inpria became a wholly-owned subsidiary of JSR Corporation in November 2021, which provides market reach and capital. JSR itself was acquired by Japan Investment Corporation (JIC) in 2023, and as of 2026 JIC is reportedly exploring a sale of JSR. Inpria operates as a private, pre-revenue-disclosure subsidiary with 11-50 employees and approximately $68.9M in total venture funding raised prior to the JSR acquisition. The company expanded its commercial moat through a 2026 cross-licensing and collaboration agreement with Entegris covering MOR patents and adjacent filtration technology.

Short descriptiontext

Inpria Corporation designs and manufactures proprietary metal oxide photoresists for Extreme Ultraviolet (EUV) lithography, serving advanced-node semiconductor manufacturers. A wholly-owned subsidiary of JSR Corporation since 2021, the company operates from Corvallis, Oregon.

Operating statusenum
Operating
Ownership categoryenum
Headcount rangeband
11–50
akta.pro rankint
HeadquartersCorvallis, United States
HQ citystring
Corvallis
HQ countrystring
United States
HQ regionstring
North America
Markets served

Serves global market

Offices1 record

Each record includes

City, Country, Type, Description, Source

Keyword5 values
EUV photoresist materials, metal oxide resists, semiconductor lithography chemicals, photoresist manufacturing, EUV lithography solutions
Industry1 code
1Photoresists & Lithography Chemicals (Resists/Developers/Anti-Reflective Coatings)
CodeHDAHAGAEPrimaryYes
NAICS code2 codes
  • Semiconductor and Other Electronic Component Manufacturing33441
  • Semiconductor and Other Electronic Component Manufacturing3344
SIC code2 codes
  • Electronic Components, Nec3679
  • Electronic Components & Accessories3670
Product category
Semiconductor Lithography Materials
Social media profiles2 records
GTM motion1 record

Each record includes

Type, Description, Source

Revenue model1 record
1EUV Metal Oxide Photoresist Sales
TypeHardware Sales
Description

Inpria manufactures and sells a suite of EUV metal oxide photoresists, providing holistic product solutions including photoresists, developer and other ancillary materials to semiconductor manufacturers.

inpria.com
Marketing channels2 records

Each record includes

Title, Type, Stage, Description, Source

Distribution channels1 record

Each record includes

Title, Type, Scope, Target buyer, Description, Source

Cost components6 values
Personnel, Technology or R&D, Supply Chain, Operations, Infrastructure, Marketing or Sales
GTM typeB2B
B2B
Offering typeHardware or Manufacturing
Hardware or Manufacturing
Core offering1 text field

Inpria designs, develops, and manufactures a suite of EUV metal oxide photoresists together with developer and other ancillary materials for semiconductor manufacturers that have adopted EUV lithography. The photoresists use organometallic clusters with a tin-oxide core to deliver superior resolution, EUV absorption, and etch selectivity for advanced node chip patterning.

Differentiator
Functional benefit
Problem solved
Product overview1 text field

Inpria offers a unified product portfolio centered on its EUV Metal Oxide Photoresists as the core offering, supplemented by Developer and Ancillary Materials. Together, these products provide semiconductor manufacturers with a complete patterning solution for advanced node chip manufacturing using extreme ultraviolet lithography. The photoresists are manufactured at Inpria's advanced facility in Corvallis, Oregon, with quality management systems and process automation supporting raw materials through final product QC.

Product and service2 records
1EUV Metal Oxide Photoresists
CategorySemiconductor Lithography Materials
Description

Suite of EUV metal oxide photoresists intentionally designed, optimized, and manufactured to meet industry specifications spanning resolution, sensitivity, linewidth roughness, and integration into manufacturing flows. Built on organometallic clusters with a tin-oxide core, the photoresists deliver superior EUV absorption, reduce photon shot noise versus Chemically Amplified Resists, and provide unparalleled etch selectivity. Produced at Inpria's advanced manufacturing plant in Corvallis, Oregon for semiconductor manufacturers using EUV lithography.

2Developer and Ancillary Materials
CategorySemiconductor Lithography Materials
Description

Supporting chemical materials including developer and other ancillary products provided alongside Inpria's EUV photoresists to deliver customers a holistic product solution for EUV lithography manufacturing processes.

Scale indicator2 records

Each record includes

Type, Value, Description, Source

Partnership2 partners
1Entegris, Inc.
Strategic tierCoreTypeTechnology or IntegrationAnnounced on2026-05-26
Description

Non-exclusive cross-licensing agreement for EUV lithography technology. Parties cross-license metal oxide resist (MOR) patents, terminate pending Inter Partes Review challenges, and explore collaborative opportunities on resist formulation, precursor synthesis, and MOR-specific filtration for high-volume EUV manufacturing. Combines Inpria's resist materials expertise with Entegris' purification and materials handling expertise.

2SK hynix Inc.
Strategic tierCoreTypeStrategic or Co-development PartnerAnnounced on2022-08-02
Description

Co-development partnership to apply Inpria's EUV metal oxide resist technology for manufacturing advanced DRAM chips. Supports SK hynix's technology roadmap as the semiconductor industry moves to smaller critical dimensions. Inpria's metal oxide photoresist platform enables efficient patterning of advanced node device architectures while significantly reducing cost of EUV patterning through standard spin coating process.

Recent move5 records

Each record includes

Date, Type, Title, Description, Source

Expansion highlight4 records

Each record includes

Type, Description

Market position
Competitive moat4 records

Each record includes

Type, Details

Key risks5 records

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Headline, Details, Source

Key highlights6 records

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Customer concentration

Classification, Details

Named customers1 record

Each record includes

Name, Industry, Type, Use case, Source, UUID

Segment1 record

Each record includes

Title, Type, Primary, Description, Pain point addressed, Use case, Source

Ideal customer profile1 record

Each record includes

Profile, Firmographic size, Sales motion, Sales cycle length, Buying structure, Purchase trigger, Buyer persona, Geography, Industry vertical, Primary use case, Description, Pain points, Evidence proof points, Target buyer

Technology focused
Yes
API detail
Has APIbool
No

Docs URL, Description

AI maturity
App detail

Has app

Feature4 records

Each record includes

Title, Differentiator, Description, Source

Core technology
Revenue estimate
Valuation estimate
Number of profiles
Profiles4 records

Each record includes

Name, Designation, Designation category, Overview, Profile commentary, Source

No data
No data
Funding overview

Funding stage, Last funding date, Total funding USD

Funding rounds8 records

Each record includes

Round, Amount USD, Date, Pre money valuation, Total investors, Investors, News

Investors13 records

Each record includes

Name, Type, Date of entry, Rounds participated, Website

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Each record includes

Name, Acquisition type, Announced date, Completed date, Status, Website, News

Investment

Each record includes

Name, Round, Announced date, Lead investor, Website, News

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Inpria

Semiconductor Lithography Materialsinpria.com

Inpria Corporation designs and manufactures proprietary metal oxide photoresists for Extreme Ultraviolet (EUV) lithography, serving advanced-node semiconductor manufacturers. A wholly-owned subsidiary of JSR Corporation since 2021, the company operates from Corvallis, Oregon.

What Inpria does

Inpria Corporation is a specialty semiconductor materials supplier that designs, develops, and manufactures metal oxide photoresists for Extreme Ultraviolet (EUV) lithography. Founded in 2007 as a spin-out from Oregon State University's Department of Chemistry and headquartered in Corvallis, Oregon, the company produces photoresists built on organometallic clusters with a tin-oxide core — a chemistry distinct from conventional polymer-based resists. Inpria claims its materials deliver superior EUV absorption, eliminate the acid diffusion mechanism of chemically amplified resists, and offer unparalleled etch selectivity, enabling simpler manufacturing flows at advanced nodes.

The company's products are sold as part of a holistic solution that includes photoresists, developer, and ancillary materials. Manufacturing is conducted at an advanced plant in Corvallis designed to meet semiconductor industry standards with integrated Statistical Process Control. Inpria sells exclusively to semiconductor manufacturers that have adopted EUV lithography, engaging through deep enterprise co-development relationships rather than transactional sales. Its only publicly named customer is SK hynix, with which it announced co-development of metal oxide resists for next-generation DRAM in August 2022. An investor syndicate including TSMC, Samsung Ventures, Intel Capital, and SK Hynix — each major logic and memory manufacturer — signals broad strategic alignment with leading-edge fabs.

Inpria became a wholly-owned subsidiary of JSR Corporation in November 2021, which provides market reach and capital. JSR itself was acquired by Japan Investment Corporation (JIC) in 2023, and as of 2026 JIC is reportedly exploring a sale of JSR. Inpria operates as a private, pre-revenue-disclosure subsidiary with 11-50 employees and approximately $68.9M in total venture funding raised prior to the JSR acquisition. The company expanded its commercial moat through a 2026 cross-licensing and collaboration agreement with Entegris covering MOR patents and adjacent filtration technology.

Inpria firmographics

Firmographics
Name
Inpria
Legal name
Inpria Corporation
Website
https://inpria.com
Company type
Private
Founded year
2007
Operating status
Operating
Headcount range
11–50 employees
Short description
Inpria Corporation designs and manufactures proprietary metal oxide photoresists for Extreme Ultraviolet (EUV) lithography, serving advanced-node semiconductor manufacturers. A wholly-owned subsidiary of JSR Corporation since 2021, the company operates from Corvallis, Oregon.
Ownership category
akta.pro rank

Inpria industry classification

Industry
Product category
Semiconductor Lithography Materials
NAICS
Semiconductor and Other Electronic Component Manufacturing (33441), Semiconductor and Other Electronic Component Manufacturing (3344)
SIC
Electronic Components, Nec (3679), Electronic Components & Accessories (3670)
akta.pro primary industry
Photoresists & Lithography Chemicals (Resists/Developers/Anti-Reflective Coatings) (HDAHAGAE)

Keywords

  • EUV photoresist materials
  • Metal oxide resists
  • Semiconductor lithography chemicals
  • Photoresist manufacturing
  • EUV lithography solutions

Where Inpria is headquartered

Location

Headquarters

HQ city
Corvallis
HQ country
United States
HQ region
North America

Offices1 record

Markets served

Inpria business model

Business model
GTM type
B2B
Offering type
Hardware or Manufacturing
Cost components
Personnel, Technology or R&D, Supply Chain, Operations, Infrastructure, Marketing or Sales

Revenue model

  1. EUV Metal Oxide Photoresist Sales: Inpria manufactures and sells a suite of EUV metal oxide photoresists, providing holistic product solutions including photoresists, developer and other ancillary materials to semiconductor manufacturers.

Go-to-market motion1 record

Distribution channels1 record

Marketing channels2 records

Inpria product offering

Product offering

Core offering

Inpria designs, develops, and manufactures a suite of EUV metal oxide photoresists together with developer and other ancillary materials for semiconductor manufacturers that have adopted EUV lithography. The photoresists use organometallic clusters with a tin-oxide core to deliver superior resolution, EUV absorption, and etch selectivity for advanced node chip patterning.

Product overview

Inpria offers a unified product portfolio centered on its EUV Metal Oxide Photoresists as the core offering, supplemented by Developer and Ancillary Materials. Together, these products provide semiconductor manufacturers with a complete patterning solution for advanced node chip manufacturing using extreme ultraviolet lithography. The photoresists are manufactured at Inpria's advanced facility in Corvallis, Oregon, with quality management systems and process automation supporting raw materials through final product QC.

Differentiator

Problem solved

Functional benefit

Products and services

  • EUV Metal Oxide Photoresists Suite of EUV metal oxide photoresists intentionally designed, optimized, and manufactured to meet industry specifications spanning resolution, sensitivity, linewidth roughness, and integration into manufacturing flows. Built on organometallic clusters with a tin-oxide core, the photoresists deliver superior EUV absorption, reduce photon shot noise versus Chemically Amplified Resists, and provide unparalleled etch selectivity. Produced at Inpria's advanced manufacturing plant in Corvallis, Oregon for semiconductor manufacturers using EUV lithography.
  • Developer and Ancillary Materials Supporting chemical materials including developer and other ancillary products provided alongside Inpria's EUV photoresists to deliver customers a holistic product solution for EUV lithography manufacturing processes.

Companies that use Inpria

Customer profile

Named customers1 record

Segments1 record

Ideal customer profiles1 record

Inpria technology and API

Technology

Technology focussed Yes

API detail

Has API
No
API docs
API detail

Core technology

AI maturity

App detail

Feature4 records

Inpria partnerships and signals

Strategic signal

Partnerships

Two partnerships are on record, tiered core.

  • Entegris, Inc.coreTechnology or Integration · 26 May 2026Non-exclusive cross-licensing agreement for EUV lithography technology. Parties cross-license metal oxide resist (MOR) patents, terminate pending Inter Partes Review challenges, and explore collaborative opportunities on resist formulation, precursor synthesis, and MOR-specific filtration for high-volume EUV manufacturing. Combines Inpria's resist materials expertise with Entegris' purification and materials handling expertise.
  • SK hynix Inc.coreStrategic or Co-development Partner · 2 August 2022Co-development partnership to apply Inpria's EUV metal oxide resist technology for manufacturing advanced DRAM chips. Supports SK hynix's technology roadmap as the semiconductor industry moves to smaller critical dimensions. Inpria's metal oxide photoresist platform enables efficient patterning of advanced node device architectures while significantly reducing cost of EUV patterning through standard spin coating process.

Scale indicators2 records

Recent moves5 records

Expansion highlights4 records

Inpria competitors and assessment

Company assessment

Market position

Competitive moat4 records

Key risks5 records

Key highlights6 records

Customer concentration

Inpria social profiles

Digital presence

Inpria financial estimates

Financial estimate

Revenue estimate

Valuation estimate

Inpria leadership team

Management profile

Number of profiles

Profiles4 records

Inpria funding detail

Funding detail

Funding overview

Funding rounds8 records

Investors13 records

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

Inpria M&A and investment

M&A and investment

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Inpria

What does Inpria do?

Inpria designs, develops, and manufactures a suite of EUV metal oxide photoresists together with developer and other ancillary materials for semiconductor manufacturers that have adopted EUV lithography. The photoresists use organometallic clusters with a tin-oxide core to deliver superior resolution, EUV absorption, and etch selectivity for advanced node chip patterning.

Is Inpria a public or private company?

Inpria is a private company. It is classified as corporate owned and is currently operating.

When was Inpria founded?

Inpria was founded in 2007. It employs 11 to 50 people.

Where is Inpria based?

Inpria is headquartered in Corvallis, United States, in the North America region.

How does Inpria make money?

One revenue line is on record: EUV Metal Oxide Photoresist Sales.

Does Inpria have an API?

No public API is recorded for Inpria.

What industry is Inpria in?

Inpria's product category is Semiconductor Lithography Materials. Its primary akta.pro industry code is HDAHAGAE, Photoresists & Lithography Chemicals (Resists/Developers/Anti-Reflective Coatings). Its NAICS code is 33441 and its SIC code is 3679.

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Live signals
OSU WordpressFrom discovery to industry: Oregon State spinouts are building the future of semiconductors | OSU TodayOregon State University is expanding its innovation ecosystem through the NSF FAST Engine Link to accelerate semiconductor startups and commercialize research. The university's OSU Advantage program has supported over 120 company formations, with notable spinouts like Inpria being acquired by JSR Corporation and Valliscor building new manufacturing facilities. These efforts aim to strengthen the U.S. semiconductor supply chain and workforce while generating significant economic growth in Oregon.Via TTInpria Co-Developing Metal Oxide Resist with SK hynix to Reduce Complexity of Patterning for Next-Generation DRAMJSR Corporation announced acceleration of co-development between its subsidiary Inpria and SK hynix Inc. to apply Inpria's Extreme Ultraviolet (EUV) metal oxide resist technology for manufacturing advanced DRAM chips. Inpria's metal oxide photoresist platform enables efficient patterning of advanced node device architectures while significantly reducing the cost of EUV patterning through a standard spin coating process. This collaboration supports SK hynix's technology roadmap as the semiconductor industry moves to smaller critical dimensions in chip manufacturing.MarketScreenerEntegris, Inc. and Jsr Corporation Announce Non-Exclusive Cross-Licensing to Euv LithographyEntegris and JSR announced a non-exclusive cross-licensing agreement to advance extreme ultraviolet lithography for next-generation chip manufacturing. The deal includes cross-licensing metal oxide resist patents, terminating current IPR challenges, and exploring collaborative opportunities on future photoresist materials.AijournEntegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV LithographyEntegris, Inc. and JSR Corporation announced a non-exclusive cross-licensing agreement to advance extreme ultraviolet (EUV) lithography for next-generation semiconductor chip manufacturing, with JSR subsidiary Inpria Corporation included in the arrangement. Under the agreement, the parties will cross-license metal oxide resist (MOR) patents, terminate pending Inter Partes Review challenges, and explore collaborative opportunities on resist formulation, precursor synthesis, and MOR-specific filtration for high-volume EUV manufacturing. The partnership combines JSR and Inpria's metal oxide resist innovation with Entegris' purification and materials handling expertise to support advanced semiconductor technologies for the AI era.YahooEntegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV LithographyEntegris, Inc. and JSR Corporation announced a non-exclusive cross-licensing agreement focused on metal oxide resist (MOR) patents for EUV lithography technology, with Inpria Corporation (JSR's subsidiary) also included in the arrangement. The agreement terminates ongoing Inter Partes Review challenges and establishes collaborative opportunities in resist formulation, precursor synthesis, and MOR-specific filtration for high-volume semiconductor manufacturing. The partnership combines JSR and Inpria's resist materials expertise with Entegris' capabilities in CVD precursors and materials handling to support AI-era chip production at advanced nodes.Business Wire BlogEntegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV LithographyEntegris, Inc. and JSR Corporation announced a non-exclusive cross-licensing agreement aimed at advancing extreme ultraviolet (EUV) lithography for next-generation chip manufacturing. Under the agreement, Entegris and Inpria will cross-license metal oxide resist patents, terminate ongoing Inter Partes Review challenges, and explore collaborative opportunities on future photoresist materials spanning resist formulation, precursor synthesis, and MOR-specific filtration. The collaboration combines JSR and Inpria's leadership in metal oxide resist materials with Entegris' expertise in MOR precursors and materials handling to support advanced semiconductor manufacturing for the AI era.WhaTechJSR Corporation/Inpria Corporation and Lam Research Enter Cross Licensing and Collaboration Agreement to Advance Semiconductor ManufacturingJSR Corporation and Lam Research announced on Sept 15, 2025 a non-exclusive cross-licensing and collaboration agreement to advance leading-edge semiconductor manufacturing, including dry resist technology for EUV lithography and next-generation materials for atomic layer etching and deposition. The deal dismisses all claims in Inpria v. Lam Research in Delaware and related IPR proceedings, with no financial terms disclosed.YahooLam Research and JSR Corporation/Inpria Corporation Enter Cross-Licensing, Collaboration Agreement to Advance Semiconductor ManufacturingLam Research and JSR Corporation/Inpria Corporation announced a non-exclusive cross-licensing and collaboration agreement to advance leading-edge semiconductor manufacturing. The partnership focuses on dry resist EUV lithography and next-generation materials for atomic layer etching and deposition, and both companies will dismiss related litigation.FinancialContent Business PageJSR Corporation/Inpria Corporation and Lam Research Enter Cross Licensing and Collaboration Agreement to Advance Semiconductor ManufacturingJSR Corporation/Inpria Corporation and Lam Research signed a cross-licensing and collaboration agreement to advance semiconductor manufacturing, integrating patterning resists with deposition and etch technologies. The companies will also dismiss all claims in their ongoing litigation and explore new precursor materials for advanced deposition.PR NewswireLam Research and JSR Corporation/Inpria Corporation Enter Cross-Licensing, Collaboration Agreement to Advance Semiconductor ManufacturingLam Research and JSR Corporation/Inpria announced a non-exclusive cross-licensing and collaboration agreement to advance semiconductor manufacturing, focusing on dry resist EUV lithography and next-generation materials. The partnership will integrate JSR's patterning resists with Lam's deposition and etch technologies, and both companies agreed to dismiss all claims in the Inpria v. Lam litigation.