Entegris

What Entegris does

Entegris is a NASDAQ-listed (ENTG) supplier of advanced materials, fluid handling, and contamination control solutions primarily serving semiconductor manufacturers. Founded in 1966 and headquartered in Billerica, Massachusetts, the company operates globally across major semiconductor manufacturing hubs including the United States, Taiwan, South Korea, Japan, Singapore, Malaysia, China, Germany, France, and Israel, with approximately 7,700 employees and a market capitalization of approximately $26.1 billion. Revenue for 2025 totaled approximately $3.2 billion, with Q1 2026 net sales of $811.9 million (up 5% year-over-year), gross margin of 46.9%, and adjusted EBITDA margin of 27.8%.

Entegris's product architecture spans four solution areas: Contamination Control (gas, liquid, and AMC filtration; purification), Fluid Management (fluoropolymer fittings, valves, tubing, chemical delivery, and process monitoring), Specialty Materials (premium graphite, PECVD coatings, silicon carbide components), and Substrate Handling (FOUPs, wafer carriers, CMP pads, slurries, and cleaning chemistries). The technology stack is anchored by proprietary CMP slurries for tungsten, dielectric, copper, aluminum, silicon, silicon carbide, and emerging materials; SiC slurries achieving 8–10 µm/hr removal rates with up to 80% recycling and 75% waste reduction; thermoset and thermoplastic polyurethane CMP pads (NexPlanar, Medea, Epic, Epic Power); and PVA post-CMP brushes. The company qualifies these materials into advanced logic (sub-10nm), DRAM, 3D NAND, and SiC power device processes.

Entegris generates revenue predominantly through direct enterprise sales of consumable materials (approximately 75% unit-driven) and capital equipment (approximately 25%), with multi-year contracts, undisclosed custom pricing via account managers, and a global field sales force backed by regional customer service centers. Customers include TSMC, Intel, and other leading semiconductor manufacturers; revenue mix is approximately 40% advanced logic and 30% memory. The company supplements organic R&D (~10% of revenue) with inorganic moves, including the $6.5 billion acquisition of CMC Materials in 2021 and the $700 million divestiture of Electronic Chemicals to FUJIFILM in 2023, and is expanding US capacity via up to $75 million in CHIPS Act funding for a Colorado Springs manufacturing center.

Name

Entegris

Legal name

Entegris, Inc.

Website

https://entegris.com

Company type

Public

Founded year

1966

Operating status

Operating

Headcount range

5,001–10,000 employees

Short description

Entegris supplies advanced materials, fluid handling, and contamination control solutions for semiconductor manufacturers (TSMC, Intel, memory fabs) and adjacent life sciences and power electronics customers, with $3.2B in 2025 revenue across global manufacturing and engineering operations.

Ownership category

akta.pro rank

Product category

Semiconductor Materials and Contamination Control

NAICS

Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables (334513), Measuring, Dispensing, and Other Pumping Equipment Manufacturing (333914)

SIC

Chemicals & Allied Products (2800), Miscellaneous Chemical Products (2890)

akta.pro primary industry

Process Gases & Gas Delivery Consumables (Specialty/Bulk/UHP) (HDAHAGAL)

akta.pro secondary industries

Hoses, Tubing & Fittings (Hydraulic/Pneumatic Lines & Connectors) (IMAHAGAH), Laboratory Consumables & Plasticware (Tips, Tubes, Plates, Filters) (HLAGAIAH)

Keywords

• Semiconductor materials supply
• Chemical mechanical planarization
• Contamination control filtration
• Fluid handling systems
• Wafer handling solutions

Headquarters

HQ city

Billerica

HQ country

United States

HQ region

North America

Offices6 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Operations, Technology or R&D, Personnel, Marketing or Sales, Infrastructure

Revenue model

1. Semiconductor Materials and Contamination Control Products: Sale of advanced materials including CMP slurries, pads, filters, specialty chemicals, fluid handling systems, wafer carriers, and process monitoring equipment for semiconductor manufacturing. Revenue is generated through product sales with approximately 75% unit-driven (consumables) and 25% capital expenditure-driven revenue.

Pricing tiers

Go-to-market motion1 record

Distribution channels4 records

Marketing channels6 records

Core offering

Entegris supplies advanced materials and process solutions for semiconductor and high-tech manufacturing, organized around four solution areas: Contamination Control (gas/liquid filtration, AMC filters, purification systems), Fluid Management (fittings, valves, tubing, chemical delivery, process monitoring), Specialty Materials (premium graphite, advanced coatings, SUPERSiC silicon carbide components), and Substrate Handling (FOUPs, wafer carriers, CMP pads, slurries, cleaning chemistries). It also delivers single-use fluid management products to biopharmaceutical customers under its Life Sciences sub-brand. Roughly 75% of revenue comes from unit-driven consumables such as slurries, filters, and gases, and 25% from capital equipment such as FOUPs and fluid handling systems.

Product overview

Entegris operates as a specialty materials company offering an integrated portfolio of contamination control, fluid management, specialty materials, and substrate handling solutions for semiconductor and high-tech manufacturing. The product architecture spans multiple solution areas: Contamination Control (encompassing gas/liquid filtration, AMC filters, and purification systems); Fluid Management Systems (including fittings, valves, tubing, chemical delivery, and process monitoring); Specialty Materials (premium graphite, advanced coatings, silicon carbide components); and Substrate Handling (FOUPs, wafer carriers, CMP pads, slurries, and cleaning solutions). The portfolio also extends to Life Sciences through single-use fluid management products. Key product families include CMP slurries (Semi-Sperse, WIN, iDIEL, Novus, EPOCH, SiLECT, SiCceed), CMP pads (NexPlanar, Medea, Epic, Epic Power), liquid/gas filters (Planarcap, Planargard, ProcessGard, Solaris), Post-CMP cleaning solutions (PlanarClean), specialty gases, and POCO Materials EDM graphite. The company positions itself as providing 'single source solutions' to eliminate contamination risk from incompatible materials, serving customers from wafer fabrication through assembly and test. Manufacturing footprint includes facilities in Taiwan (Kaohsiung), Colorado Springs, and global locations, with services including analytical services, FOUP refurbishment, and technical support.

Differentiator

Problem solved

Functional benefit

Brands

• POCO Materials: Premium graphite products for electrical discharge machining (EDM) and semiconductor applications
• Life Sciences

Products and services

• CMP Slurries Portfolio of chemical mechanical planarization slurries covering tungsten (Semi-Sperse, WIN), dielectric (iDIEL), aluminum (Novus), copper (EPOCH), silicon (SiLECT), silicon carbide (SiCceed), polycrystalline silicon carbide, diamond, nitride, sapphire, and rigid disk/magnetic head (Lustra, Transele) chemistries for wafer planarization in semiconductor manufacturing.
• CMP Pads Thermoplastic and thermoset polyurethane CMP pads (NexPlanar, Medea, Epic, Epic Power) with engineered hardness, pore sizes, compressibility, and groove patterns for wafer polishing, including dedicated SiC wafer polishing applications.
• Post-CMP Cleaning Solutions PlanarClean chemistries for copper barrier CMP steps and PlanarClean AG for advanced post-CMP processes, formulated for compatibility with specific slurry chemistries to remove abrasive particles and organic residue from wafers.
• Liquid Filters Membrane and media liquid filters including Planarcap (APR, NMB), Planargard (NMB, APR Bulk), ProcessGard (DSP, PDP Plus), and Solaris (APR CMP, NMB, Manifolds) families for slurries, chemicals, water, solvents, and photochemicals across feature sizes from sub-10nm to 90nm+ nodes.
• Gas Filters Inline alloy-22 gas filters, vent gas filters, bulk gas filters and housings, PTFE and stainless steel inline filters, nickel gas filters, surface mount gas filters, and AMC (Airborne Molecular Contamination) stepper/scanner and process tool filters for semiconductor fab environments.
• PlanarCore PVA Brushes Polyvinyl alcohol (PVA) brushes for post-CMP wafer cleaning, providing high zeta potential for particle repulsion and superior wafer-to-wafer uniformity.
• CMP Process Monitoring Process monitoring instruments including AccuSizer SPOS particle sizing systems, Nicomp N3000 DLS dynamic light scattering, SemiChem Advanced Process Monitor (APM), InVue GV148 concentration monitors, and integrated flow controllers for real-time slurry chemistry monitoring and yield optimization.
• Chemical Delivery Systems Solid and liquid chemical delivery systems for controlled dispensing of process chemicals in semiconductor manufacturing environments, including upstream ALD/CVD precursors and Advanced Deposition Materials (ADM).
• Specialty Gases Specialty gas products including specialty gas mixtures, gas delivery cylinder systems, gas delivery cabinet systems, and gases for semiconductor manufacturing processes including ion implantation.
• Fluid Management Systems Fluoropolymer-based fluid handling products including fittings (PrimeLock, Flaretek, Cynergy, PureBond, Quikgrip), valves (CR/CH Series, Integra, Integra Plus WS, EP PFA, plug, needle/metering, stopcock, check), tubing and pipe, fluid handling accessories, and integrated assemblies for ultra-high purity chemical delivery.
• Front Opening Unified Pods (FOUPs) and Wafer Carriers Front opening unified pods (FOUPs), wafer carriers, wafer shippers, and accessories for 300mm, 200mm, 150mm, 125mm, 100mm, 76.2mm (3"), and 2.5" or smaller wafer formats used in semiconductor fabrication.
• POCO Materials (Premium Graphite and EDM) POCO Materials division offering EDM (Electrical Discharge Machining) graphite grades including EDM-1 and EDM-AF5, plus industrial, semiconductor, life sciences, aerospace, and glass forming graphite grades for precision machining and high-temperature applications.
• Silicon Carbide (SiC) Solutions End-to-end SiC substrate processing ecosystem including SiC slurries (batch and single-wafer CMP formulations achieving up to 10 µm/hr material removal rates), SiC substrate cleaning solutions, SUPERSiC silicon carbide components, and specialty graphite components (epitaxy rings, furnace liners) designed for high-temperature SiC manufacturing processes.
• Advanced Coatings Plasma Enhanced Chemical Vapor Deposition (PECVD) coatings plus Caerus and Pegasus proprietary coating technologies for chucks and other critical components in semiconductor process tools.
• Life Sciences Solutions Single-use fluid management products including FluoroPure HDPE blowmolded drums (Advantage Trilayer and Trilayer), FluoroPure composite drums, custom products, single-use assemblies (2D and 3D bags, mixing systems, motion bioreactor bags, microcarrier and cell separation systems), NOWPak liner-based systems, Sentry quick connect systems, intermediate bulk containers, tube sets and manifolds, custom dip tubes, FluoroPure pressure vessels, and Aramus single-use bag assemblies for biopharmaceutical manufacturing.
• FOUP Services Field support, refurbishment, and regeneration services for Front Opening Unified Pods (FOUPs), including maintenance and performance optimization.
• Analytical Services Laboratory and analytical services including AMC testing using ISO/IEC 17025-accredited laboratories for air sample analysis, and technical support for contamination control optimization.

Quantifiable outcome

• Slurry recycling enables reintroduction of up to 80% of used SiC slurry, reducing hazardous waste by over 75%
• +3 more outcomes

Named customers2 records

Segments4 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature6 records

Partnerships

Two partnerships are on record, tiered core and minor.

• JSR Corporation / Inpria CorporationcoreTechnology or Integration · 26 May 2026Non-exclusive cross-licensing agreement to advance EUV lithography for next-generation semiconductor chip manufacturing. Parties cross-license metal oxide resist (MOR) patents, terminate pending Inter Partes Review challenges, and explore collaborative opportunities on resist formulation, precursor synthesis, and MOR-specific filtration for high-volume EUV manufacturing. Combines JSR and Inpria's resist innovation with Entegris' purification and materials handling expertise.
• Ashland Inc.minorOthers · 15 May 2026Bertrand Loy, former President and CEO of Entegris and current Executive Chair, appointed to Ashland's board of directors effective May 15, 2026. Ashland cited Loy's experience managing global technology operations and scaling industrial businesses.

Scale indicators11 records

Recent moves8 records

Expansion highlights6 records

Direct peers

• FUJIFILM Electronic Materials: FUJIFILM acquired Entegris' Electronic Chemicals division in 2023 for ~$700M and now competes head-on in CMP slurries, post-CMP cleaners, and specialty chemicals for semiconductor manufacturing, with overlapping customer base at tier-1 fabs.
• JSR Corporation: JSR is a leading photoresist manufacturer and, through its Inpria subsidiary, the leader in metal oxide EUV resists. JSR is simultaneously a strategic partner (via the May 2026 cross-license) and a competitor in advanced lithography materials that Entegris serves.
• Avantor: Avantor supplies specialty chemicals, filtration, and single-use fluid management products for life sciences and advanced materials customers — directly comparable to Entegris' Life Sciences division (NOWPak, FluoroPure, Aramus) and overlapping in semiconductor wet-etch and cleaning chemistries.
• Shin-Etsu Chemical: Shin-Etsu is a global leader in silicon wafers, photoresists, and rare-earth magnets, with its semiconductor materials business competing with Entegris across advanced-node substrates, resists, and CMP-adjacent chemistries for tier-1 fabs.
• Tokyo Ohka Kogyo (TOK): Tokyo Ohka Kogyo is a leading global supplier of photoresists, advanced packaging materials, and CMP slurries, directly competing with Entegris in semiconductor chemistries, particularly for memory and advanced logic customers in Asia.
• CMC Materials (acquired by Entegris): CMC Materials (formerly Cabot Microelectronics) was acquired by Entegris in 2021 for $6.5B and now operates as part of Entegris' CMP slurries business; historically a direct competitor, now fully integrated.
• Merck KGaA (EMD Electronics): Merck KGaA's Electronics segment (including the acquired Versum Materials and Intermolecular businesses) is the most direct competitor to Entegris in semiconductor specialty materials, delivering slurries, deposition materials, and delivery systems for advanced-node fabs globally.

Broad incumbents

• Honeywell Electronic Materials: Honeywell supplies high-purity process chemicals, electronic gases, and gas delivery systems for semiconductor manufacturing, directly competing with Entegris' specialty gases and chemical delivery portfolio while serving additional industrial markets.
• Pall Corporation (Danaher): Pall Corporation, a Danaher subsidiary, is a global leader in industrial filtration including gas, liquid, and membrane filtration for semiconductor and life sciences customers. Pall competes with Entegris in liquid and gas filtration while offering a broader industrial filtration portfolio beyond semiconductors.

Regional players

• Sumco: Sumco is a leading Japanese silicon wafer manufacturer serving advanced logic and memory fabs globally. While Entegris does not make silicon wafers, Sumco is a comparable Japanese semiconductor materials supplier with overlapping customer base and exposure to the same end-market cyclicality.

Market position

Strengths1 record

Weaknesses5 records

Competitive moat5 records

Key risks6 records

Key highlights7 records

Customer concentration

• Xx.com/entegris
• YouTubeyoutube.com/user/EntegrisInc
• Facebookfacebook.com/EntegrisInc
• LinkedInlinkedin.com/company/entegris
• Instagraminstagram.com/entegrisinc

Revenue estimate

Valuation estimate

Number of profiles

Profiles9 records

Subsidiaries1 record

Funding overview

Funding rounds1 record

Investors1 record

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A14 records

Investments3 records

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Entegris