Beneq

What Beneq does

Beneq is a privately held Finnish capital-equipment manufacturer specializing in Atomic Layer Deposition (ALD) systems for industrial and research applications, headquartered in Espoo, Finland. The company traces its ALD lineage to 1984, when it established the world's first industrial ALD production line, and today operates with 170+ employees across wholly-owned subsidiaries in the US (Beneq, Inc., Boulder, CO) and Japan (Beneq K.K., Yokohama), plus regional partner presence in Taiwan, China, and Europe.

The product portfolio is organized into two divisions. Semiconductor ALD includes the Transform® cluster tool series (general purpose, Transform XP with in-cycle annealing, and Transform 300 for 300mm More-than-Moore), the Transmute™ high-throughput platform for wide-bandgap power/RF/microLED, and Prodigy™ for compound semiconductor and MEMS batch processing. Advanced ALD comprises the P Series large-substrate systems (including the P1500, billed as the world's largest ALD reactor), the Spatial Series with the Genesis roll-to-roll ALD system, and the TFS research platforms, of which the TFS 200 has 300+ installed units. Supporting services include BeneqCare® tiered support contracts, spare parts, and a three-level certified training program.

Beneq sells primarily through direct enterprise field sales to semiconductor manufacturers, R&D institutions, and optical component makers, complemented by regional partners in Asia. Revenue is generated from capital-equipment hardware sales, recurring BeneqCare service and spare-parts subscriptions, and professional training services. The installed base exceeds 400 tools globally, with customers including Philips MEMS Foundry, Exosens, Kinko Optical, Laser Zentrum Hannover, and an unnamed Tier 1 Asian semiconductor manufacturer. The company is privately held with disclosed venture backing from RUSNANO, Tesi, and VIA Equity totaling approximately $48.5M across rounds dating to 2012.

Name

Beneq

Legal name

Beneq Oy

Website

https://beneq.com

Company type

Private

Founded year

1984

Operating status

Operating

Headcount range

51–100 employees

Short description

Beneq is a Finnish privately held manufacturer of Atomic Layer Deposition (ALD) equipment serving semiconductor, optical coating, energy storage, and research customers globally, with 400+ tools installed and a portfolio spanning cluster tools, batch systems, and roll-to-roll platforms.

Ownership category

akta.pro rank

Product category

Semiconductor Manufacturing Equipment (Atomic Layer Deposition)

NAICS

Semiconductor and Other Electronic Component Manufacturing (3344), Semiconductor and Other Electronic Component Manufacturing (33441)

SIC

Electronic Components & Accessories (3670)

akta.pro primary industry

Deposition Equipment (CVD/PVD/ALD/Epitaxy) (HDAHAEAB)

Keywords

• Atomic layer deposition equipment
• Semiconductor manufacturing equipment
• Thin film coating systems
• Plasma enhanced ALD
• Optical coating production

Headquarters

HQ city

Vantaa

HQ country

Finland

HQ region

Europe

Offices5 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Supply Chain, Operations, Technology or R&D, Marketing or Sales, Infrastructure

Revenue model

1. ALD Equipment Hardware Sales: Sale of Atomic Layer Deposition equipment including semiconductor ALD tools (Transform series, Transmute, Prodigy) and advanced ALD systems (P series, TFS series, Spatial series). Equipment ranges from research-scale tools to high-volume production systems.
2. Spare Parts: Replacement parts and components for ALD equipment including ellipsometers, fluidized bed reactors, reaction chambers, plasma heads, and precursor delivery systems. BeneqCare customers receive 5% discount on spare parts.
3. Service and Support Contracts (BeneqCare): Tiered support packages offering technical support response times (6h or 24h), onsite maintenance, preventive maintenance, user training, and remote support options including AR support.
4. Training Services: Three-level certification programs: ALD Operator (Level 1), ALD Maintenance Associate (Level 2), and ALD Engineer (Level 3) training delivered at customer sites or Beneq premises by Ph.D. level instructors.

Pricing tiers

Go-to-market motion3 records

Distribution channels3 records

Marketing channels6 records

Core offering

Beneq designs, manufactures, and services Atomic Layer Deposition (ALD) equipment for thin film deposition at Angstrom-level precision. Its portfolio spans semiconductor ALD cluster tools (Transform® Series, Transmute™, Prodigy™) and advanced ALD systems (P Series, Spatial Series, TFS Series, C2R™) used by semiconductor manufacturers, optical component producers, and R&D institutions. The company also provides BeneqCare® service contracts, spare parts, and certified ALD training programs.

Product overview

Beneq is the global leader in industrial and research atomic layer deposition (ALD) equipment since 1984. The product portfolio is organized into two main categories: Semiconductor ALD and Advanced ALD. Semiconductor ALD includes the Transform® Series (cluster tools for power, RF, MEMS, LED, photonics), Transmute™ (high-throughput platform for wide bandgap power and RF devices), and Prodigy™ (batch tool for compound semiconductors and MEMS). Advanced ALD includes the P Series (large-scale production systems including the world's largest ALD reactor P1500), Spatial Series (roll-to-roll ALD for flexible substrates), and TFS Series (research and R&D platforms with over 300 units installed). Supporting services include BeneqCare® technical support, spare parts/upgrades, and professional training programs. The company employs 170+ people across offices in Finland (HQ), USA, China, Japan, and Taiwan, with 400+ ALD tools installed worldwide.

Differentiator

Problem solved

Functional benefit

Brands

• Beneq Transform: ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
• Beneq Transmute
• Beneq Prodigy
• Beneq C2R
• P Series
• TFS Series
• Genesis
• BeneqCare

Products and services

• Beneq Transform® Series Cluster tool ALD platform for semiconductor device fabrication, offering one-stop solutions for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
• Beneq Transmute™ High-throughput ALD platform for wide bandgap power, RF, and specialty device production. Combines plasma pre-treatment, plasma-enhanced ALD, and thermal batch ALD in a configurable cluster tool designed for 200mm fabs.
• Beneq Prodigy™ Stand-alone batch ALD tool for high-volume manufacturing of compound semiconductors and MEMS for VCSEL, LED, and MEMS manufacturers.
• P Series Large-scale general purpose ALD production systems for coating diverse substrate types and thick films, including the P1500 — the world's largest ALD reactor.
• Spatial Series (including Genesis) High-throughput spatial ALD systems for continuous web coating applications such as batteries and flexible electronics, including the Genesis roll-to-roll system.
• TFS Series ALD research and batch production platforms. TFS 200 is the most recognized ALD platform in academic and corporate R&D, with over 300 units installed; TFS 500 is the ultimate thin film system for ALD research and batch production.
• Beneq C2R™ Spatial ALD system with Plasma Enhanced ALD (PEALD) for high volume manufacturing, delivering deposition rates up to 2000 nm/h and low-temperature processing compatible with polymer substrates for AR waveguide applications.
• BeneqCare® Service and Support Plan Comprehensive service and support plan for Beneq ALD tools offering tiered technical support, onsite maintenance, spare parts with 5% discount, remote AR support, and VPN troubleshooting.
• Spare Parts and Upgrades Complete range of spare parts and upgrades for Beneq ALD equipment, including ellipsometers, fluidized bed reactors, reaction chambers, plasma heads, and precursor delivery systems.
• Certified ALD Training Programs Three-level certified ALD training program (Operator, Maintenance Associate, Engineer) delivered by Ph.D. level instructors at customer premises or Beneq facilities.

Quantifiable outcome

• C2R system delivers deposition rates up to 2000 nm/h - up to 100 times faster than conventional ALD
• +3 more outcomes

Named customers5 records

Segments6 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature6 records

Partnerships

Five partnerships are on record, tiered core and minor.

• Kinko Optical Co., Ltd.coreStrategic or Co-development Partner · 20 February 2026Taiwan-based optical design manufacturer adopted Beneq's C2R plasma-enhanced spatial ALD system for high-volume production of AR waveguides for XR glasses. Collaboration aims to accelerate AR waveguide commercialization and expand into automotive heads-up displays and enterprise training tools.
• Lung Pien Vacuum Industry Co. Ltd.coreStrategic or Co-development Partner · 1 May 2023Strategic partnership between Finland-based Beneq and Taiwan-based Lung Pien Vacuum Industry Co. Ltd. to develop ALD solutions for optical coating applications including camera lenses and automotive optics. Partnership announced in May 2023.
• ExosenscoreStrategic or Co-development PartnerCollaboration on lead-free Microchannel Plates (MCPs) with ALD technology, enhancing precision, performance, and manufacturing efficiency for defense and scientific instrument applications.
• Laser Zentrum Hannover (LZH)minorStrategic or Co-development PartnerGerman research institute extended optical coating capabilities to include ultrafast ALD depositions with the Beneq C2R system, setting the stage for ultrafast ALD adoption in optics industry.
• Philips MEMS FoundrycoreTechnology or IntegrationAdopted Beneq Transform ALD cluster tool for MEMS manufacturing, demonstrating integration of Beneq technology into major semiconductor manufacturing facilities.

Scale indicators8 records

Recent moves6 records

Expansion highlights6 records

Market position

Strengths5 records

Competitive moat5 records

Key risks6 records

Key highlights7 records

Customer concentration

• Xx.com/beneq_aerosol
• Facebookfacebook.com/beneqcorporation
• LinkedInlinkedin.com/company/beneq-oy
• Instagraminstagram.com/beneqco

Compliance3 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles6 records

Subsidiaries2 records

Funding overview

Funding rounds3 records

Investors3 records

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A1 record

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Beneq