Raith

What Raith does

Raith GmbH is a privately held German manufacturer of maskless nanofabrication systems and characterization solutions, headquartered in Dortmund and operating globally with approximately 450 employees. The company designs, produces, and services high-precision electron beam lithography (EBL) systems (EBPG, VOYAGER, PIONEER/E-LINE/Raith150), focused ion beam systems (VELION, IONMASTER), laser lithography systems (PICOMASTER, PICOMASTER XF, ATHOS), and imaging/analysis tools (Chipscanner, VECTOR). Its technology stack combines proprietary capabilities — including UltraPositioning laser-interferometer stages, IonSelect multi-species ion sources, SmartMotion stitch-free patterning, MagSIMS secondary ion mass spectrometry, and the Digital RAITH / NANOSUITE software environment — to deliver sub-10nm patterning with <5nm overlay accuracy. Mix-and-match workflow solutions allow customers to combine EBL, FIB, and laser lithography in a single integrated toolchain.

Raith serves semiconductor manufacturers, photonics and quantum technology researchers, defense and space programs, life science developers, materials science labs, optical telecommunication firms, and a large base of academic and rapid-prototyping users at institutions such as Stanford, MIT, UC Berkeley, Chalmers, EPFL, and Sandia National Laboratories. Long-tenured industrial customers include United Monolithic Semiconductors, which has operated Raith EBPG systems in GaAs/GaN production for 28 years. Wholly-owned subsidiaries RAITH B.V. and RAITH Laser Systems B.V. (Netherlands) anchor the European operational footprint alongside German R&D and manufacturing.

Revenue is generated through direct enterprise sales of high-ASP capital equipment (configured systems range from benchtop upgrade kits to fully integrated production tools), supplemented by recurring service and maintenance contracts, field service engineering, training, application support, updates and upgrades, and software (Digital RAITH, HoloSuite). Sales are conducted via a global field sales and service organization with regional application and development centers, supported by an event-driven and community-led marketing motion. The company has invested consistently in product innovation (IONMASTER in 2024, VECTOR and ATHOS in 2025, ELPHY 9th generation in 2026), executed the Xnovo Technology acquisition in late 2024, and opened a new Experience Center Europe in Dortmund in 2026, signaling an active expansion phase in both product surface and customer engagement.

Name

Raith

Legal name

Raith GmbH

Website

https://raith.com

Company type

Private

Founded year

1980

Operating status

Operating

Headcount range

251–500 employees

Short description

Raith GmbH is a German manufacturer of maskless electron beam, ion beam, and laser lithography systems for nano- and microfabrication, serving semiconductor, photonics, quantum technology, defense, and academic research customers worldwide with a global direct sales and service organization.

Ownership category

akta.pro rank

Product category

Nanofabrication Equipment

NAICS

Semiconductor Machinery Manufacturing (333242)

SIC

Measuring & Controlling Devices, Nec (3829)

akta.pro primary industry

Mask/Reticle Manufacturing & Inspection Equipment (HDAHAEAK)

akta.pro secondary industry

Photomask Blanks, Masks & Reticles (Quartz/PELlicles) (HDAHAGAD)

Keywords

• Electron beam lithography
• Focused ion beam systems
• Nanofabrication equipment
• Laser lithography systems
• Maskless lithography

Headquarters

HQ city

Dortmund

HQ country

Germany

HQ region

Europe

Offices3 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Technology or R&D, Supply Chain, Operations, Marketing or Sales, Infrastructure

Revenue model

1. Nanofabrication Equipment Sales: Sale of electron beam lithography systems (EBPG, VOYAGER, PIONEER), focused ion beam systems (VELION), laser lithography systems (PICOMASTER, ATHOS), and imaging/analysis tools (IONMASTER, CHIPSCANNER, VECTOR). Equipment ranges from benchtop upgrade kits (ELPHY) to fully integrated production systems.
2. Service and Support Contracts: Annual maintenance contracts, field service engineering, remote support, updates and upgrades, and on-demand service. Worldwide sales and service structure with dedicated experts in international application and development centers.
3. Professional Services: Installation, site surveys, training, and application support services delivered by Field Service Engineers and technical support teams.
4. Software Solutions: Digital RAITH software for nanofabrication, pattern generation, process control, and holographic design (HoloSuite).

Go-to-market motion3 records

Distribution channels3 records

Marketing channels7 records

Core offering

Raith manufactures and sells maskless nanofabrication systems and characterization solutions, including electron beam lithography (EBL) systems, focused ion beam (FIB) systems, laser lithography systems, and imaging/analysis tools. The company provides integrated workflow solutions spanning high-precision patterning, imaging, and analysis at the nanoscale for research and industrial applications across semiconductors, photonics, quantum technologies, life sciences, and other sectors.

Product overview

RAITH is a global nanotech solutions provider offering a comprehensive portfolio of nanofabrication systems and characterization solutions. The product portfolio spans four main technology categories: Electron Beam Lithography (EBPG, VOYAGER, PIONEER/E-LINE/Raith150), Focused Ion Beams (VELION, IONMASTER), Laser Lithography (PICOMASTER, PICOMASTER XF, ATHOS), and Imaging & Analysis (Chipscanner, VECTOR). Supporting these core products are software solutions including Digital RAITH and design software like HoloSuite. RAITH also offers integrated solutions including Patterning, Mix and Match, Holography Workflow, and Process Control. The company serves diverse sectors including semiconductors, photonics, quantum technologies, optical telecommunication, consumer electronics, life sciences, defense & space, materials science, and research/rapid prototyping. With approximately 450 employees and headquarters in Dortmund, Germany, RAITH operates additional entities including RAITH B.V. and RAITH Laser Systems B.V.

Differentiator

Problem solved

Functional benefit

Brands

• Digital RAITH: Mature software engineering for seamless integration, efficient task support, and user-friendly operation in nanofabrication
• NANOSUITE
• HoloSuite

Products and services

• EBPG RAITH's benchmark electron beam lithography system delivering highest throughput, automation, and precision for reliable and repeatable results with utmost precision to ensure high device yields on various substrates. Used by semiconductor manufacturers and research institutions.
• VOYAGER An EBL system combining stable high performance and ease of use at an attractive price/performance ratio, making it a versatile solution for both research and industrial applications with traxx and periodixx features.
• PIONEER | E-LINE | Raith150 Multifunctional system family for maximum versatility combining SEM imaging with electron beam lithography, offering stitch-free patterning and sample imaging of highest quality. Used for both research and industrial applications.
• ELPHY Upgrade kit for SEM or FIB-SEM that enables nanopatterning capabilities, now in its 9th generation with an innovative pattern generator. Adds maskless lithography functionality to existing electron microscopes.
• VELION Multi ion species FIB-SEM system with sophisticated FIB technology including non-Ga capabilities, highest-fidelity sample stage, and dedicated patterning engine for nanofabrication applications.
• IONMASTER State-of-the-art high-resolution analytical ion microscope combining liquid metal alloy ion source (LMAIS) with magnetic sector SIMS unit and laser interferometer stage for correlative 2D/3D imaging, nano-analytics and advanced nanofabrication. SIMS resolution below 20nm.
• PICOMASTER Direct laser writers with ultimate resolution for holographic applications and optical security.
• Picomaster XF Highest-throughput grayscale lithography system for laser direct writing applications.
• ATHOS Advanced laser lithography system specifically engineered for holographic applications and optical security, available in ATHOS Nano (near-electron beam lithography level resolution) and ATHOS Rapid (high throughput grayscale exposure) variants.
• Chipscanner Large-area 3D SEM imaging system for comprehensive surface analysis and characterization.
• VECTOR AI-powered inspection and metrology system for enhanced SEM measurements and nanofabrication process control. Enables automated quality management and data acquisition at the nanoscale.
• Service Contracts Annual maintenance contracts, field service engineering, remote support, updates and upgrades, and on-demand service. Delivered worldwide by Field Service Engineers and dedicated experts in international application and development centers.
• Installation, Training, and Application Support Services Installation, site surveys, training, and application support services delivered by Field Service Engineers and technical support teams.

Quantifiable outcome

• Sub-10nm line writing capability demonstrated
• +6 more outcomes

Named customers21 records

Segments10 records

Ideal customer profiles5 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

AI capability1 record

Feature13 records

Partnerships

One partnership is on record.

• ELEVATE PARTNERSminorImplementation/ SI/ Consulting PartnerStrategy consulting partner referenced in legal notice. ELEVATE PARTNERS assists with strategic execution and business development initiatives.

Scale indicators3 records

Recent moves8 records

Expansion highlights6 records

Broad incumbents

• Thermo Fisher Scientific (FEI): Thermo Fisher's FEI division is a broad incumbent producing electron beam, ion beam and dual-beam (FIB-SEM) instruments for nanolithography and nanoanalytics, competing with Raith's VELION, IONMASTER and EBL platforms from inside a much larger life-science and analytical-instruments portfolio.
• Carl Zeiss (ZEISS): ZEISS produces electron, ion and X-ray microscopy solutions and is a broad incumbent in nanofabrication and nanoanalytics; its Crossbeam FIB-SEM systems compete directly with Raith's VELION and IONMASTER offerings.
• Hitachi High-Tech: Hitachi High-Tech manufactures electron microscopes and focused ion beam systems used in nanofabrication and semiconductor process control, making it a broad incumbent peer to Raith's FIB-SEM and analytical instrumentation portfolio.
• KLA Corporation: KLA is a broad incumbent in semiconductor process control and inspection; its e-beam inspection and metrology tools place it in indirect competition with Raith's VECTOR and Chipscanner inspection/analysis products for advanced nodes.

Direct peers

• IMS Nanofabrication: IMS Nanofabrication is a direct peer in charged-particle lithography (ion-beam and electron-beam multi-beam systems) for advanced photomask writing, competing with Raith's EBL platforms at the high-end mask and device-lithography customer base.
• JEOL: JEOL is a direct peer — it manufactures electron beam lithography, focused ion beam (FIB) systems, and scanning electron microscopes, overlapping head-on with Raith's EBPG, VELION, IONMASTER and Chipscanner product lines for nanofabrication and nanoanalytics customers.
• Heidelberg Instruments: Heidelberg Instruments is a direct peer in maskless laser lithography and direct-write systems, overlapping with Raith's PICOMASTER and ATHOS product lines for photonics, micro-optics, MEMS and optical-security applications.
• Crestec (Crestec Inc.): Crestec is a direct peer producing electron beam lithography systems (e.g., EBM series) used in nanofabrication R&D, competing closely with Raith's EBPG, VOYAGER and PIONEER EBL offerings.
• Vistec Semiconductor Systems: Vistec Semiconductor Systems was a direct peer in electron beam lithography for mask writing and is now part of Raith following its 2013 acquisition; it remains the historical heritage product line that anchors Raith's mask-writing heritage.

Emerging players

• Nanoscribe (BICO Group): Nanoscribe specializes in two-photon micro/nano 3D printing for photonics and micro-optics, an emerging alternative/complement to maskless lithography that overlaps with Raith's photonics and micro-optics use cases.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks6 records

Key highlights7 records

Customer concentration

• Facebookfacebook.com/RaithGmbh
• LinkedInlinkedin.com/company/raith-gmbh

Compliance1 record

Revenue estimate

Valuation estimate

Number of profiles

Profiles2 records

Subsidiaries2 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A2 records

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Raith