Toho Technology

What Toho Technology does

Toho Technology Inc. is the Chicago, Illinois-based US subsidiary of Japan's Toho Group, a Nagoya-headquartered conglomerate with roots dating to 1819. The company manufactures and distributes precision industrial metrology and wet process equipment serving semiconductor fabs, flat panel display (FPD) manufacturers, and glass producers. Its metrology portfolio spans thin film stress measurement (FLX Series with automated FLX-2320-L variant, based on KLA-Tencor-transferred dual-wavelength laser scanning technology), film thickness (TohoSpec 3100, originally Nanometrics), Hall Effect measurement (HL9900), electrochemical CV profiling (ECVPro+), contact and optical profilometry (FP and FPM Series, the latter from Zygo), four-point probe resistivity, CV mapping, and Seebeck effect measurement. The wet process division delivers precision cleaners, etchers, and strippers for display and architectural glass substrates, with 300+ precision cleaners shipped and quantified sub-micron particle removal performance. An automation product line rounds out the offering with PLC migration adapters, multiplexing systems, relay boxes, interface terminals, and terminal blocks. The company also runs ISO 9001/14001-certified contract manufacturing for complex electromechanical assemblies across US, China, Japan, and Indonesia sites.

The business model rests on one-time capital equipment sales (quote-based, no public pricing) supplemented by recurring service, maintenance, and annual support contracts delivered through direct technicians in the Americas, Japan, China, and Indonesia and certified distributor service professionals worldwide. Go-to-market is hybrid: direct enterprise field sales in North America via a Chicago-based Technical Account Manager model targeting process engineers, combined with a network of exclusive and non-exclusive regional distributors covering Europe, India, Korea, China/HK, Israel, and Southeast Asia. The company sells across three primary customer segments — semiconductor and microelectronics manufacturers (HB-LED, compound semiconductor, strained silicon, SOI), FPD manufacturers (color filter, TFT, ODF, photo spacer lines), and industrial glass manufacturers (display, architectural, dynamic, medical imaging sensor substrates) — with a horizontal segmentation approach. Distribution partnerships include Kateeva (OLED) and Kramer Sonic Industries (SAM), while the CERTUS sub-brand extends into food safety following a 2016 pathogen detection technology license.

Name

Toho Technology

Legal name

Toho Technology Inc.

Website

https://tohotechnology.com

Company type

Private

Founded year

1819

Operating status

Operating

Headcount range

501–1,000 employees

Short description

Toho Technology, the Chicago-based US arm of Japan's 200-year-old Toho Group, manufactures precision metrology (thin film stress, film thickness, ECV profiling, Hall Effect, optical profilometry) and wet process equipment for semiconductor fabs, flat panel display makers, and glass manufacturers worldwide, distributing via direct US sales and a 10-country distributor network.

Ownership category

akta.pro rank

Product category

Semiconductor Metrology Equipment

NAICS

Semiconductor Machinery Manufacturing (333242), Other Measuring and Controlling Device Manufacturing (334519), Electrical Equipment Manufacturing (3353)

SIC

Laboratory Analytical Instruments (3826), Instruments For Meas & Testing Of Electricity & Elec Signals (3825)

akta.pro primary industry

Metrology, Inspection & Process Control Equipment (HDAHAEAH)

akta.pro secondary industries

Etch & Strip Equipment (Dry/Wet/Ashing) (HDAHAEAC), Test, Measurement & Calibration Equipment Manufacturing Services (ATE, DAQ, metrology electronics) (IMAGAGAH), Sensors & Instrumentation Electronics Manufacturing Services (Transmitters, analyzers, industrial sensors) (IMAGAGAL)

Keywords

• Precision metrology equipment
• Semiconductor measurement systems
• Thin film stress analysis
• Glass wet process cleaning
• Flat panel display inspection

Headquarters

HQ city

Chicago

HQ country

United States

HQ region

North America

Offices6 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Personnel, Operations, Technology or R&D, Marketing or Sales, Infrastructure

Revenue model

1. Capital Equipment Sales: Sale of precision metrology systems (stress measurement, film thickness, ECV, Hall Effect, optical profilers), wet process equipment (cleaners, etchers, strippers), and automation components (PLC adapters, terminal blocks, relay boxes, interface terminals, multiplexing systems). Equipment sales are one-time capital purchases with long sales cycles targeting semiconductor, display, and glass manufacturers.
2. Service, Maintenance & Support: Comprehensive technical support including installation, training, preventative maintenance, spare parts sourcing, remote access troubleshooting, and on-site repair. Annual maintenance contracts and extended warranty programs tailored to customer operations. Service is provided globally through direct technicians and certified distributor service professionals.
3. Contract Manufacturing Services: Contract assembly of highly complex mechanical and electromechanical assemblies, complete machines, printed circuit boards, and subsystems. Specializing in low/medium volume, high complexity production with ISO 9001 and 14,000 certified manufacturing solutions. Bridges Asian customer and support needs with local project management.

Pricing tiers

Go-to-market motion2 records

Distribution channels3 records

Marketing channels5 records

Core offering

Toho Technology manufactures and distributes precision metrology systems (thin film stress, film thickness, Hall Effect, ECV profiling, optical profilometry, four-point probe, CV mapping, Seebeck measurement) and wet process cleaning/etching/stripping systems for semiconductor wafer fabs, flat panel display manufacturers, and glass substrate producers. The company also supplies industrial automation components (PLC migration adapters, multiplexing systems, relay boxes, interface terminals, terminal blocks) and offers ISO-certified contract manufacturing services for complex electromechanical assemblies.

Product overview

Toho Technology offers a comprehensive portfolio of precision industrial and life-science technologies organized into three core product categories. The Metrology & Material Characterization division includes thin film stress analysis systems (FLX Series including automated FLX-2320-L), film thickness measurement (TohoSpec 3100), Hall Effect measurement (Toho HL9900), electrochemical capacitance voltage profiling (ECVPro+), contact profilometry (FP Series), optical profilometry (FPM Series), four point probe sheet resistivity testing, CV mapping systems, and Seebeck effect measurement. The Glass Wet Process division provides precision cleaners, etchers, and strippers for display and architectural glass. The Automation division supplies Toline XM multiplexing systems, relay boxes, interface terminals, terminal blocks, and PLC migration adapters for Mitsubishi, OMRON, and Yasakawa PLCs. Additionally, Toho offers ISO-certified contract manufacturing services for complex mechanical and electromechanical assemblies.

Differentiator

Problem solved

Functional benefit

Brands

• CERTUS: A new brand in the food safety industry launched in 2017
• Toho International

Products and services

• FLX Series Thin Film Stress Measurement Systems Thin film stress measurement systems incorporating KLA-Tencor's patented dual wavelength technology for precise stress analysis on deposited thin films, available in thermal cycling and auto-rotation models. Measures stress from -65°C to 500°C across reflective, transparent, and translucent films.
• FLX-2320-L Automated Thin Film Stress Analysis Fully automated thin-film stress metrology platform with cassette-to-cassette robotic wafer handling and dual-wavelength laser scanning for 4-8 inch wafers. Delivers 1–4000 MPa stress measurement with 1.3 MPa (1σ) reproducibility and 25 WPH throughput.
• TohoSpec 3100 Spectroscopic Reflectometer Low-cost film thickness measurement system using small-spot spectroscopic reflectometry with solid-state linear diode array. Handles single-layer films and up to 3-layer stacks in the 100Å to 30µm thickness range, with up to 15 standard measurement algorithms.
• Toho HL9900 Hall Effect Measurement System Turnkey high-performance Hall Effect system for measuring resistivity, carrier concentration, and mobility in semiconductors. Modular design with upgrade paths, suitable for silicon and compound semiconductors, with both low and high resistivity capabilities.
• ECVPro+ Electrochemical Capacitance Voltage Profiling System Market-leading all-in-one system for carrier concentration profiling using ECV profiling. Features built-in blast contact (40V), dual-frequency and AC measurement modes, real-time etch visualization, and platinum reference electrode eliminating manual calibration. No mercury-based electrodes required; SEMI S2/S8/S14 compliant.
• FP Series Large Area Contact Profilometry Large Area Contact Profilometry systems for mass production and research facilities providing micron to nanometer range measurements for surface flatness, roughness, waviness, stress, and feature dimensions on FPD substrates larger than 300mm.
• FPM Series 3D Optical Profilometry Zygo 3D Large Area Optical Profilometry systems using white light interferometer technology for fast, non-contact, high-precision 3D metrology on flat panel displays and large displays. Features OneShot and SureShot proprietary measurement modes, high-speed SWLI, micron absolute positioning, and nanometer stability. Throughput of 40K glass/month with 4-head configuration.
• 4 Point Probe Sheet Resistivity System Four-point probe system for sheet resistivity measurements on semiconductors, metals, and compound semiconductors. Measures 50 sites in 90 seconds with repeatability <0.2% typical. Measurement range from 1mΩ/sq to 800kΩ/sq.
• CV Mapping System Automated capacitance voltage mapping system using Four Dimensions' patented inverse mercury probe technology for non-destructive carrier density profiling and wafer characterization without sample damage.
• TST Seebeck Effect Measurement System Seebeck Effect Measurement Systems for Seebeck coefficient measurements in wide temperature range of 80K-700K using cryogenic systems or hot thermal stage systems for thermoelectric material optimization and characterization.
• Toline XM Series Multiplexing System Compact multiplexing system that multiplexes PLC I/O signals and transmits to two-conductor rails while carriers are in motion. Controls up to 32 carriers simultaneously with high-voltage multiplexed signals ensuring stable communication and oxide film removal on sliding mediums.
• Relay Boxes / Switch Board Modules Plug-and-play relay box and switch board modules providing relay selection, fuse design, and wiring layouts with multiple configurations including PXGR, PXGRS, PXGRF, PXGRM, PXLYM, PX7FR, and FTB series.
• Interface Terminals Interface terminals enabling fast integration and compact wiring of sensors and devices with PM5DW, PS7DS, PS7L, PS5D, Servo Interface, and PM5WR series featuring various connector options and signal isolation capabilities. Available with 3M, Omron, AMP, and Fujitsu connector variations.
• Terminal Blocks Customizable terminal blocks for efficient wiring including KT/UK, UCTB, UKD, UKE, UCK, and UK-SD series for power distribution, signal disconnection, finger safe grounding, and diode/fuse protection. UL, CSA, EN, TUV, and JIS compliant.
• PLC Migration Adapters (Retrofit) PLC Migration Adapters enabling cross-platform migration from legacy PLCs (Mitsubishi Melsec-A/Q/QnA, OMRON C500/1000, Yasakawa GL60/70/120 JW series) to newer platforms including Siemens and Allen-Bradley without re-wiring. Reduces installation time by 80% and completes projects 5X faster.
• Precision Cleaners / Etchers / Strippers (Clean-Etch-Strip) Fully automated wet process systems for display and architectural glass substrates with modular configuration for cleaning, etching, and stripping processes. Features UV Excimer Cleaner, Mach Jet for sub-µm particle removal, cascade rinse, bacteria prevention with N2 purge, ESD suppression with ionizer bars, and automatic chamber cleaning. Removes 95% of particles 2µm or larger.
• Glass Wet Process Systems Precision wet process solutions including cleaners, strippers, cassette cleaners, developers, photo mask cleaners, and etchers for glass substrate processing in display fabs and architectural glass production. Over 300 precision cleaners delivered to market.
• Contract Manufacturing Services ISO 9001 and ISO 14001 certified contract manufacturing for automation machinery, precision instruments, electro-mechanical assemblies, optical systems, and circuit board assembly with global supply chain across US, China, Japan, and Indonesia. Specializes in low/medium volume, high complexity production.

Quantifiable outcome

• Removes 95% of particles 2µm or larger from glass substrates during wet cleaning
• +7 more outcomes

Named customers3 records

Segments4 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Integration9 records

Feature8 records

Partnerships

13 partnerships are on record, tiered minor and core.

• KateevaminorChannel Partner/ Reseller/ Distributor · 1 January 2016Concluded distribution agreement with US OLED equipment maker Kateeva in 2016. Toho distributes Kateeva's OLED manufacturing equipment, expanding their display market portfolio.
• Kramer Sonic IndustriesminorChannel Partner/ Reseller/ Distributor · 1 January 2013Launched distribution of Kramer Sonic Industries Scanning Acoustic Microscopy systems in North America in 2013. Toho serves as distributor for this complementary inspection technology.
• Zygo CorporationcoreTechnology or Integration · 1 January 2009Concluded technology transfer from Zygo Corporation for optical inspection systems for the displays market in 2009. This established Toho's FPM Series (Zygo 3D Optical Profilometry) product line for large-area flat panel display inspection.
• Nanometrics Inc.coreTechnology or Integration · 1 January 2005Concluded technology transfer from Nanometrics Inc. for thin film measurement systems for the displays market in 2005. Also expanded US sales representation of Nanometrics material characterization products in 2015. Original Nanometrics core technology underpins the HL9900 Hall Effect system and TohoSpec 3100.
• KLA-Tencor CorporationcoreTechnology or Integration · 1 January 1999Concluded technology transfer from KLA-Tencor Corporation for profiler systems for the displays market (1999) and for thin film stress measurement systems (2003). This technology transfer established Toho's core thin film stress measurement capabilities using patented Dual Wavelength technology.
• Quantum Design GmbHminorChannel Partner/ Reseller/ DistributorExclusive distributor for Austria, Germany, and Switzerland covering FLX thin film stress measurement equipment. Located in Pfungstadt, Germany.
• John P. Kummer LtdminorChannel Partner/ Reseller/ DistributorDistributor for the United Kingdom covering metrology equipment. Located in Marlborough, UK.
• EumetrysminorChannel Partner/ Reseller/ DistributorDistributor covering France, Italy, Germany, and United Kingdom for metrology equipment. Located in Meylan, France.
• Edge Tech Scientific PVT. LTD.minorChannel Partner/ Reseller/ DistributorExclusive distributor for India (North) covering FLX thin film stress measurement equipment. Located in New Delhi, India.
• El Camino Technologies Pvt LtdminorChannel Partner/ Reseller/ DistributorExclusive distributor for India (South) covering HL9900 Hall Effect and TohoSpec equipment. Located in Bengaluru, India.
• SEKOAminorChannel Partner/ Reseller/ DistributorDistributor for Korea covering metrology equipment. Located in Gwangmyeong-si, Gyeonggi-do, South Korea.
• Quatek / CaltronminorChannel Partner/ Reseller/ DistributorDistributor for China (Hong Kong), Singapore, Malaysia, Thailand, Philippines, Vietnam, and Taiwan covering metrology equipment. Located in Hong Kong, China.
• AVBA Hi Tech Services Ltd.minorChannel Partner/ Reseller/ DistributorDistributor for Israel covering metrology equipment. Located in Kiryat Bialik, Israel.

Scale indicators8 records

Recent moves15 records

Expansion highlights5 records

Direct peers

• KLA Corporation: KLA is the dominant semiconductor process control and yield management company and the originator of the Dual Wavelength stress measurement technology licensed to Toho. KLA competes head-to-head with Toho across thin film metrology for advanced semiconductor and display customers.
• Onto Innovation: Formed via the merger of Nanometrics and Rudolph Technologies, Onto Innovation is the direct successor to the Nanometrics thin-film measurement and Hall Effect business whose core technology underpins Toho's TohoSpec 3100 and HL9900 products.
• Hitachi High-Tech: Japanese semiconductor metrology and inspection equipment provider offering CD-SEM, defect review, and film measurement systems that directly overlap with Toho's thin film and material characterization portfolio in Japan and across Asia.
• SCREEN Holdings: SCREEN's Semiconductor Production Equipment division is a global leader in single-wafer cleaning, coater/developer, and wet etch systems — directly comparable to Toho's precision wet cleaning and stripping equipment for semiconductor and display applications.
• Nova Measuring Instruments: Nova provides optical metrology and process control for advanced semiconductor manufacturing, including thin film measurement systems that compete with Toho's FLX and TohoSpec product families in semiconductor fabs.
• AMETEK: AMETEK acquired Zygo Corporation, the source of Toho's FPM optical profilometry technology. AMETEK's electronic instruments and precision measurement businesses — particularly Zygo — overlap with Toho's large-area optical profiler portfolio for display inspection.
• MKS Instruments: MKS provides process control, measurement, and analytical solutions for semiconductor and adjacent markets, including optical sensors and thin film monitoring that intersect with Toho's material characterization offerings.
• Veeco Instruments: Veeco manufactures semiconductor and display process equipment including precision surface finishing, ion beam, and deposition systems — overlapping with Toho's wet process and metrology customers in FPD and compound semiconductor manufacturing.

Broad incumbents

• Tokyo Electron: Tokyo Electron is one of the largest global semiconductor production equipment manufacturers with coater/developer, etch, and cleaning systems that overlap Toho's wet process product line, but on a much broader, multi-system scale rather than as a metrology specialist.
• Bruker Corporation: Bruker manufactures a wide range of analytical and measurement instruments used in materials science and semiconductor characterization — comparable to Toho's HL9900 Hall Effect, CV mapping, and Seebeck systems at the lab/materials characterization level.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat4 records

Key risks6 records

Key highlights7 records

Customer concentration

• LinkedInlinkedin.com/company/toho-technology

Compliance12 records

Revenue estimate

Valuation estimate

Number of profiles

Subsidiaries9 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Toho Technology