What Spt Microtechnologies does

SPT Microtechnologies USA, Inc. designs, manufactures, and services vertical batch furnace systems used for thermal processing in semiconductor device manufacturing. The product portfolio covers the AVP Ace (150-200mm wafers), RVP Ace (200-300mm), RVP-300 series (the production-proven 300mm furnace first deployed in 1999), legacy AVP/RVP systems (AVP-8000, AVP-8200, RVP-9000, RVP-9200), and WJ-APCVD atmospheric pressure CVD systems built around a patented Watkins Johnson linear injector. Process capabilities span oxidation, diffusion, LPCVD, APCVD, silicon nitride, doped/undoped polysilicon, and anneal up to 1200°C. A shared process-chamber architecture allows customers to migrate from legacy tools to Ace platforms without requalification.

The company serves device manufacturers across seven target segments: semiconductor, MEMS, power devices, LED manufacturing, III-V compound semiconductors, RFID, and packaging. Revenue is generated through direct enterprise sales of customized capital equipment, complemented by worldwide spare parts and consumables, factory-certified remanufactured/refurbished systems, equipment upgrades, and service contracts. Pricing is quote-based and not publicly disclosed. The company operates from a manufacturing headquarters in San Jose, California, with wholly owned subsidiaries in Hsinchu, Taiwan and Dresden, Germany providing regional sales and support, and holds ISO 9001:2015 and ISO 14001:2015 certifications.

SPT Microtechnologies is a wholly owned subsidiary of Japan's SPP Technologies Co., Ltd., which was established in December 2011 as a joint venture between Sumitomo Precision Products and SPTS and is itself part of Sumitomo Precision Products Co., Ltd. The corporate heritage traces through Thermco and Watkins Johnson, providing 60+ years of accumulated expertise in batch furnace technology. The company has between 101 and 250 employees.

Name

Spt Microtechnologies

Legal name

SPT Microtechnologies USA, Inc.

Website

https://sptmicro.com

Company type

Private

Founded year

2015

Operating status

Operating

Headcount range

101–250 employees

Short description

SPT Microtechnologies USA, Inc. designs and manufactures vertical batch furnace systems for thermal processing in semiconductor device manufacturing, serving MEMS, power, LED, III-V, RFID, and packaging customers globally from San Jose, with regional offices in Taiwan and Germany. It is a wholly owned subsidiary of Japan's SPP Technologies (Sumitomo Precision Products group).

Ownership category

akta.pro rank

Product category

Semiconductor Capital Equipment

NAICS

Semiconductor Machinery Manufacturing (333242), Industrial Process Furnace and Oven Manufacturing (333994)

SIC

Industrial Process Furnaces & Ovens (3567)

akta.pro primary industry

Thermal Processing Equipment (Furnaces/RTP/Anneal) (HDAHAEAE)

akta.pro secondary industry

Industrial Furnaces, Kilns & Thermal Processing Equipment (IMAHAEAE)

Keywords

• Vertical batch furnaces
• Semiconductor thermal processing
• LPCVD deposition systems
• APCVD deposition equipment
• Oxidation diffusion furnaces

Headquarters

HQ city

San Jose

HQ country

United States

HQ region

North America

Offices3 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Personnel, Technology or R&D, Operations, Infrastructure, Marketing or Sales

Revenue model

1. Thermal Processing Equipment Sales: Sale of new vertical batch furnace systems including AVP Ace, RVP Ace, RVP-300, AVP/RVP, and WJ-APCVD products. Equipment is customized to meet customer application, configuration, and substrate needs.
2. Spare Parts and Consumables: SPT maintains inventory of spare parts and consumables worldwide for current and legacy machines. Parts sales include factory-certified spares for WJ-999, WJ-1000, and WJ-1500 platforms.
3. Remanufactured/Refurbished Systems: Factory-certified remanufactured and refurbished equipment sales when available, including same custom approach as new systems with option for current parts and upgrades, customer-specified configuration, final test and source inspection, and warranty.
4. Service and Support Contracts: Worldwide customer support including routine and preventive maintenance, tool down repairs, software support, service contracts, system relocation, process support and new applications development.
5. Equipment Upgrades: Factory-certified upgrades available for all product platforms including WJ-APCVD systems.

Go-to-market motion1 record

Distribution channels4 records

Marketing channels5 records

Core offering

SPT Microtechnologies designs, manufactures, and services vertical batch furnace systems used for thermal processing in semiconductor device manufacturing, including oxidation, diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and APCVD (Atmospheric Pressure Chemical Vapor Deposition) processes. Its product portfolio covers AVP Ace, RVP Ace, RVP-300, AVP/RVP, and WJ-APCVD systems, supported by spare parts, remanufactured equipment, upgrades, and worldwide field service.

Product overview

SPT Microtechnologies offers a portfolio of vertical batch furnaces for semiconductor thermal processing. The product line includes the AVP Ace (150-200mm wafers) and RVP Ace (200-300mm wafers) as the newest generation platforms, alongside legacy AVP/RVP systems (AVP-8000, AVP-8200, RVP-9000, RVP-9200), RVP-300 series for 300mm production, and WJ-APCVD atmospheric pressure CVD systems. The company also provides factory-certified remanufactured and refurbished systems. All products share compatible process chambers enabling seamless transfer from legacy to Ace product lines. Process capabilities include oxidation, diffusion, LPCVD, APCVD, silicon nitride, TEOS/SiH4/DCS-based SiO2, doped/undoped polysilicon, and anneal processes up to 1200°C.

Differentiator

Problem solved

Functional benefit

Products and services

• AVP Ace Advanced/Rapid Vertical Processor for 150mm and 200mm wafers delivering diffusion, oxidation, and LPCVD processes with advanced injector technology, temperature control from 100-1250C, and low O2 load lock. Targets semiconductor, MEMS, power, LED, III-V, RFID, and packaging device manufacturers requiring superior process results and lowest cost of ownership.
• RVP Ace Rapid Vertical Processor for 200mm and 300mm wafers providing diffusion, oxidation, and LPCVD processes with leading productivity and low cost of ownership. Runs 200mm and 300mm wafers simultaneously without hardware changes, supports bonded/thin/bowed substrates, and features advanced across-flow chamber design.
• RVP-300 (RVP-300plus / RVP-550) Rapid Vertical Processor for 200mm and 300mm wafers (RVP-300plus and RVP-550) with superior productivity, full APCVD and LPCVD process selections, minimal fab space footprint, enhanced temperature control with fast ramping element, and forced air cooling. Targets high-volume semiconductor production environments.
• AVP/RVP (AVP-8000, AVP-8200, RVP-9000, RVP-9200) AVP-8000, AVP-8200, RVP-9000, and RVP-9200 Vertical Processors for 150-200mm wafers providing a flexible platform for diffusion, oxidation, and LPCVD processes. Compatible with newer Ace product line process chambers for seamless process transfer.
• WJ-APCVD Atmospheric Pressure CVD systems with self-cleaning, heated conveyor processing using patented Watkins Johnson linear injector technology for precise, repeatable deposition of doped or undoped films with uniform gap fill. Available for WJ-999, WJ-1000, and WJ-1500 platforms.
• Remanufactured Systems Factory-certified remanufactured and refurbished AVP, RVP, and APCVD thermal processing systems delivered with current parts and upgrades, customer-specified configuration, final test and source inspection, and warranty.
• Spare Parts and Consumables Factory-certified spare parts and consumables for current and legacy machines including WJ-999, WJ-1000, and WJ-1500 platforms, ordered through [email protected].
• Service and Support Contracts Worldwide customer support including routine and preventive maintenance, tool down repairs, software support, service contracts, system relocation, process support, and new applications development for SPT thermal processing equipment.
• Equipment Upgrades Factory-certified upgrades available for all SPT product platforms including WJ-APCVD systems to extend equipment capability and lifespan.

Quantifiable outcome

• In-situ clean capability reduces cost of ownership by up to 50%
• +3 more outcomes

Segments7 records

Ideal customer profiles2 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature6 records

Partnerships

Four partnerships are on record, tiered minor and core.

• SPTSminorStrategic or Co-development Partner · 1 December 2011SPTS was a joint venture partner with Sumitomo Precision Products in establishing SPP Technologies in December 2011. This joint venture eventually resulted in the formation of SPT Microtechnologies' parent company structure.
• SPP Technologies Co., Ltd.coreStrategic or Co-development PartnerSPT Microtechnologies USA, Inc. is a wholly owned subsidiary of SPP Technologies Co., Ltd. of Japan. SPP Technologies was established in December 2011 as a joint venture between Sumitomo Precision Products and SPTS. SPP Technologies is a subsidiary of Sumitomo Precision Products Co., Ltd.
• SPT Microtechnologies Taiwan Ltd.coreOthersWholly owned subsidiary of SPT Microtechnologies USA, Inc. located in Hsinchu City, Taiwan. Serves customers in the Asia region with local support and sales operations.
• SPT Microtechnologies GmbHcoreOthersWholly owned subsidiary of SPT Microtechnologies USA, Inc. located in Dresden, Germany. Serves customers in the Europe region with local support and sales operations.

Scale indicators4 records

Recent moves7 records

Expansion highlights4 records

Direct peers

• Kokusai Electric: Tokyo-listed Japanese manufacturer of vertical batch furnaces (formerly Hitachi Kokusai Electric). Kokusai is the global market leader in semiconductor batch thermal processing — oxidation, diffusion, LPCVD — directly competing with SPT's AVP Ace and RVP Ace across the same customer base of memory, logic, and power device fabs.
• Tokyo Electron (TEL): Major Japanese semiconductor equipment OEM with a vertical batch furnace product line (TELFORMULA). TEL competes head-to-head with SPT in oxidation, diffusion, and LPCVD applications while also offering single-wafer deposition tools — a direct overlap in customer accounts and process steps.
• Aixtron: German MOCVD equipment specialist for LED, GaN/SiC power, and III-V compound semiconductor manufacturing. Aixtron and SPT both serve the LED and III-V customer segments with complementary deposition technologies (MOCVD vs. LPCVD/APCVD), competing for capex in the same compound semi fabs.
• CVD Equipment Corporation: US-based, smaller-scale manufacturer of chemical vapor deposition, thermal processing, and gas-delivery equipment for semiconductor, LED, and MEMS applications. CVD Equipment competes with SPT in research-oriented and specialty thermal processing accounts where its smaller scale and customization fit.
• Centrotherm International: German supplier of thermal processing equipment (furnaces, diffusion, CVD) serving semiconductor and photovoltaic customers. Centrotherm's diffusion and oxidation systems target similar specialty applications as SPT's vertical furnaces, particularly in power and MEMS segments.

Broad incumbents

• Applied Materials: Largest US semiconductor equipment manufacturer with a broad portfolio including deposition (ALD, CVD, PVD), etch, CMP, and thermal processing. Applied's Producer series and select thermal products overlap with SPT in customer accounts, though Applied's scale and bundled tool sets make it a broad incumbent rather than a niche specialist.
• Lam Research: US semiconductor equipment leader in deposition (ALD, PECVD, LPCVD) and etch. While Lam does not focus on vertical batch furnaces, its single-wafer deposition and stress-free dielectric gap-fill tools compete against SPT's APCVD in the same advanced packaging and logic customer accounts.
• ASM International: Dutch-headquartered semiconductor equipment company specializing in atomic layer deposition (ALD), epitaxy (EPI), PECVD, and LPCVD. ASM's LPCVD and vertical furnace products compete with SPT in memory and logic fabs, while ASM's broader deposition portfolio makes it a broad incumbent.
• Veeco Instruments:

Market position

Strengths1 record

Weaknesses4 records

Competitive moat5 records

Key risks4 records

Key highlights7 records

Customer concentration

• LinkedInlinkedin.com/company/spt-microtechnologies-usa-inc.

Compliance2 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles2 records

Subsidiaries2 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Spt Microtechnologies