Tempress Systems

What Tempress Systems does

Tempress Systems is a Netherlands-based, privately held manufacturer of horizontal and vertical diffusion and deposition furnace systems for the semiconductor industry, founded in 1967 and headquartered in Vaassen. The company designs thermal processing platforms that support diffusion (oxidation, annealing, phosphorus and boron doping up to 1365°C), LPCVD (polysilicon, silicon nitride, TEOS, LTO, HTO), PECVD, and ALD processes on 150mm to 300mm wafers. Its current portfolio centers on three platforms: the TS Series V modular horizontal furnace (up to four independently operated stacks), the VS Series vertical furnace for 1-75 wafer batches, and the TS 12806 cluster furnace for high-volume 300mm production, complemented by an automatic wafer handling module integrated with R2D's COMET-LISA system via SECS/GEM and SMIF/FOUP interfaces. A proprietary Digital Temperature Controller rated to 1350°C and the proprietary NTM furnace controller constitute the core process-control IP. The firm is ISO 9001 certified and operates a wholly owned sales and service subsidiary in Shanghai (Amtech Tempress New Energy Technologies Shanghai).

Tempress generates revenue through four streams: sale of new furnace systems, spare parts and consumables for the installed base, customer care and lifecycle services (remote and onsite support, preventive maintenance, process consultancy), and retrofit and upgrade projects. Distribution is hybrid: direct enterprise field sales from the Netherlands HQ and Shanghai office, combined with named regional channel partners including Kromax International (Taiwan), Leebestech (Korea), FTR Corporation (Japan), El Camino Technologies (India), VueStar Inc. (USA and Canada), and PasTek (France and Switzerland). End-markets span wafer manufacturing, power semiconductors, photonics, MEMS, photovoltaics (over 30 GW of installed solar diffusion capacity), IoT, EV battery anode deposition, and life sciences/MedTech, served by an installed base exceeding 1000 furnace systems globally.

Since 2020, Tempress has operated as an independent company under the ownership of Dutch deep-tech venture capital firm Innovation Industries, which acquired it following separation from the Amtech Group and installed new management under Managing Director Pieter de Groot. The current strategic posture emphasizes platform refresh (TS Series V, VS Series, TS 12806), automation integration through the R2D partnership, and selective expansion into emerging verticals such as EV batteries and biosensors, while continuing to participate across the full SEMICON global trade show circuit.

Name

Tempress Systems

Legal name

Tempress

Website

https://tempress.nl

Company type

Private

Founded year

1967

Operating status

Operating

Headcount range

51–100 employees

Short description

Tempress Systems, a Netherlands-based semiconductor equipment manufacturer founded in 1967, designs horizontal and vertical diffusion and deposition furnaces for power electronics, MEMS, photonics, solar, and battery producers worldwide through direct sales and regional channel partners.

Ownership category

akta.pro rank

Headquarters

HQ city

Vaassen

HQ country

Netherlands

HQ region

Europe

Offices2 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Supply Chain, Operations, Technology or R&D, Marketing or Sales, Infrastructure

Revenue model

1. Furnace Systems Equipment Sales: Sale of diffusion and deposition furnace systems including TS Series V, VS Series, and TS 12806 horizontal cluster furnaces for semiconductor manufacturing.
2. Spare Parts and Consumables: Long-term support for delivered furnaces with spare parts and consumables for systems delivered in the past.
3. Customer Care and Support Services: Remote and onsite technical support, system audits, preventive maintenance packages, and process consultancy services throughout the lifecycle of furnaces.
4. Retrofits and Upgrades: Retrofit, upgrade and system relocation services to maximize lifetime of customer systems with process capability improvements.

Go-to-market motion2 records

Distribution channels8 records

Marketing channels4 records

Core offering

Tempress Systems designs, manufactures, and services horizontal and vertical thermal processing furnace systems used in semiconductor manufacturing for diffusion, LPCVD, PECVD, and ALD processes on 150mm to 300mm wafers. Its product portfolio centers on the TS Series V horizontal furnace, the VS Series vertical furnace, and the TS 12806 high-volume cluster furnace, complemented by automatic wafer handling automation and lifecycle customer care services including spare parts, retrofits, and process consultancy.

Product overview

Tempress Systems offers a portfolio of thermal processing equipment for the semiconductor industry centered around two main furnace platforms: the TS Series V horizontal furnace and the VS Series vertical furnace, with the TS 12806 cluster variant designed for high-volume production. These platforms are multipurpose thermal processing systems that support diffusion, LPCVD, PECVD, and ALD processes for wafer sizes from 150mm to 300mm. The product line includes add-on automation modules for automatic wafer handling, and the company provides comprehensive customer care services spanning spare parts, technical support, preventive maintenance, and training.

Differentiator

Problem solved

Functional benefit

Products and services

• TS Series V Horizontal Furnace Horizontal thermal processing furnace optimized for flexibility, multiple processes, and cleanroom space, with a modular design supporting up to four independently running furnace stacks for diffusion, LPCVD, PECVD, and ALD on 150mm to 300mm wafers. Targeted at semiconductor manufacturers and research institutions needing multipurpose processing capability.
• VS Series Vertical Furnace Vertical furnace platform for smaller batch processing of 1 to 75 wafers, providing diffusion and deposition capability in a compact footprint with multi-side installation options and flexible wafer handling from manual to fully automated OHT for 150mm to 300mm wafers. Targeted at customers needing cost-effective smaller-batch thermal processing without compromising on quality.
• TS 12806 Horizontal Cluster Furnace Fully automated horizontal furnace cluster optimized for high-volume production, with up to six process chambers in a 2x3 tube configuration that can independently run wet oxidation and anneal processes for up to 75x300mm wafers in ISO 4 cleanroom environments. Targeted at high-volume semiconductor manufacturers.
• Automatic Wafer Handling Automated wafer handling solution for Tempress furnace platforms supporting cassette-to-cassette operation with SMIF/FOUP pods for 200mm and 300mm wafer production, SECS/GEM communication, optional stocker functionality, and integration with R2D COMET-LISA, OHT, RFID, and barcode readers. Targeted at semiconductor fabs requiring fully automated production flows.
• Customer Care Services Lifecycle support services for delivered Tempress furnace systems, including spare parts and consumables, remote and onsite technical support, system audits, preventive maintenance packages, retrofits and upgrades, system relocations, process consultancy, and training programs. Targeted at installed-base semiconductor manufacturers across all served markets.

Quantifiable outcome

• Over 1000 diffusion and deposition furnace systems shipped globally
• +2 more outcomes

Named customers3 records

Segments8 records

Ideal customer profiles3 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Integration7 records

Feature6 records

Partnerships

Seven partnerships are on record, tiered core.

• R2DcoreTechnology or Integration · 6 March 2020Strategic partnership for automated wafer handling systems. R2D provides COMET-LISA wafer transfer system combined with Tempress TS-Series furnaces. Field-proven automation solution with SMIF/FOUP pod openers for 200/300mm wafer projects with SECS-GEM interface. Enables improved stability, flexibility, and higher throughput for customer horizontal diffusion furnaces.
• Kromax International Corp.coreChannel Partner/ Reseller/ DistributorExclusive commercial representative for Taiwan market. Represents Tempress at Semicon Taiwan exhibitions at TaiNEX 1&2, Taipei. Supports sales and customer engagement in Taiwan region.
• El Camino Technologies Pvt LtdcoreChannel Partner/ Reseller/ DistributorPartner for India market exhibiting at SEMICON India events. Located in Bangalore, India representing Tempress at Hall 3, Booth O31&O37.
• VueStar Inc.coreChannel Partner/ Reseller/ DistributorRepresentative for USA and Canada markets. Located in Saint Peters, MO. President Scott A. Jungers.
• LeebestechcoreChannel Partner/ Reseller/ DistributorRepresentative for Korea market. Located in Incheon City with contact B.H. Lee.
• FTR CorporationcoreChannel Partner/ Reseller/ DistributorRepresentative for Japan market. Contact Fukumi Tomino based in Machida City, Tokyo.
• PasTekcoreChannel Partner/ Reseller/ DistributorRepresentative for France and Switzerland markets. Contact Pascal Guerche located in Le Plessis-Pâté, France.

Scale indicators3 records

Recent moves7 records

Expansion highlights6 records

Direct peers

• ASM International: Dutch-headquartered leader in atomic layer deposition (ALD), epitaxy, and LPCVD for semiconductor manufacturing. Direct overlap with Tempress on LPCVD and ALD process technologies and customer base of advanced semiconductor fabs and specialty device manufacturers.
• Tokyo Electron (TEL): Major Japanese semiconductor equipment maker with a broad vertical and horizontal furnace portfolio (e.g., TELFORMULA, Alpha series). Closest large-scale direct competitor to Tempress in batch diffusion and LPCVD furnaces for power, MEMS, and solar applications.
• Hitachi High-Tech: Provides diffusion and oxidation furnaces (e.g., the DS series and IIx-DS series) for power semiconductors and MEMS. Direct peer in batch thermal processing furnaces serving the same power device and specialty semiconductor end markets as Tempress.
• Ulvac: Japanese manufacturer of vacuum and deposition equipment (sputtering, CVD, evaporation) for semiconductor, display, and solar applications. Direct peer with overlapping batch thermal processing offerings and similar customer base in solar and power devices.
• Centrotherm International: German supplier of thermal processing and deposition equipment primarily to the photovoltaic industry. Direct competitor to Tempress in solar diffusion furnaces for n-PERT, TOPCon, and PERC cell production.

Broad incumbents

• Applied Materials: Largest global semiconductor equipment company with broad deposition, etch, and inspection portfolios (including batch CVD). Competes with Tempress in larger fabs and solar/PV production equipment via its Applied Materials subsidiary in display and solar.
• SCREEN Holdings: Japanese semiconductor equipment maker primarily focused on wafer cleaning, but also offers coating and thermal processing systems. Competes with Tempress in adjacent process steps for power and analog device manufacturers.
• Lam Research: Major semiconductor equipment supplier in deposition and etch. While focused on single-wafer plasma-enhanced CVD, Lam's deposition portfolio competes with Tempress for next-generation thin-film deposition budgets at Tier-1 fabs.
• NAURA Technology Group: Largest Chinese semiconductor equipment maker with broad thermal, etch, and deposition offerings. Increasingly competes with Tempress in China-based power semiconductor and solar customers, supported by domestic policy preferences.

Emerging players

• CVD Equipment Corporation: US-based small-cap manufacturer of CVD and ALD equipment for research and specialty production. Comparable niche positioning to Tempress in serving university, R&D, and emerging specialty semiconductor customers with customized deposition tools.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks6 records

Key highlights7 records

Customer concentration

• LinkedInlinkedin.com/company/tempress-systems

Compliance1 record

Revenue estimate

Valuation estimate

Number of profiles

Profiles5 records

Subsidiaries1 record

Funding overview

Funding rounds2 records

Investors2 records

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A1 record

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Tempress Systems