Entrepix

What Entrepix does

Entrepix is a Phoenix, Arizona-based specialty semiconductor equipment and services company founded in 1998 that focuses on chemical mechanical polishing (CMP) and post-CMP wafer cleaning. The company operates as the OEM for the OnTrak DSS-200 double-sided wafer cleaner and as an aftermarket service, parts, and refurbishment provider for legacy Applied Materials Mirra and Reflexion CMP systems, IPEC 472 polishers, and Strasbaugh platforms. It also maintains an ISO 9001:2015 certified CMP foundry that has processed more than one million wafers, an Advanced Fabrication Center (AS9100D certified, ITAR registered) for precision CNC machining and contract manufacturing, a 3D printing/additive manufacturing operation, and a field service organization for on-site installation, maintenance, and process applications support.

The company makes money through six revenue streams: (1) capital equipment sales of new, refurbished, and remanufactured CMP tools, (2) replacement parts and spare components including obsolete parts for legacy systems sold through direct sales and a Shopify e-commerce storefront, (3) engineered upgrades (motor drives, control systems, Hastelloy spin carriages, gimbal flexures) sold as drop-in improvements over OEM components, (4) CMP foundry services for process development, prototyping, and pilot production, (5) CNC machining and contract manufacturing for aerospace, defense, semiconductor, and turbine customers, and (6) field service and maintenance contracts offered on time-based or block-hour terms. Pricing for capital equipment follows a milestone payment schedule (70% ARO, 20% prior to shipment, 10% post-acceptance), while parts and service operate on Net 30 terms with a $100 minimum order value.

Since January 2023, Entrepix has operated as a wholly owned subsidiary of Amtech Systems (NASDAQ: ASYS), acquired for $35 million, and is sold alongside sister Amtech companies including PR Hoffman (consumables) and Intersurface Dynamics (cleaning chemistry) for cross-sell. Customers are diversified across IDMs, OEMs, fabless and fab-light semiconductor companies, MEMS and nanotechnology developers, and aerospace and defense contractors (including SpaceX and Raytheon). Since the Amtech acquisition, Entrepix has expanded its direct footprint and signed exclusive sales representative agreements covering France (Eumetrys, November 2025), the UK and Nordic region (Legatech, December 2025), and the Eastern U.S./Eastern Canada (CWI Technical Sales, May 2026).

Name

Entrepix

Legal name

Entrepix, Inc.

Website

https://entrepix.com

Company type

Private

Founded year

1998

Operating status

Operating

Headcount range

51–100 employees

Short description

Entrepix, a Phoenix-based CMP equipment and services company founded in 1998, is the OEM for the OnTrak DSS-200 wafer cleaner and a leading aftermarket provider of parts, refurbishment, and upgrades for legacy CMP tools serving IDMs, OEMs, MEMS, and compound-semiconductor customers. Acquired by Amtech Systems (NASDAQ: ASYS) in January 2023 for $35 million, it now operates as a wholly owned subsidiary.

Ownership category

akta.pro rank

Product category

Semiconductor CMP Equipment

NAICS

Semiconductor Machinery Manufacturing (333242), Other General Purpose Machinery Manufacturing (3339)

SIC

Industrial Instruments For Measurement, Display, And Control (3823), Special Industry Machinery, Nec (3559)

akta.pro industry

PRIMARYHDAHAEAG

Wafer Cleaning & Surface Preparation Equipment

Hardware, Technology & Telecom/Semiconductors & Electronic Components/Semiconductor Manufacturing Equipment

SECONDARYHDAHACAH

Wafer Services & Reclaim (Epitaxy, Thinning, Reclaim)

Hardware, Technology & Telecom/Semiconductors & Electronic Components/Semiconductor Foundries & Wafer Fabrication

Keywords

• CMP equipment
• Wafer polishing
• Semiconductor parts
• Wafer cleaning
• Contract manufacturing

Headquarters

HQ city

Phoenix

HQ country

United States

HQ region

North America

Offices2 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Operations, Technology or R&D, Supply Chain, Infrastructure, Marketing or Sales

Revenue model

1. CMP Equipment Sales: Sale of new, refurbished, and remanufactured CMP equipment (AMAT Mirra, Reflexion, IPEC 472, OnTrak, Strasbaugh) and wafer cleaning systems (OnTrak DSS-200). Equipment is sold as capital equipment with payment terms of 70% ARO, 20% prior to shipment, 10% after acceptance.
2. CMP Spare Parts and Replacement Parts: Sale of CMP replacement parts, polisher spare parts, platen refurbishment, head rebuilds, and consumables through e-commerce Shopify storefront and direct sales.
3. Equipment Upgrades and Engineering Services: Custom engineering, equipment upgrades (e.g., motor drivers, control systems, Hastelloy carriages), and concierge engineering services to improve tool performance and reliability.
4. CMP Foundry Services: CMP process development, prototyping, pilot production, volume wafer processing, and specialized wafer planarization for semiconductor and advanced substrate applications. ISO 9001:2015 certified.
5. CNC Machining and Advanced Fabrication: Precision CNC machining, additive manufacturing, and contract manufacturing services for aerospace, commercial, semiconductor, government, and gas turbine industries.
6. Field Service and Maintenance Contracts: On-site CMP field service, preventative maintenance programs, tool installation/decommissioning, process applications support, and spare parts service. Offered through term-based contracts and block hours.

Pricing tiers

Go-to-market motion3 records

Distribution channels6 records

Marketing channels6 records

Core offering

Entrepix manufactures, refurbishes, and supports chemical mechanical polishing (CMP) equipment and wafer cleaning systems for the semiconductor industry. The company is the new OEM for the OnTrak DSS-200 double-sided wafer cleaner, offers parts/service/upgrades for legacy AMAT Mirra, Reflexion, IPEC 472, and Strasbaugh CMP platforms, and runs an ISO 9001:2015 certified CMP foundry and AS9100D-certified CNC machining/advanced fabrication center for contract manufacturing.

Product overview

Entrepix offers a comprehensive portfolio of CMP (Chemical Mechanical Polishing) equipment, parts, services, and manufacturing solutions for the semiconductor industry. The core offerings include the OnTrak DSS-200 double-sided wafer cleaner (as the current OEM), Entegrity Polish Head Tester, and support for Applied Materials Mirra and Reflexion CMP systems, IPEC 472, and Strasbaugh polishers. These are complemented by an ISO 9001:2015 certified CMP Foundry for contract manufacturing and R&D, an Advanced Fabrication Center (CNC Machining) with AS9100D certification, Additive Manufacturing services, and comprehensive field service, platen refurbishment, and custom engineering capabilities. The company also provides a full range of replacement parts, equipment upgrades (including motor drives, control systems, and Hastelloy spin carriages), and process coordination services through Distributed Flow.

Differentiator

Problem solved

Functional benefit

Products and services

• OnTrak DSS-200 Cleaner Double-sided post-CMP wafer cleaning system offered as the current OEM for OnTrak, featuring Windows-based controls, Advanced Precision Touch Technology for ultra-thin and fragile substrates, configurable for 100-200mm wafers with custom carrier options. Sold to semiconductor manufacturers, IDMs, and research customers.
• Entegrity Polish Head Tester Tabletop polish head testing system for CMP systems that simulates wafer de-chuck, verifies wafer present/absent sensors, tracks heads via serial number, monitors cross-talk between head chambers, and provides data logging for statistical process control. Available in 6-zone and 8-zone configurations for semiconductor fab customers.
• AMAT Mirra CMP Equipment Refurbished and remanufactured Applied Materials Mirra, MirraTrak, and Mirra Mesa CMP systems with parts, service, upgrades, and whole-tool refurbishments for 150mm and 200mm wafer processing. Targeted at semiconductor manufacturers running legacy Mirra platforms.
• AMAT Reflexion CMP System Support Parts, upgrades, service, and refurbishment offerings for Applied Materials Reflexion 3600, Reflexion LK 3800, Reflexion LK Prime, and Reflexion LK Prime S 300mm integrated CMP tools. Targeted at semiconductor manufacturers and IDMs running 300mm CMP processes.
• IPEC 472 CMP Platform Support Upgrades, refurbishments, and spare parts for SpeedFam IPEC 472 CMP polisher platforms, serving semiconductor manufacturers operating these legacy tools.
• Strasbaugh CMP Equipment Support Refurbished Strasbaugh CMP wafer polishers (6DS-SP nTegrity, 6EC nSpire, 6EG nHance) for 100mm to 300mm wafer sizes, with parts and refurbishment services.
• CMP Replacement Parts Replacement parts catalog for CMP platforms including OnTrak, AMAT Mirra, IPEC, SpeedFam, and Rudolph metrology equipment, including obsolete parts for legacy systems. Sold to fabs running these platforms via Shopify storefront and direct sales.
• CMP Foundry Services Contract manufacturing and R&D services including CMP process development, prototyping, pilot production, and specialized wafer processing from coupons to 200mm wafers. ISO 9001:2015 certified. Targeted at fabless/fab-light companies, materials suppliers, and emerging technology developers.
• Advanced Fabrication Center (CNC Machining) Precision CNC machining services specializing in high-volume metal removal in aluminum, stainless steel, and titanium. ISO 9001:2015 and AS9100D certified, with ITAR registration. Serves aerospace, defense, semiconductor, government, and gas turbine customers.
• Additive Manufacturing & 3D Printing 3D printing services for high-quality metal or plastic prototype parts with quick turnaround, supporting rapid prototyping for semiconductor, aerospace, and defense customers.
• Platen Refurbishment Full refinish and refurbishment service for CMP platens across AMAT Mirra, Reflexion, IPEC, Strasbaugh, and other CMP toolsets. Targeted at fabs running these CMP platforms.
• CMP Field Service On-site CMP support including equipment service, preventative maintenance contracts, tool down support, escalation support, process applications support, tool install/decommission, and spare parts. Sold to semiconductor manufacturers running CMP and metrology equipment.
• Custom Equipment & Modules Custom equipment customization including customized OnTrak DSS-200 tools, 200mm to 300mm cleaning technology adapters, and modular cleaning solutions for wafer processing systems. Sold to semiconductor manufacturers needing tailored CMP/wet-clean solutions.
• Custom Engineering Services

Quantifiable outcome

• Over 1 million wafers processed to date in the CMP foundry
• +2 more outcomes

Named customers9 records

Segments5 records

Ideal customer profiles3 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature8 records

Partnerships

Twelve partnerships are on record, tiered core, flagship and minor.

• CWI Technical SalescoreChannel Partner/ Reseller/ Distributor · 5 May 2026Representative agreement with CWI Technical Sales to expand sales of the DSS-200 Ontrak wafer cleaning system along with CMP parts, services, and upgrades across the Eastern United States from Florida to Eastern Canada. CWI focuses on accelerating adoption of the DSS-200 platform with deep technical expertise in wafer processing.
• LegatechcoreChannel Partner/ Reseller/ Distributor · 10 December 2025Exclusive representative agreement appointing Legatech as the exclusive sales representative for the United Kingdom and Nordic region for all products including CMP replacement parts and upgrades and wafer cleaning systems. Legatech brings 30 years of experience in expert refurbishment, upgrades, and repair of semiconductor capital assets. Effective November 7, 2025, with initial activities focusing on customer outreach, new product launch support, training, and spare parts management.
• EumetryscoreChannel Partner/ Reseller/ Distributor · 25 November 2025Exclusive representative agreement appointing Eumetrys as the exclusive sales representative in France for all products including CMP replacement parts, upgrades, and wafer cleaning systems. Eumetrys brings 20 years of experience in expert refurbishment, upgrades, and repair of semiconductor capital assets. Effective November 7, 2025, with initial activities focusing on customer outreach, new product launch support, training, and spare parts management.
• Amtech Group Companies (PR Hoffman, Intersurface Dynamics)coreStrategic or Co-development Partner · 18 October 2023Entrepix Business Development Manager Yann Visintainer supports sales of lapping and polishing consumables from PR Hoffman and process chemicals and slurries from Intersurface Dynamics, both Amtech Group companies. Intersurface Dynamics also supplies custom cleaning chemistry for the DSS-200 platform.
• Amtech Systems, Inc.flagshipOthers · 17 January 2023Entrepix was acquired by Amtech Systems, Inc. (NASDAQ: ASYS) on January 17, 2023, for $35 million. Entrepix operates as a wholly owned subsidiary of Amtech. Amtech is a leading global manufacturer of capital equipment including thermal processing and wafer polishing and related consumables for semiconductor devices. Entrepix joins other Amtech companies including BTU International, PR Hoffman, and Intersurface Dynamics.
• Possible (Japan)minorChannel Partner/ Reseller/ DistributorSales representative partner for Japan region.
• Teltec (Taiwan)minorChannel Partner/ Reseller/ DistributorSales representative partner for Taiwan region.
• CSUS (Taiwan)minorChannel Partner/ Reseller/ DistributorSales representative partner for Taiwan region.
• Banner IndustriesminorChannel Partner/ Reseller/ DistributorSales representative partner.
• PlanatomeminorStrategic or Co-development PartnerListed as a partner organization on Entrepix's partner page.
• Mitsubishi Electric Diamond PartnerminorChannel Partner/ Reseller/ DistributorMitsubishi Electric Diamond Partner OEM relationship.
• Intersurface Dynamics (IDI)coreStrategic or Co-development PartnerIntersurface Dynamics (an Amtech Group company) supplies custom cleaning chemistry used in the OnTrak DSS-200 platform. Entrepix references customers to IDI for custom cleaning chemistry solutions.

Scale indicators6 records

Recent moves6 records

Expansion highlights5 records

Direct peers

• Applied Materials: Applied Materials is the OEM of the Mirra and Reflexion CMP platforms that Entrepix services, refurbishes, and develops aftermarket upgrades for, making it both Entrepix's primary supplier ecosystem anchor and its most direct competitive threat in new CMP systems.
• Proto Labs: Proto Labs provides rapid CNC machining and prototyping services to aerospace, defense, and commercial customers, overlapping with Entrepix's Advanced Fabrication Center CNC and contract-manufacturing line for names like SpaceX and Raytheon.
• SCREEN Holdings: SCREEN manufactures semiconductor wafer cleaning systems (including post-CMP cleaners) that directly compete with Entrepix's OnTrak DSS-200 OEM product in semiconductor fabs worldwide.

Emerging players

• Onto Innovation: Onto Innovation provides semiconductor metrology and inspection equipment used to qualify CMP processes; complementary rather than directly competitive, but addressing the same fabs that consume Entrepix's CMP tooling and services.
• Bruker Nano Surfaces: Bruker supplies metrology and surface-inspection instruments (including profilometers used in CMP process control) that are complementary to Entrepix's CMP equipment and foundry characterization services for advanced substrates.
• Fujimi Incorporated: Fujimi is a specialty manufacturer of CMP slurries and polishing materials; relevant because Entrepix's CMP foundry performs consumables screening and qualification that directly evaluates products like Fujimi's for fab customers.

Broad incumbents

• Tokyo Electron: Tokyo Electron is a major semiconductor equipment manufacturer with CMP and cleaning systems in its portfolio, serving as a broad incumbent competing across the same wafer-processing end markets Entrepix targets with foundry services.
• Lam Research: Lam Research is a major semiconductor capital equipment manufacturer whose installed base and service/parts business overlaps with Entrepix's aftermarket model, even though its core products are deposition and etch rather than CMP.
• Merck KGaA (Versum Materials) Performance Materials: Merck KGaA's Performance Materials / Versum business supplies CMP slurries and electronic materials to semiconductor fabs, adjacent to Entrepix's CMP process development and foundry services where consumables qualification is a key offering.
• Entegris (CMC Materials): Entegris (which acquired CMC Materials, formerly Cabot Microelectronics) supplies CMP slurries and pads that complement Entrepix's CMP equipment and foundry, while also offering related cleaning chemistries through its Liquid Filtration and Advanced Materials businesses.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks5 records

Key highlights7 records

Customer concentration

• Xx.com/entrepix
• Facebookfacebook.com/146513668726438
• LinkedInlinkedin.com/company/135097

Compliance4 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles6 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Entrepix