JTEKT Thermo Systems

What JTEKT Thermo Systems does

JTEKT Thermo Systems Corporation is a Japanese manufacturer of industrial heat treatment furnaces and thermal processing equipment, operating as a wholly-owned subsidiary of JTEKT Corporation (JTEKT Group). The company's semiconductor equipment business traces back to 1972, with over 50 years of accumulated expertise in thermal processing. It designs and manufactures vertical furnaces (VF series), horizontal furnaces (Model 200/206A), lamp annealing systems (RLA series), clean ovens (SO2, CCBS, CLH series), conveyor and batch furnaces for electronic components, and proprietary heating elements including Moldatherm, HGC, and LGO heaters. Core technical differentiators include three granted patents (original shutter structure, application-specific rack design, and precision oven atmosphere control), proprietary vacuum-formed ceramic fiber heating technology delivering 30% energy reduction, and metal-free furnace construction for contamination-free processing across a wide temperature range (150°C to 1900°C) and multiple atmospheres including vacuum, inert gas, hydrogen, and superheated steam.

The company serves four primary customer segments: semiconductor manufacturers (Si, SiC, GaN power devices, MEMS, VCSEL, advanced packaging including FO-WLP and 2.5D/3D integration), electronic component manufacturers (MLCC, LTCC, inductors, batteries, magnetic materials, ceramic parts), flat panel display manufacturers (LCD, OLED up to 10th generation), and industrial manufacturers (automotive, construction machinery, aerospace). Revenue is generated primarily through custom-configured hardware sales with quotation-based pricing and multi-year contract cycles. The go-to-market combines direct enterprise field sales (with regional offices in Japan and Shanghai), major industry exhibitions (SEMICON Japan/Taiwan/China, CERAMIC JAPAN), and a multi-language digital presence (English, Japanese, Simplified and Traditional Chinese). Recent strategic focus has shifted toward SiC power semiconductor processing and advanced packaging for AI/high-performance computing applications, evidenced by product launches in December 2024 and December 2025 and bundled offerings with JTEKT Group sister companies.

Name

JTEKT Thermo Systems

Legal name

JTEKT THERMO SYSTEMS Co., LTD.

Website

https://jtektthermos.com

Company type

Private

Founded year

1972

Operating status

Operating

Headcount range

251–500 employees

Short description

JTEKT Thermo Systems is a Japan-based manufacturer of custom heat treatment furnaces, vertical/horizontal furnaces, lamp annealing systems, and clean ovens serving semiconductor, electronic component, FPD, and industrial manufacturers, operating as a wholly-owned subsidiary of JTEKT Corporation.

Ownership category

akta.pro rank

Product category

Semiconductor Heat Treatment Equipment

NAICS

Industrial Process Furnace and Oven Manufacturing (333994), Semiconductor Machinery Manufacturing (333242), Heating Equipment (except Warm Air Furnaces) Manufacturing (333414)

SIC

Industrial Process Furnaces & Ovens (3567), Heating Equipment, Except Electric & Warm Air Furnaces (3433), Special Industry Machinery (No Metalworking Machinery) (3550)

akta.pro primary industry

Thermal Processing Equipment (Furnaces/RTP/Anneal) (HDAHAEAE)

akta.pro secondary industries

Industrial Furnaces, Kilns & Thermal Processing Equipment (IMAHAEAE), Heat Treatment & Thermal Processing Furnaces (Hardening, Annealing, Induction) (IMAHADAI), Boilers, Furnaces & Process Heating Equipment (IMAHAKAD)

Keywords

• Heat treatment systems
• Semiconductor manufacturing equipment
• Vertical diffusion furnaces
• Lamp annealing systems
• MLCC production equipment

Headquarters

HQ city

Tenri

HQ country

Japan

HQ region

Asia

Offices4 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Operations, Personnel, Technology or R&D, Marketing or Sales, Infrastructure

Revenue model

1. Semiconductor Heat Treatment Equipment Sales: Sale of thermal processing equipment including vertical furnaces, horizontal furnaces, lamp annealing systems, and clean ovens for semiconductor manufacturing processes such as oxidation, diffusion, LPCVD, annealing, and packaging.
2. Electronic Component Manufacturing Equipment Sales: Sale of heat treatment equipment for MLCC/LTCC production, inductors, batteries, magnetic materials, ceramic parts including conveyor furnaces, batch ovens, and superheated steam systems.
3. FPD and Film Manufacturing Equipment Sales: Sale of heat treatment equipment for flat panel displays including clean ovens and IR furnaces for LCD and OLED manufacturing up to 10th generation substrates.
4. Industrial Heat Treatment Equipment Sales: Sale of heat treatment systems for industrial products and components used in automobiles, construction machinery, aircraft, and other fields.
5. Heating Elements Sales: Sale of proprietary JTEKT heating units including Moldatherm heaters (plain, half-cylinder, quarter-cylinder types), Light Gauge Over-bend heaters, and Heavy Gauge Coil heaters.
6. R&D and Prototyping Equipment Sales: Sale of compact heat treatment systems for development and prototyping experiments used across various industries.

Pricing tiers

Go-to-market motion2 records

Distribution channels2 records

Marketing channels4 records

Core offering

JTEKT Thermo Systems is a Japanese manufacturer of heat treatment equipment for semiconductor, electronic component, flat panel display, and industrial production processes. The product portfolio includes vertical and horizontal diffusion furnaces, lamp annealing systems, clean ovens, conveyor-type continuous furnaces, superheated steam debinding systems, and proprietary Moldatherm heating elements used in oxidation, diffusion, LPCVD, annealing, sintering, curing, and packaging applications. The company supports wafer sizes from R&D scale (2-8 inch) up to 300mm and substrates up to 600x600mm, with operations spanning Japan and China.

Product overview

JTEKT Thermo Systems is a comprehensive manufacturer of heat treatment technologies serving semiconductors, electronic components, flat panel displays, and industrial applications. The product portfolio centers on vertical furnaces (VF series including VF-5900, VF-5700, VF-5300, VF-5100, VF-3000, VF-1000) for oxidation, diffusion, LPCVD, and activation annealing; horizontal furnaces (Model 200/206A) for PV and silicon processing; lamp annealing systems (RLA series) for rapid thermal processing and contact annealing; and clean ovens (SO2, CCBS, CLH series) for semiconductor packaging and FPD manufacturing. The AllFit superheated steam product line (AF-INH, AF-uBF, AF-810A, AF-MT) addresses MLCC/LTCC debinding and electronic components. Supporting products include ceramic conveyor furnaces, mesh belt continuous furnaces, inert gas ovens, exhaust gas treatment equipment, development furnaces, and proprietary Moldatherm/HGC/LGO heating elements. Recent launches include the SO2-60-F for advanced 2.xD/3D semiconductor packaging and new SiC power semiconductor equipment (RLA-4200-V, VF-5300HLP) launched December 2024.

Differentiator

Problem solved

Functional benefit

Products and services

• VF Series Vertical Furnaces Batch vertical diffusion furnaces for semiconductor manufacturing including flagship VF-5900 (up to 100 wafers of 300mm), VF-5700 mini-batch, VF-5300 stocker type, VF-5100 turn table, VF-3000 low-cost mini batch, VF-1000 for R&D, and specialty models VF-5300HS (gate insulating film) and VF-5300HLP/VF-3000HLP (activation annealing for SiC power devices). Supports oxidation, diffusion, LPCVD, annealing, polyimide curing, IGBT, and thin wafer processing.
• RLA Series Lamp Annealing Systems Lamp annealing systems for rapid thermal processing of Si, SiC, and GaN wafers. RLA-4200-V features vacuum load-lock with 2 process chambers; RLA-3100 supports 50 wafers with 200C/sec heating rate; RLA-1200 is a low-cost R&D model; RLA-3100-V offers N2 load-lock for ultra-low oxygen atmosphere.
• Model 200/206A Horizontal Furnaces Horizontal furnaces for silicon wafer and photovoltaic cell production processing 3-8 inch wafers and 125-156mm square cells. Supports phosphorus/boron diffusion, oxidation, annealing, and LPCVD for R&D through mass production.
• SO2 Series Heated-Air Circulating Clean Ovens Fully automatic clean ovens for advanced semiconductor packaging mass production including SO2-12-F, SO2-12L-F, SO2-30L-F, and SO2-60-F. Supports square substrates up to 600x600mm and 300mm wafers with FOUP operation and double wafer handling robot for high-speed transfer.
• CCBS/CCBS-IR Clean Ovens for FPD Single substrate transfer clean ovens for LCD and OLED display manufacturing supporting glass sizes up to 10th generation. CCBS features high productivity, zero substrate damage with original shutter structure; CCBS-IR uses IR heating system for high clean factor, excellent temperature uniformity, and 250C operation.
• CLH Series High-Temperature Clean Ovens High-temperature clean ovens up to 530C with Class 100 cleanliness for semiconductor wafer and glass substrate baking. Supports FO-WLP, WL-CSP, and advanced packaging with N2 atmosphere capability.
• AllFit Superheated Steam Furnaces AllFit product line including AF-INH inert gas oven, AF-uBF atmospheric box furnace, AF-810A compact conveyor furnace, and AF-MT mesh belt type continuous furnace for superheated steam heat treatment of MLCC, LTCC, BBO, and ceramic parts. Shortens debinding time through hydrolysis of organic binders with reduced energy and gas consumption.
• Mesh Belt Type Continuous Furnaces Continuous furnaces with metal muffle available in standard, hydrogen atmosphere, and multi-inlet/exhaust variants. Supports 150-1000C operation for brazing, soldering, reflow, debinding, glass sealing, and reducing treatments. Multi-inlet/exhaust variant enables zone-specific gas composition control for LTCC, MLCC, and inductor production.
• Ceramic Conveyor Type Continuous Furnace Continuous furnace with ceramic chain conveyor for high-temperature treatment up to 1400C. Reduces metal contamination for ferrite sintering, MLCC firing, and ceramic sensor processing.
• INH Series High-Temperature Inert Gas Oven High-temperature inert gas oven up to 600C with low oxygen concentration of 20 ppm for degreasing ceramic parts and anti-oxidation treatments.
• Continuous Oven Custom continuous oven combining high temperature uniformity with various transport systems including roll-to-roll for films and sheet metals.
• GM Series Exhaust Gas Treatment Equipment Equipment to combust and decompose organic compounds in exhaust gas from heat treatment at up to 850C. Improves work environment and can reduce power consumption by 25.6% with optional heat exchanger.
• Development and Prototyping Furnaces Compact heat treatment systems for R&D and prototyping including 810A small type conveyor furnace (250-900C with air/N2/hydrogen atmospheres and purge chambers) and MB Series vacuum purge type box furnace (multipurpose with rapid pump-down and N2 atmosphere).
• Moldatherm Heaters Ceramic fiber unit heaters for electrical resistance heating in plain, half-cylinder, and quarter-cylinder forms. Features lightweight construction, low heat storage, and 30% reduction in electric energy consumption compared to brick furnaces.
• HGC Heavy Gauge Coil Heater Heavy-gauge coil and spacer heater for high-temperature durability up to 1250C, ideal for diffusion furnaces with repeated high temperature treatment.
• LGO Light Gauge Over-bend Heater Light-gauge wire heating elements integrated with ceramic fiber thermal insulating materials. Enables precise temperature control even at low temperatures with excellent temperature following during rapid temperature rises and falls.
• Industrial Heat Treatment Systems Heat treatment systems for industrial products and components used in automobiles, construction machinery, aircraft, and other fields, supporting various heat treatment processes including annealing, brazing, soldering, and metal heat treatment.

Quantifiable outcome

• Productivity increased by 10% with redesigned transfer function on contact annealing equipment for SiC power semiconductors
• +6 more outcomes

Segments4 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature8 records

Partnerships

Four partnerships are on record, tiered core.

• JTEKT (CHINA) CO., LTD.coreStrategic or Co-development Partner · 12 December 2024Subsidiary of JTEKT Group co-exhibiting at SEMICON China and other events. Provides complementary manufacturing equipment including machine systems for SiC power semiconductor applications.
• JTEKT MACHINE SYSTEMS CORPORATIONcoreStrategic or Co-development Partner · 12 December 2024JTEKT Group company co-exhibiting at SEMICON China showcasing machine system solutions alongside JTEKT Thermo Systems' heat treatment equipment for SiC power semiconductor manufacturing.
• JTEKT GRINDING TOOLS CORPORATIONcoreStrategic or Co-development Partner · 12 December 2024JTEKT Group company co-exhibiting at SEMICON events, providing grinding tools and solutions alongside thermal processing equipment for semiconductor manufacturing.
• JTEKT GroupcoreStrategic or Co-development PartnerParent company group providing corporate structure and shared resources. JTEKT Thermo Systems is a subsidiary contributing to the group's comprehensive manufacturing capabilities.

Scale indicators2 records

Recent moves6 records

Expansion highlights4 records

Broad incumbents

• Applied Materials: Largest semiconductor equipment manufacturer globally with broad thermal processing portfolio including Producer XP and Vantage Vulcan systems. Competes in advanced packaging and power semiconductor thermal processing.
• SCREEN Holdings: Japanese semiconductor equipment manufacturer with semiconductor cleaning and thermal processing products. Serves similar semiconductor manufacturers with overlapping equipment categories but broader portfolio focus.
• Tokyo Electron (TEL): One of the largest semiconductor equipment manufacturers globally, with a vertical furnace product line (TELFORMULA) competing directly with JTEKT's VF series. Larger incumbent offering a broader portfolio across deposition, etch, lithography, and cleaning.

Direct peers

• ASM International: Dutch semiconductor equipment manufacturer specializing in deposition and thermal processing tools, including vertical furnaces and epitaxy reactors. Direct competitor in semiconductor thermal processing with strong overlap in advanced node applications.
• Kokusai Electric Corporation: Leading manufacturer of batch deposition and thermal processing systems for semiconductor manufacturing, including vertical furnaces used in oxidation, diffusion, LPCVD, and annealing. Direct competitor in the same product category serving similar fab customers.
• Centrotherm International: German manufacturer of thermal processing systems for semiconductor and solar applications, including diffusion furnaces and annealing systems. Direct competitor in industrial process furnaces for semiconductor and photovoltaic manufacturing.
• IPSEN (Ipsen International): Global manufacturer of industrial heat treatment furnaces for aerospace, automotive, and commercial applications. Direct peer in the industrial heat treatment equipment business segment, serving automotive and construction machinery customers.
• SECO/WARWICK: Polish-based manufacturer of industrial heat treatment furnaces and vacuum metallurgy equipment, serving automotive, aerospace, and electronics industries. Direct peer in industrial heat treatment furnaces with similar customer applications.

Regional players

• Naura Technology Group: Leading Chinese semiconductor equipment manufacturer with thermal processing, etch, and CVD product lines. Competes in similar semiconductor manufacturing equipment categories, primarily serving domestic Chinese fab customers.
• PNC Process Systems: Korean semiconductor equipment manufacturer specializing in diffusion and LPCVD furnaces, directly competing in vertical furnace systems for power semiconductor and memory applications. Primarily serves Korean and Asian markets.

Market position

Strengths4 records

Weaknesses4 records

Competitive moat5 records

Key risks6 records

Key highlights6 records

Customer concentration

• LinkedInlinkedin.com/company/koyo-thermo-system-co.-ltd

Revenue estimate

Valuation estimate

Number of profiles

Subsidiaries1 record

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about JTEKT Thermo Systems