LOT Vacuum

What LOT Vacuum does

LOT Vacuum (엘오티베큠) is a privately held Korean industrial equipment manufacturer founded in 2002 and headquartered in Osan-si, Gyeonggi-do, with a manufacturing facility in Anseong-si. The company develops and produces dry vacuum pumps for semiconductor fabrication processes—principally vapor deposition, surface analysis, and thin-film deposition—offering three product series: the XD Series (1,200–1,800 m³/hr pumping speed for high-performance deposition), the HD Series (120–9,000 m³/hr across mid-range semiconductor applications), and the DD Series (100–6,000 m³/hr for varied vacuum requirements). It holds the #1 market share position in Korea for semiconductor dry vacuum pumps and is described as the only Korean-owned company with independently developed dry pump technology competing globally in this niche.

The company operates a B2B direct enterprise sales model, supplying equipment to memory, foundry, and power semiconductor manufacturers worldwide, with additional applications in display, solar/photovoltaic, and secondary battery manufacturing. Revenue is generated through hardware sales of dry vacuum pump systems and related solutions; pricing is not publicly disclosed. Its go-to-market relies on direct field sales to global semiconductor customers, supported by a corporate website available in Korean, English, and Chinese, a news and IR disclosure section, and adherence to ISO 14001 and ISO 45001 management system standards (certified 2022, with ISO 45001 renewed in 2023).

LOT Vacuum is privately held with no public ticker, no disclosed parent company, no subsidiaries, no funding rounds, and no ownership transactions in the source data. It is led by CEO Heung Shig Oh (오흥식) and operates as a focused, independent specialist in a niche industrial equipment segment long dominated by Japanese and European incumbents. Key data gaps include absent revenue, headcount, and cap-table disclosure, and the absence of any named customer logos beyond category-level references.

Name

LOT Vacuum

Legal name

(주)엘오티베큠

Website

https://lotvacuum.com

Company type

Private

Founded year

2002

Operating status

Operating

Headcount range

251–500 employees

Short description

LOT Vacuum (엘오티베큠) is a privately held Korean manufacturer of dry vacuum pumps for semiconductor fabrication, serving memory, foundry, and power semiconductor makers globally from its position as Korea's sole domestic vacuum-specialist firm.

Ownership category

akta.pro rank

Product category

Semiconductor Manufacturing Equipment

NAICS

Pump and Compressor Manufacturing (33391), Semiconductor Machinery Manufacturing (333242)

SIC

Pumps & Pumping Equipment (3561)

akta.pro primary industry

Vacuum Pumps & Systems (IMAHANAD)

akta.pro secondary industry

Vacuum Systems & Components (Vacuum Pumps, Ejectors, Cups, Grippers) (IMAHAGAN)

Keywords

• Dry vacuum pumps
• Semiconductor equipment
• Wafer deposition tools
• Industrial vacuum systems
• Thin film manufacturing

Headquarters

HQ city

Osan

HQ country

South Korea

HQ region

Asia

Offices2 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Technology or R&D, Personnel, Operations, Marketing or Sales

Revenue model

1. Dry Vacuum Pump Sales: Sale of industrial dry vacuum pump equipment and systems to semiconductor manufacturers. The company develops and manufactures dry pumps for deposition processes in semiconductor fabrication.

Go-to-market motion1 record

Distribution channels1 record

Marketing channels2 records

Core offering

LOT Vacuum designs, manufactures, and sells dry vacuum pump equipment (XD, HD, and DD series) for semiconductor fabrication processes such as thin-film deposition, wafer surface analysis, and related vacuum applications. The company also extends its dry vacuum technology to display, solar/photovoltaic, and secondary battery manufacturing. Products are sold directly to memory, foundry, and power semiconductor manufacturers.

Product overview

LOT Vacuum is Korea's only vacuum specialist company, offering a portfolio of dry vacuum pump products for the semiconductor industry. The company provides three core product series: XD Series (high-performance pumps with 1,200–1,800 ㎥/hr capacity), HD Series (mid-range pumps with 120–9,000 ㎥/hr capacity), and DD Series (compact pumps with 100–6,000 ㎥/hr capacity). These dry vacuum pumps are essential components for semiconductor manufacturing processes including vapor deposition, surface analysis, and thin-film deposition. The company also offers ESG management systems and talent management platforms as part of its corporate operations, but these are internal tools rather than customer-facing products.

Differentiator

Problem solved

Functional benefit

Products and services

• XD Series Dry Vacuum Pump High-performance dry vacuum pump designed for semiconductor deposition processes, with pumping speeds of 1,200 to 1,800 m³/hr and ultimate pressure of ≤ 5.0 x 10⁻³ Torr. Targeted at semiconductor manufacturers requiring high-quality thin-film deposition.
• HD Series Dry Vacuum Pump Mid-range dry vacuum pump series with pumping speeds of 120 to 9,000 m³/hr and flow rates of 2,000 to 150,000 LPM, designed for semiconductor manufacturing applications. Targeted at semiconductor manufacturers requiring flexible vacuum capacity.
• DD Series Dry Vacuum Pump Compact dry vacuum pump series with pumping speeds of 100 to 6,000 m³/hr, designed for various vacuum applications in semiconductor and related industries. Targeted at manufacturers needing smaller-scale or specialized vacuum capacity.

Named customers3 records

Segments4 records

Ideal customer profiles2 records

Technology focussed No

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature3 records

Scale indicators2 records

Recent moves5 records

Expansion highlights4 records

Broad incumbents

• Sumitomo Heavy Industries: Japanese diversified industrial conglomerate with semiconductor-related vacuum and process equipment operations. A broader incumbent that competes in adjacent vacuum and semiconductor equipment categories where LOT Vacuum operates.
• Atlas Copco: Swedish industrial group and parent of Edwards Vacuum — operates broadly across industrial and semiconductor vacuum with vastly greater scale, R&D, and global service footprint than LOT Vacuum.
• Shimadzu Corporation: Japanese diversified scientific and industrial equipment company with vacuum and semiconductor process equipment lines. A broader incumbent in adjacent semiconductor equipment categories that overlaps with LOT Vacuum's vacuum technology offerings.

Direct peers

• Edwards Vacuum (Atlas Copco): Global market leader in semiconductor dry vacuum pumps and abatement systems, serving memory, foundry, and logic fabs worldwide. Direct competitor to LOT Vacuum for fab tool-of-record designations across all major node generations.
• Kashiyama Industries: Japanese manufacturer specializing in dry vacuum pumps for semiconductor, display, and solar applications — a closely comparable niche specialist to LOT Vacuum with overlapping product positioning in the Asian semiconductor equipment supply chain.
• Pfeiffer Vacuum: German-headquartered vacuum technology company with a strong semiconductor dry pump portfolio. Competes with LOT Vacuum in advanced semiconductor fabs and shares the same primary customer base of global memory and foundry manufacturers.
• ULVAC: Japanese vacuum technology company offering dry pumps, deposition equipment, and broader semiconductor process equipment. Competes with LOT Vacuum in semiconductor dry pump applications and shares customer overlap across Asian memory and display manufacturers.
• Hanbell Precision: Taiwan-based manufacturer of vacuum pumps and compressors serving semiconductor and industrial customers — a comparable size and profile to LOT Vacuum within the broader Asian semiconductor equipment supply chain.
• Anest Iwata: Japanese manufacturer of industrial and semiconductor-grade dry vacuum pumps with significant Asian semiconductor customer base. Directly competes with LOT Vacuum for memory and foundry pump supply, particularly across Korean and Japanese fabs.
• Busch Vacuum Solutions: Global vacuum technology manufacturer with a broad industrial and semiconductor dry pump portfolio. Competes with LOT Vacuum across multiple end-markets including semiconductor, display, and industrial vacuum applications.

Market position

Strengths4 records

Weaknesses4 records

Competitive moat4 records

Key risks6 records

Key highlights7 records

Customer concentration

Compliance2 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles3 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments1 record

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about LOT Vacuum