What Sempa Systems does

Sempa Systems GmbH is a Dresden, Germany-based privately held designer and manufacturer of ultra-pure gas and chemical delivery systems for the semiconductor industry, founded in 2001 and affiliated with the Meptagon Group. The company operates from a production facility exceeding 2,000 m² that includes cleanroom, metalworking and electrical engineering workshops, a test station, and an in-house innovation laboratory (SEMPA LAB) for qualifying novel materials prior to deployment. Its portfolio is organized into three primary product families — GAS'BOT (gas supply cabinets for bulk and specialty gases), CHEM'BOT (liquid precursor delivery systems), and VAPOR'BOT (evaporation systems for CVD, ALD, and EPI processes) — each offered in SMART, PRO, and EXPERT tiers with specialized variants such as CHEM'BOT EnMat for pyrophoric materials and VAPOR'BOT SOLID for solid precursors. Supporting products include the HiBarSens permeation measurement line (detection limits to 10^-6 g[H2O] m^-2 d^-1) and the ECS1 emergency cylinder shutter (sub-100ms shut-off).

The company generates revenue primarily through engineered hardware system sales configured to customer specifications, supplemented by on-site installation, commissioning, and training services delivered by expert field teams. Its go-to-market is enterprise direct field sales targeting semiconductor fabs, LED manufacturers, solar cell manufacturers, and flexible electronics producers, with a particular specialization in safe handling of dangerous gases (flammable, pyrophoric, toxic, corrosive) — a capability the company positions as a primary differentiator. Sempa maintains German branch offices in Bavaria, Baden-Württemberg, and Thuringia to serve domestic high-tech manufacturing clusters, and participates in major industry events such as AVS ALD conferences. The company has co-developed safety technology with US-based Basis Solutions LLC and continues to extend its product line with compact form factors (GAS'BOT NANO) and upgraded measurement instruments (HiBarSens 3.0 Plus) targeting advanced-node fabs.

Name

Sempa Systems

Legal name

SEMPA SYSTEMS GmbH

Website

https://sempa.de

Company type

Private

Founded year

2001

Operating status

Operating

Headcount range

51–100 employees

Short description

Sempa Systems GmbH designs and manufactures ultra-pure gas and chemical delivery systems — gas cabinets, liquid precursor supply units, and evaporation systems — for semiconductor fabs and high-tech manufacturers, specializing in safe handling of dangerous specialty gases across Europe.

Ownership category

akta.pro rank

Product category

Semiconductor Process Equipment — Ultrapure Gas and Chemical Delivery Systems

NAICS

Pump and Compressor Manufacturing (33391)

SIC

Electronic & Other Electrical Equipment (No Computer Equip) (3600)

akta.pro primary industry

Process Gases & Gas Delivery Consumables (Specialty/Bulk/UHP) (HDAHAGAL)

Keywords

• Ultrapure gas supply
• Semiconductor process equipment
• Precursor chemical delivery
• Gas-phase evaporation systems
• Permeation measurement systems

Headquarters

HQ city

Dresden

HQ country

Germany

HQ region

Europe

Offices4 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Supply Chain, Operations, Technology or R&D, Infrastructure, Marketing or Sales

Revenue model

1. Hardware Systems Sales: Sale of gas cabinets, chemical supply systems, and evaporation equipment including GAS'BOT, CHEM'BOT, and VAPOR'BOT product families. Systems are engineered and manufactured to customer specifications.
2. Installation and On-site Services: Expert team installation services, commissioning procedures, and product training delivered on-site at customer facilities.

Go-to-market motion1 record

Distribution channels1 record

Marketing channels1 record

Core offering

SEMPA SYSTEMS designs, manufactures and installs ultrapure gas and chemical delivery systems for semiconductor, LED, solar and flexible-electronics manufacturing. Its portfolio centers on three families — GAS'BOT gas-supply cabinets, CHEM'BOT liquid-precursor supply systems, and VAPOR'BOT evaporation systems for CVD/ALD/EPI — plus HiBarSens permeation measurement instruments and ECS1 emergency cylinder shutter safety equipment. Every solution is engineered to customer process requirements, manufactured in stainless steel, and delivered with on-site installation, commissioning and operator training.

Product overview

SEMPA SYSTEMS is a product innovator in the design and construction of ultrapure Gas- and Chemical delivery solutions for the semiconductor industry. The product portfolio consists of three main product families: GAS'BOT (gas supply systems for all types of gases), CHEM'BOT (liquid supply systems for precursor chemicals), and VAPOR'BOT (evaporation systems for gas phase processes like CVD, ALD or EPI). Each family is offered in three tiers (SMART, PRO, EXPERT) plus specialized variants. Supporting products include HiBarSens measurement systems for permeation testing and ECS1 emergency cylinder shutters for safety. The company also developed the specialized CHEM'BOT EnMat for energetic pyrophoric materials and VAPOR'BOT SOLID for solid precursor evaporation.

Differentiator

Problem solved

Functional benefit

Brands

• GAS'BOT: Gas supply cabinet systems for all types of gases, including specialty gases for semiconductor applications.
• CHEM'BOT
• VAPOR'BOT
• HiBarSens
• ECS1
• SEMPA LAB

Products and services

• GAS'BOT NANO Ultracompact, fully automated gas supply cabinet for semiconductor manufacturing, engineered for maximum performance on a minimal footprint in high-throughput fabs with tight space planning.
• GAS'BOT SMART Entry-level gas cabinet providing safe, automated supply of dangerous (toxic or pyrophoric) precursor gases in a cost-optimized design.
• GAS'BOT PRO Professional-grade gas supply system with fully automated design and the safest setup for energetic and toxic precursor gases, in a production-oriented configuration.
• GAS'BOT EXPERT Expert-grade fully automated gas supply system with Direct Liquid Injection capability, offering the highest throughput for advanced semiconductor processes.
• ECS1 - Emergency Cylinder Shutter Automatic mechanical shut-off system that closes the valve within 100ms in an emergency for dangerous gases supplied in gas bottles with manually operated valves.
• O3-BOT High-purity ozone generation and supply system for semiconductor manufacturing applications.
• CHEM'BOT SMART Automated liquid precursor feed system for safe supply of dangerous (toxic or pyrophoric) precursor chemicals, in a cost-optimized design.
• CHEM'BOT PRO Fully automated liquid precursor supply system with a dual-vessel design that delivers uninterrupted supply via automated switchover.
• CHEM'BOT PRO SOLAR Specialized variant of the CHEM'BOT PRO liquid supply system configured for solar cell manufacturing processes.
• CHEM'BOT EXPERT Fully automated liquid precursor supply system with integrated buffer tank for seamless precursor feed, dead-space-optimized design and highest redundancy for demanding semiconductor fab operation.
• CHEM'BOT EnMat Specialized safety system for energetic pyrophoric materials, jointly developed with partner Basis Solutions LLC, that contains and abates leaked pyrophoric metal organics inside the cabinet without fire, damage or particle contamination.
• VAPOR'BOT SMART Automated bubbler-based evaporation system for safe evaporation of dangerous (toxic or pyrophoric) precursor chemicals used in CVD and ALD processes, in a cost-optimized design.
• VAPOR'BOT PRO Fully automated evaporation system with the safest setup for energetic and toxic precursor substances, providing uninterrupted supply through automated vaporizer refill in a production-oriented configuration.
• VAPOR'BOT EXPERT Fully automated Direct Liquid Injection evaporation system for direct vapor generation with the highest throughput, used where bubbler-based systems reach their limits, enabling central precursor vapor fab supply to multiple points of use.
• VAPOR'BOT SOLID Advanced solution for reliable evaporation of solid precursors for demanding semiconductor processes such as ALD, CVD and EPI, combining high-temperature operation with active pressure and temperature control for stable gas-phase generation.
• HiBarSens BASIC WVTR measurement system deriving water-vapor transmission rate down to >8×10^-5 g m^-2 d^-1, targeting food packaging, pharmaceutical and basic flexible-electronics applications with a Carrier Gas measurement mode up to 50°C.
• HiBarSens PRO Ultra-high-barrier permeation measurement system achieving detection down to 10^-6 g m^-2 d^-1 for high-end flexible-electronic applications, with Diffusion and Combination advanced measurement modes and high-temperature operation up to 85°C for Damp-Heat testing.
• HiBarSens EXPERT Advanced permeation measurement system that measures both water-vapor transmission rate (WVTR) and oxygen transmission rate (OTR) simultaneously under identical measurement conditions, providing the most comprehensive evaluation of barrier properties.
• HiBarSens PreConCell Preconditioning accessory that establishes the time-consuming concentration gradient in a separate cell, allowing HiBarSens users to obtain ultra-barrier measurement results within hours rather than weeks.
• On-site Installation, Commissioning and Training Services Expert team delivery, on-site installation and commissioning of Sempa gas, chemical and evaporation systems, plus product training in safe use and handling at customer semiconductor and high-tech manufacturing facilities.

Quantifiable outcome

• WVTR detection limit: 10-6 g[H2O] m-2 d-1
• +2 more outcomes

Named customers4 records

Segments3 records

Ideal customer profiles3 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature6 records

Partnerships

One partnership is on record.

• Basis Solutions LLCcoreStrategic or Co-development PartnerJoint development partnership for designing integrated safety control systems. Together designed CHEM'BOT EnMat - a fully integrated self-contained safety control system for handling pyrophoric metal organic materials. The system monitors and controls the environment within the CHEM'BOT cabinet, containing and abating any leaked pyrophoric material without fire, damage, or particle contamination.

Scale indicators3 records

Recent moves6 records

Expansion highlights6 records

Direct peers

• HORIBA: HORIBA is a Japan-based manufacturer of measurement and analysis instruments with a semiconductor equipment division supplying gas flow, leak detection, and process monitoring equipment. Its measurement technology competes with Sempa's HiBarSens barrier measurement systems in adjacent fab QA applications.
• VAT Group: VAT Group is a Switzerland-based manufacturer of high-performance vacuum valves and gas handling components used extensively in semiconductor process equipment. It serves the same fab customer base as Sempa, with overlapping gas containment and process isolation technology.
• MKS Instruments: MKS Instruments provides gas and chemical delivery, flow control, and measurement solutions for semiconductor and adjacent high-tech manufacturing. Its products overlap directly with Sempa's GAS'BOT and CHEM'BOT lines, serving the same fab customer base with comparable delivery system functionality.
• Brooks Instrument (Brooks Automation): Brooks Instrument manufactures mass flow controllers and gas flow measurement devices used in semiconductor process gas delivery. Its flow control products sit inside Sempa's gas cabinets, making it both a potential supplier and a peer in the semiconductor gas delivery ecosystem.

Broad incumbents

• Linde plc: Linde is the world's largest industrial gases company, with a significant electronics/semiconductor gas delivery business. It supplies specialty gases and large-scale delivery infrastructure to semiconductor fabs, competing with Sempa at the bulk-gas and specialty-gas delivery system layer.
• Air Products and Chemicals: Air Products is a major global industrial gases company with a significant semiconductor electronics specialty gas business. It supplies bulk and specialty gases and bulk delivery systems to fabs, partially overlapping with Sempa's gas cabinet delivery offering but at much larger scale and with bundled gas supply.
• Entegris: Entegris is a leading US-based supplier of specialty materials, gas and chemical delivery systems, and fluid handling equipment to the semiconductor industry. It is the closest large-scale peer to Sempa, offering overlapping gas cabinet and precursor delivery products but at significantly greater scale and global footprint.
• Merck KGaA (Performance Materials / former Versum Materials): Merck KGaA acquired Versum Materials in 2019 and now operates a major semiconductor materials and delivery systems business serving advanced fabs globally. It is a direct competitor in specialty gas/chemical delivery for semiconductor manufacturing with a much broader product portfolio and global reach than Sempa.

Regional players

• Pfeiffer Vacuum: Pfeiffer Vacuum is a Germany-based manufacturer of vacuum technology and gas analysis equipment serving semiconductor, analytical, and industrial markets. It overlaps with Sempa in gas-handling and measurement equipment for fabs, and shares a German/European industrial base.

Emerging players

• Ultra Clean Holdings (UCT): UCT supplies gas delivery systems, fluid handling modules, and other critical subsystems to semiconductor equipment manufacturers. It operates in a comparable niche to Sempa's GAS'BOT and CHEM'BOT product lines, serving fab customers with integrated gas panel and delivery solutions.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat4 records

Key risks6 records

Key highlights7 records

Customer concentration

Revenue estimate

Valuation estimate

Number of profiles

Profiles1 record

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Sempa Systems