What EBARA Precision Machinery does

EBARA Precision Machinery Europe GmbH (EPME) is the European regional operating entity of Japan's EBARA Corporation (TSE: 6361), headquartered in Dresden, Germany since March 2025 after relocating from Sauerlach. The company manufactures and distributes dry vacuum pumps (EV-A, EV-S, EV-M, EV-PA, EV-SA, EV-X, ESR, EST, ESA), turbo molecular pumps (EMT magnetically levitated, EMT-MK with integrated controller, EBT ceramic bearing), gas abatement systems (G5, G6, TND, Dynox, Dynox feat. TEOS, LA+), and semiconductor manufacturing equipment including CMP tools (F-REX series), ultra-fine plating systems (UFP series with AI detection control), and wafer bevel polishers (EAC series). It also sells the IFB-Smart interface box and integrated dry-pump-plus-abatement solutions. With over 3,600 CMP systems delivered worldwide and more than 80% of the top 20 global chip manufacturers as customers, EPME positions itself as a world market leader in CMP, bevel polishing, and plating systems.

Name

EBARA Precision Machinery

Legal name

EBARA Precision Machinery Europe GmbH

Website

https://ebara-pm.eu

Company type

Private

Founded year

1994

Operating status

Operating

Headcount range

101–250 employees

Short description

EBARA Precision Machinery Europe, a subsidiary of Japan's EBARA Corporation, manufactures dry vacuum pumps, turbo molecular pumps, gas abatement systems, CMP tools, plating systems, and wafer bevel polishers for the European semiconductor, analytical, R&D, chemical, photovoltaic, and LED industries.

Ownership category

akta.pro rank

Product category

Semiconductor Manufacturing Equipment

NAICS

Pump and Compressor Manufacturing (33391), Other General Purpose Machinery Manufacturing (3339)

SIC

General Industrial Machinery & Equipment (3560), Special Industry Machinery, Nec (3559)

akta.pro primary industry

Vacuum Pumps & Systems (IMAHANAD)

akta.pro secondary industry

Vacuum Systems & Components (Vacuum Pumps, Ejectors, Cups, Grippers) (IMAHAGAN)

Keywords

• Dry vacuum pumps
• Turbo molecular pumps
• Gas abatement systems
• Semiconductor manufacturing equipment
• Chemical mechanical polishing

Headquarters

HQ city

Sauerlach

HQ country

Germany

HQ region

Europe

Offices9 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Supply Chain, Personnel, Technology or R&D, Operations, Marketing or Sales, Infrastructure

Revenue model

1. Equipment Sales: Direct sales of vacuum pumps, turbo molecular pumps, gas abatement systems, and semiconductor manufacturing equipment (CMP tools, plating systems, bevel polishers) to industrial customers
2. Service and Maintenance: Comprehensive service including customer support, on-site field service, repair, overhaul, refurbishment, spare parts supply, and process support for components and systems
3. Training Services: Training center in Dresden offering trainings in English, German and French on vacuum pumps and gas abatement systems

Pricing tiers

Go-to-market motion1 record

Distribution channels3 records

Marketing channels5 records

Core offering

EBARA Precision Machinery Europe GmbH (EPME) manufactures and distributes dry vacuum pumps, turbo molecular pumps, gas abatement systems, and semiconductor manufacturing equipment including Chemical Mechanical Polishing (CMP) tools, electroplating systems, and wafer bevel polishers. The company serves semiconductor chip manufacturers, chemical industry, R&D institutions, photovoltaic and LED manufacturers across Europe and Israel through direct enterprise sales and an extensive field service network operating from overhaul centres in Livingston (Scotland) and Dresden (Germany).

Product overview

EBARA Precision Machinery Europe offers a comprehensive portfolio of precision industrial equipment and components for semiconductor manufacturing and vacuum applications. The product lineup includes: (1) Dry Vacuum Pumps - nine models (EV-A, EV-S, EV-M, EV-PA, EV-SA, ESR, EV-X, EST, ESA) ranging from light-duty air-cooled units to heavy-duty water-cooled multi-stage lobe pumps; (2) Turbo Molecular Pumps - three models (EMT magnetically levitated, EMT-MK with integrated controller, EBT ceramic bearing) for ultra-high vacuum applications; (3) Gas Abatement Systems - six models (G5, G6, TND, Dynox, Dynox feat. TEOS, LA+) covering wet scrubbers, combustion systems, and eco-friendly abatement solutions; (4) Semiconductor Systems - CMP tools (F-REX200M2, F-REX300X), Ultra Fine Plating systems (UFP300A, UFP300AD) with AI detection control, and Wafer Bevel Polishers (EAC200bi-hp, EAC300bi-hv); (5) Engineering Products - Interface Box IFB smart for pump communication; (6) Integrated Solutions combining dry pumps with abatement systems; (7) Services including component overhaul with ISO certifications and systems refurbishment. The company operates service centers in Scotland (since 1993) and Germany (since 2020) and has delivered over 3,600 CMP systems worldwide.

Differentiator

Problem solved

Functional benefit

Products and services

• EV-A Dry Vacuum Pump Air-cooled dry vacuum pump designed for non-reactive general vacuum applications. Ideally suited for lithium-ion battery production with plug-and-pump installation and constant pumping speed at atmospheric pressure. Models comply with CE standards.
• EV-S Dry Vacuum Pump Energy-efficient dry vacuum pump with the lowest power consumption in its class. Features flexible rotation speed and idle mode for reduced energy consumption. No nitrogen purge required in clean applications. Available in Nickel alloy (N) and Nitrogen purge module (P) versions.
• EV-M Dry Vacuum Pump Water-cooled multi-stage lobe dry vacuum pump designed for harsh duty applications with higher H2 pumping speed compared to screw-type vacuum pumps. Features intelligent control system with idle mode for energy savings and fab space-saving compact design.
• EV-PA Dry Vacuum Pump Portable, air-cooled dry vacuum pump designed to replace scroll and oil pumps for cleaning applications. Features extended maintenance-free lifetime, hydrocarbon-free operation for eco-friendly and cost-saving performance, with remote monitoring and control capabilities.
• EV-SA Dry Vacuum Pump Air-cooled dry vacuum pump for clean vacuum applications with lowest energy consumption in its class. Requires no maintenance and offers wide vacuum range with minimal footprint and high ROI rate for light duty applications.
• ESR Dry Vacuum Pump Water-cooled dry vacuum pump with superior corrosion resistance and variable pumping speeds for flexible usage in medium to harsh applications. Features low noise level, low vibration, nickel resistance, and low cost of ownership.
• EV-X Dry Vacuum Pump Sustainable dry vacuum pump for medium to harsh applications with 30% smaller footprint and up to 38% energy savings compared to other vacuum pumps. Features optimized pump temperature profiles and higher gas flow pumping with various technology options.
• EST Dry Vacuum Pump Water-cooled dry vacuum pump for powdery, corrosive applications with reactive chemical by-products. Features high gas load stability, flexible gas throughput, and compact design allowing increased operating temperatures and corrosion resistant materials.
• ESA Dry Vacuum Pump Water-cooled dry vacuum pump for hydrogen processing and large volume chambers with best-in-class hydrogen pumping capability. Features robust and compact design with lobe style booster pump, intelligent rotation, and multi-stage operation.
• EMT Turbo Molecular Pump 5-axis magnetically levitated, hydrocarbon-free vacuum pump providing ultra-high vacuum with superior temperature control, corrosion resistance, ultra-low vibration, and radiation resistance. Available with PK board integration.
• EMT-MK Turbo Molecular Pump Turbo molecular pump with integrated controller and temperature management system for high throughput and energy-efficient operations. Compact size reduces material outgassing with multiple interface options and air or water cooling available.
• EBT Turbo Molecular Pump Ceramic bearing turbo vacuum pump for high-tech manufacturers with rugged mechanical bearing design. Cost-effective solution with water, fan, or convection cooling options. Features vibration-free operation and structured for air inrush tolerance.
• G5 Gas Abatement System Highly efficient universal wet scrubber gas abatement solution for semiconductor, LED manufacturing, chemical industry, and various industrial applications requiring robust emission control.
• G6 Gas Abatement System Highly efficient universal wet scrubber gas abatement solution optimized for photovoltaic applications and various industrial emission control requirements.
• TND Gas Abatement System Universal combustion-based gas abatement solution for treating hazardous gases from semiconductor manufacturing processes with high efficiency and reliability.
• Dynox Gas Abatement System Sustainable gas abatement system engineered in Europe with up to 95% energy savings. Operates without fuel gas, nitrogen, oxygen, city water, or wastewater, requiring only 220W electricity. Features 50% less installation cost and 90% less electricity costs.
• Dynox feat. TEOS Gas Abatement System Cost-effective pyrophoric gas abatement system with integrated TEOS solution developed and manufactured in Germany. Fully oxidizes TEOS without extra washer or burner, offering eco-friendly operation without water or extra gas usage.
• LA+ Gas Abatement System Space-saving combustion exhaust gas abatement system with reduction of byproduct adhesion and NOx/COx emissions. Features compact design with 990mm height for space efficiency in fabs, hydrogen fuel option, and maximum airflow capacity of 600L/min. Engineered and produced in Japan.
• F-REX200M2 CMP Tool Chemical Mechanical Polishing tool for 200mm wafers with high k-materials and aluminium layers. Features modular design suitable for multiple process setups with user-oriented system configuration. Also available for 150mm wafers as F-REX150M2.
• F-REX300X CMP Tool Best-in-class CMP tool for 300mm wafers with four platen configuration supporting parallel and serial polishing modes for Cu and advanced applications. High process performance with energy-saving design concept and high reliability.
• UFP300A Ultra Fine Plating System Electroplating tool for mask plating processes including redistribution and bumping in wafer level packaging. Features AI detection control for high efficiency, compact solution with versatility for redistribution, bumping, IC advanced packaging, and multi-layer applications with pattern plating for copper, nickel, gold, and solder.
• UFP300AD Ultra Fine Plating System Fully automated electroplating tool for advanced wafer level packaging processes with high speed and AI detection control capabilities.
• EAC200bi-hp Wafer Bevel Polisher High-speed bevel polishing system for automated wafer edge processing. Removes damages and reshapes bevel to specific profile using mechanical slurry-free process for improved wafer yield rates in semiconductor production.
• EAC300bi-hv Wafer Bevel Polisher High-volume production bevel polishing system for wafer edge processing with mechanical slurry-free technology that cleans, reshapes bevel, and removes damages to reduce wafer yield loss.
• Interface Box IFB smart (IFB-S) Communication interface between EBARA vacuum pumps and surrounding production basement. Features versatile wiring, standardized interfaces, galvanic isolation, 24V DC power supply, 12 freely programmable LEDs, ethernet connector, and specific tool connectors for different suppliers. Engineered and produced in Germany.
• Integrated Dry Pump Abatement Solutions Harmonized combination of dry vacuum pumps with efficient gas abatement systems for customized all-in-one solutions. Reduces installation workload and facility load with harmonized systems installed in less time.
• Engineering Services Custom-engineered vacuum and abatement solutions tailored for complex engineering needs. Combines EBARA engineering experience from Japan with applications knowledge from Dresden, offering innovations for customer time and cost savings.
• Component Overhaul Services Comprehensive service for dry vacuum pumps, turbo molecular pumps, and gas abatement systems with over 350 years of combined staff competence. ISO 9001, ISO 14001, and ISO 45001 certified overhaul centers in Livingston, Scotland (est. 1993) and Dresden, Germany (est. 2020). Also services third-party brands including dry pumps, turbo pumps, scroll pumps, and wet pumps.
• Systems Service & Refurbishment Full service for CMP systems including customer support, on-site field service, repair service for EBARA and third-party pumps, refurbishment, spare parts supply within 24 hours, and process support. Refurbishment includes tool upgrades, set-up tests, and trainings in cleanroom facilities.

Quantifiable outcome

• Over 3,600 CMP systems delivered worldwide
• +5 more outcomes

Named customers3 records

Segments7 records

Ideal customer profiles5 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

AI capability2 records

Feature7 records

Partnerships

Two partnerships are on record, tiered core.

• Leti Innovation DayscoreStrategic or Co-development Partner · 23 June 2026Silver Sponsor for Let Innovation Days in Grenoble, France (June 23-26, 2026). Decision makers of the semiconductor industry meet to discuss and network. EPME participates as a key industry partner in the semiconductor ecosystem.
• Semiconductor Climate Consortium (SCC)coreStrategic or Co-development PartnerEBARA Corporation participates as founding member in the Semiconductor Climate Consortium of SEMI, supporting climate action in the semiconductor industry supply chain.

Scale indicators11 records

Recent moves8 records

Expansion highlights5 records

Direct peers

• Pfeiffer Vacuum: German-headquartered direct competitor in vacuum pumps (rotary vane, turbomolecular, dry pumps), leak detection, and vacuum systems. Pfeiffer's HiPace turbomolecular pumps and dry pump portfolio compete head-to-head with EPME's EMT, EBT, and EV series in semiconductor, analytical, and R&D applications.
• ULVAC: Japanese-headquartered direct competitor across nearly the entire EPME portfolio — dry vacuum pumps, turbo molecular pumps, gas abatement systems, and semiconductor manufacturing equipment (CMP, sputtering, etch). ULVAC serves the same semiconductor, flat-panel display, and electronics customers globally, making it the closest like-for-like competitor to EBARA's precision machinery business.
• ANEST IWATA: Japanese dry vacuum pump manufacturer with a global footprint and direct competition in semiconductor dry pumps (ISP, VSL series). ANEST IWATA competes with EPME's EV and ESR dry pump lines, particularly in Asian-headquartered semiconductor manufacturers expanding into Europe.
• Busch Group: Family-owned German vacuum pump manufacturer offering dry claw, rotary vane, screw, and turbomolecular pumps across industrial and semiconductor applications. Competes with EPME's vacuum pump portfolio in chemical, R&D, and selected semiconductor applications, with overlapping European industrial customer base.
• Edwards Vacuum (Atlas Copco): Part of Atlas Copco's Vacuum Technique division, Edwards is a leading global supplier of vacuum and abatement solutions for semiconductor manufacturing. Direct overlap with EPME's dry vacuum pump (iX/iH/iL series), turbo molecular pump (STP/iXH), and gas abatement (Atlas Copco Gas Abatement) product lines serving the same chip fab customer base.
• VAT Group: Swiss-based world leader in vacuum valves, vacuum sealing, and related components used in semiconductor manufacturing equipment. While VAT is more narrowly focused on valves than EPME's broader portfolio, it is a key component supplier and direct competitor in the wafer fab vacuum ecosystem, with overlapping customers in chip manufacturing.

Broad incumbents

• Lam Research: Major semiconductor equipment manufacturer in etch and deposition. While not a direct vacuum pump competitor, Lam sells integrated process equipment that incorporates vacuum technology, making it an indirect competitor in the same fab capex pool and customer set as EPME.
• Applied Materials: Global #1 in semiconductor wafer fabrication equipment with a broad portfolio that includes CMP systems (Reflexion, Mirra) competing directly with EPME's F-REX CMP tools. As a much larger incumbent, Applied Materials offers bundled equipment solutions and global service that dwarf EPME's standalone CMP offering.
• Tokyo Electron: Japan-headquartered global semiconductor equipment leader in coater/developers, etch, CVD, and cleaning systems. Like EBARA, Tokyo Electron is a Japanese conglomerate with broad semiconductor equipment exposure; competes for the same Japanese-headquartered semiconductor customers as EPME.

Emerging players

• Shimadzu Corporation: Japanese analytical and scientific instrument manufacturer that uses and supplies turbomolecular pumps and vacuum components. Shimadzu is both a customer of vacuum technology (analytical instruments, mass spectrometry) and a peer in selected scientific instrument applications, partially overlapping EPME's Analytical Instruments customer segment.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks6 records

Key highlights7 records

Customer concentration

Compliance8 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles2 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about EBARA Precision Machinery