Ebara Corporation

What Ebara Corporation does

Ebara Corporation is a 113-year-old Japanese industrial machinery manufacturer headquartered in Tokyo and listed on the Tokyo Stock Exchange Prime Market (TYO:6361). The company is organized into five in-house business companies serving distinct end-markets: Precision Machinery (semiconductor manufacturing equipment), Energy (oil & gas, LNG, petrochemical), Building Service & Industrial (HVAC, standard pumps, chillers), Infrastructure (municipal water systems), and Environmental Solutions (waste incineration plants). Its core technology centers on fluid machinery and precision engineering — pumps, compressors, turbines, vacuum systems, and CMP equipment — with proprietary know-how built up since 1912.

Ebara's product portfolio includes the world's largest-share dry vacuum pumps for semiconductor fabs (over 200,000 units shipped), second-largest-share CMP systems for wafer planarization (3,967 units shipped), >50% global market share in large ethylene plant compressors, 100% global share in high-pressure ammonia pumps for fertilizer plants since 1969, and the world's top position in cryogenic pumps for LNG. The company also pursues "next-generation energy" and aerospace adjacencies — liquid hydrogen cargo pumps (world's first type approval, 2026), hydrogen-fired absorption chillers, ammonia canned motor pumps, CO2 injection equipment for CCS, and electric turbo pumps for reusable rockets with partner Innovative Space Carrier.

Ebara generates revenue primarily through hardware sales of custom and standard industrial equipment (pumps, compressors, turbines, CMP systems, gas abatement systems, chillers, cooling towers, waste incineration plants), with an aftermarket services layer (parts, repairs, overhauls) supported by 50+ global service centers. Distribution is direct and subsidiary-led across 112 group companies worldwide, with quote-based pricing for custom engineered systems and field-sales motions targeting semiconductor fabs, energy majors, petrochemical operators, fertilizer plants, utilities, and government/municipal infrastructure customers.

Name

Ebara Corporation

Legal name

EBARA CORPORATION

Website

https://ebara.com

Company type

Public

Founded year

1912

Operating status

Operating

Headcount range

5,001–10,000 employees

Short description

Ebara Corporation is a 113-year-old Japanese industrial machinery manufacturer producing pumps, compressors, turbines, CMP systems, and vacuum equipment for semiconductor fabs, LNG/petrochemical plants, fertilizer producers, and municipal infrastructure customers across 112 global subsidiaries.

Ownership category

akta.pro rank

Product category

Industrial Fluid Machinery

NAICS

Pump and Compressor Manufacturing (33391), Other General Purpose Machinery Manufacturing (3339), Air and Gas Compressor Manufacturing (333912), Commercial and Service Industry Machinery Manufacturing (33331)

SIC

General Industrial Machinery & Equipment (3560), Oil & Gas Field Machinery & Equipment (3533), Refrigeration & Service Industry Machinery (3580), Industrial & Commercial Fans & Blowers & Air Purifing Equip (3564)

akta.pro primary industry

Pump & Compressor Packages (Skids, Booster Sets) (IMAHANAG)

akta.pro secondary industries

Aftermarket Parts, Service & Remanufacturing (Pumps/Compressors) (IMAHANAJ), Controls, Monitoring & Condition Management (for Pumps/Compressors) (IMAHANAI), Aftermarket Exhaust & Emissions Components Manufacturing (Mufflers/Catalysts/DPF/EGR) (IMACANAE), Compressors, Refrigeration Components & Condensing Units (IMADANAG), Hydraulic, Pneumatic & Fluid Power Systems MRO (Cylinders, Pumps, Valves, Hoses) (TLAKAHAI)

Keywords

• Industrial pump manufacturing
• Semiconductor manufacturing equipment
• Cryogenic pump systems
• Compressors and turbines
• Fluid machinery

Headquarters

HQ city

Tokyo

HQ country

Japan

HQ region

Asia

Offices16 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Operations, Technology or R&D, Personnel, Supply Chain, Marketing or Sales, Infrastructure

Revenue model

1. Precision Machinery Products: Dry vacuum pumps, CMP systems, gas abatement systems, and ozonized water generators for semiconductor manufacturing
2. Energy Equipment: Custom pumps, compressors, turbines, and cryogenic products for oil, gas, LNG, and petrochemical industries
3. Building & Industrial Products: Standard pumps, blowers, chillers, and cooling towers for construction and industrial applications
4. Infrastructure Products: Custom pumps and equipment for water infrastructure and municipal systems
5. Environmental Solutions: Municipal and industrial waste incineration plant design, construction, and management
6. Aftermarket Services: Parts supply, repairs, modifications, regeneration, maintenance and field servicing for delivered equipment

Go-to-market motion1 record

Distribution channels5 records

Marketing channels6 records

Core offering

Ebara Corporation manufactures and sells industrial fluid machinery and related equipment through five in-house companies: Precision Machinery (dry vacuum pumps, CMP systems, exhaust abatement systems, ozonizers for semiconductor manufacturing), Energy (custom pumps, Elliott-brand compressors and steam turbines, cryogenic pumps under Cryodynamics for oil, gas, LNG, and petrochemical), Building Service & Industrial (standard pumps, chillers, cooling towers, blowers), Infrastructure (custom pumps for water infrastructure), and Environmental Solutions (municipal and industrial waste incineration plants). The company also operates a global aftermarket service network.

Product overview

Ebara Corporation is a diversified industrial machinery manufacturer organized into five companies serving distinct market segments. The Precision Machinery Company offers dry vacuum pumps (world's largest market share), CMP systems for semiconductor manufacturing (second-largest global share), exhaust abatement systems, and ozonizer products. The Energy Company provides custom pumps, Elliott-brand compressors and steam turbines, and cryogenic pumps under the Cryodynamics brand with world-leading positions in LNG and ethylene applications. The Building Service & Industrial Company supplies standard pumps, booster units, fans, chillers, and cooling towers for infrastructure and buildings, along with digital services including the EBARA Maintenance Cloud and RISSA remote monitoring system. The Infrastructure Company offers custom pumps and blowers for municipal water systems. The Environmental Solutions Company provides municipal and industrial waste incineration plants. Additionally, the company is pioneering innovation products including liquid hydrogen pumps, hydrogen-fueled absorption chillers, ammonia canned motor pumps, and electric rocket engine pumps, while the eDYNAMiQ brand represents its standard pump technology portfolio.

Differentiator

Problem solved

Functional benefit

Brands

• Elliott: Brand for compressors, turbines, and cryogenic products under the Energy Company segment
• eDYNAMiQ
• Cryodynamics
• EBARA Hatakeyama Memorial Fund

Products and services

• Dry Vacuum Pumps Oil-free vacuum pumps creating clean environments for semiconductor manufacturing by removing gas using high-speed rotation control of precision impellers; world's largest market share with over 200,000 units shipped.
• CMP Systems (Chemical Mechanical Polishing/Planarization) High-precision semiconductor manufacturing equipment for wafer surface polishing, achieving nanometer-level machining precision; second-largest global market share with 3,967 units shipped.
• Exhaust Abatement Systems Gas treatment systems that detoxify greenhouse gases (PFCs), harmful gases, flammable gases, and odorous gases through combustion, wet, dry, and catalytic treatment methods for semiconductor and industrial applications.
• Ozonizer-related Products Ozone generators and ozonized water generators for cleaning, sterilization, and surface treatment in semiconductor, medical, and food industries, with ultra-high concentration ozone gas generation up to 125 mg/l.
• Elliott Compressors Turbo-compressors for oil and gas, petroleum refining, petrochemical processing, LNG, and cryogenic refrigeration applications under the Elliott brand.
• Elliott Steam Turbines Steam turbines for mechanical and power generation applications, including power recovery expanders that convert waste heat to power, reducing carbon footprint.
• Elliott Cryodynamics Cryopumps and Expanders Cryogenic pumps and expanders for liquefied gas applications operating at extremely low temperatures for LNG plants and aggressive fluid handling; world top market share.
• Custom Pumps Customized high-quality pumps including intake pumps, large-scale high-pressure pumps, boiler feed pumps, ammonia pumps, carbamate pumps, and circulating water pumps for energy, infrastructure, and industrial applications.
• Standard Pumps Mass-produced industrial pumps including surface pumps (GS, FS, S models), inline pumps (LPD, LPS), stainless steel pumps (FDP), and slurry pumps (SAL) for water supply, drainage, and industrial fluid transfer.
• Booster Pump Units Pump units for water supply and pressure boosting in buildings, condominiums, and municipal water systems.
• Fans / Blowers Industrial fans and blowers for air conditioning, ventilation, and exhaust applications in buildings and industrial facilities.
• Industrial Chillers Refrigeration equipment including centrifugal chillers, screw chillers, and absorption chillers for commercial and industrial air conditioning.
• EBARA Maintenance Cloud Cloud-based equipment inspection and monitoring platform that detects equipment failures by linking data from multiple devices, enabling centralized monitoring and predictive maintenance for building systems.
• RISSA Remote Monitoring System Condition monitoring system for chillers using temperature and pressure data to detect failure signs with high accuracy, connected to EBARA Maintenance Cloud for labor and energy savings.
• Liquid Hydrogen Booster Pump World's first centrifugal booster pump for liquid hydrogen developed by Ebara, enabling liquid hydrogen pressure boosting for hydrogen energy applications.
• Hydrogen-Fueled Absorption Chiller Heater World's first hydrogen-fueled absorption chiller heater, contributing to hydrogen society implementation as next-generation energy technology.
• Ammonia Canned Motor Pump Sealed pump for safely transferring cryogenic ammonia liquids in airtight state, developed for new fuel applications to replace petroleum energy.
• PM Motors with Built-in Inverter Pumps Pumps with integrated permanent magnet motors and inverters that reduce power consumption, promoting energy efficiency in Japan.
• Electric Pumps for Rocket Engines Electric turbo pump systems for rocket engines, successfully tested with cryogenic liquid for space launch vehicle applications with partner Innovative Space Carrier (ISC).
• CO2 Injection Pumps and Compressors Pumps and compressors for carbon dioxide capture and storage (CCS) systems, contributing to decarbonized society through CO2 reduction.
• Municipal and Industrial Waste Incineration Plants Design, construction, operation, and maintenance of municipal and industrial solid waste incineration plants delivered through the Environmental Solutions Company.
• Aftermarket Parts, Service and Field Support Global aftermarket services including parts supply, repairs, modifications, regeneration, maintenance, and field servicing for delivered equipment, supported by over 50 service and overhauling plants worldwide.

Quantifiable outcome

• Over 200,000 dry vacuum pump units shipped worldwide
• +4 more outcomes

Named customers9 records

Segments6 records

Ideal customer profiles5 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

AI capability2 records

Feature12 records

Partnerships

Three partnerships are on record, tiered major and minor.

• Mitsubishi Electric CorporationmajorStrategic or Co-development Partner · 12 November 2025EBARA Corporation and Mitsubishi Electric Corporation agreed to transfer Mitsubishi Electric's three-phase and Interior Permanent Magnet motor businesses to EBARA. The transfer includes production facilities at Mitsubishi Electric's Shinshiro Factory in Aichi Prefecture, Japan, along with the industrial motor, pump, and die casting operations of Mitsubishi Electric's Thai subsidiary.
• NuScale PowerminorStrategic or Co-development PartnerCollaboration between NuScale Power and Ebara Elliott Energy on high-temperature steam compressor technology for SMR (Small Modular Reactor) applications.
• Innovative Space Carrier Inc. (ISC)minorStrategic or Co-development PartnerEBARA Corporation developed and supplied electric turbo pump systems for ISC's reusable rocket 'ASCA'. Static fire test of rocket engine with electric turbo pump conducted successfully in March 2026. ISC has been selected for government subsidies totaling approximately 9.4 billion yen.

Scale indicators15 records

Recent moves15 records

Expansion highlights6 records

Direct peers

• Flowserve Corporation: US-listed global leader in industrial pumps, valves, seals, and related services for oil & gas, power, chemical, and water markets. Closely comparable to Ebara's custom pumps and Energy Company offerings with a similar aftermarket service business model.
• Xylem Inc. US-listed global water technology company focused on pumps, treatment, and metering for water infrastructure, building services, and industrial applications. Closely matches Ebara's Building Service & Industrial and Infrastructure Company portfolios.
• Grundfos Holding A/S: Danish privately-held global leader in advanced pump solutions for water, buildings, and industry. Directly comparable to Ebara's Building Service & Industrial standard pumps, booster systems, and digital water services.
• IHI Corporation: Japanese diversified heavy industrial manufacturer with significant pump, compressor, and turbomachinery businesses serving energy, infrastructure, and aerospace. Closely comparable to Ebara across the energy and infrastructure segments, particularly in Japan.
• Applied Materials Inc. Global leader in semiconductor wafer fabrication equipment, including the CMP systems where Ebara holds #2 share. Directly comparable as the only meaningful CMP competitor; together the two firms control 69% of the global CMP equipment market.
• KSB SE & Co. KGaA: German global manufacturer of pumps, valves, and related systems for energy, water, mining, and industrial markets. Comparable to Ebara across industrial pumps, standard pumps, and aftermarket services.
• Sulzer Ltd: Swiss industrial engineering company specializing in pumps, rotating equipment, and flow control for energy, water, and industrial markets. Directly comparable to Ebara's custom pumps, cryogenic pumps, and aftermarket services.

Broad incumbents

• Atlas Copco AB: Swedish industrial group with leading positions in compressors, vacuum solutions, and industrial tools. Comparable to Ebara's Elliott-brand compressor business and dry vacuum pump franchise, though Atlas Copco is far broader in scope and scale.
• Mitsubishi Heavy Industries Ltd. Japanese diversified industrial conglomerate with major turbomachinery, compressor, and infrastructure businesses overlapping Ebara's energy and HVAC portfolios. Much larger and broader, but a meaningful competitor across multiple Ebara segments and a counterparty in the 2025 motor business transfer deal.
• Ingersoll Rand Inc. US-listed diversified industrial company with compressor, vacuum, and flow control businesses serving industrial and energy customers. Overlaps with Ebara's compressor, vacuum, and pump businesses across multiple end markets.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat6 records

Key risks7 records

Key highlights7 records

Customer concentration

• Xx.com/ebaraindia
• YouTubeyoutube.com/channel/UC2khcpzNTcFQXUj3AiuffUQ
• Facebookfacebook.com/EBARACORPORATION1912
• LinkedInlinkedin.com/company/ebara-pumps-europe-s.p.a.

Revenue estimate

Valuation estimate

Number of profiles

Profiles24 records

Subsidiaries17 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A1 record

Investments4 records

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Ebara Corporation