Infinitesima Ltd
UK-based semiconductor metrology company that has commercialized the Rapid Probe Microscope (RPM), a high-speed 3D atomic force measurement technology, into the Metron3D in-line wafer metrology system sold to leading-edge chip manufacturers including SK hynix and Zeiss.
- Company typePrivate
- Founded2001
- HeadquartersAbingdon, United Kingdom
- Headcount11–50
- GTM typeB2B
- OfferingHardware or Manufacturing
What Infinitesima Ltd does
Infinitesima Ltd is a UK-based semiconductor process control company that has developed the Rapid Probe Microscope (RPM), a proprietary atomic force 3D surface measurement technology combining thermal-optical actuation with interferometric detection. Founded in 2001 as a spin-out of the University of Bristol's Scanning Probe Microscopy Group, the company is headquartered in Abingdon, Oxfordshire, with approximately 11-50 employees. RPM delivers picometer-class precision at speeds reported as 10-100x faster than conventional atomic force microscopy, with 10x longer probe lifetime — characteristics that target the sub-nanometer 3D metrology gap left by optical and e-beam inspection techniques at advanced process nodes.
The company's commercial product is Metron3D, an HVM-ready 300mm in-line wafer metrology system launched in December 2021 and first shipped to a customer in 2023. Metron3D is now in volume production at SK hynix for advanced DRAM manufacturing. Infinitesima also supplies RPM as an embedded module to OEM partners — notably Carl Zeiss, where it is integrated into the MeRiT neXT photomask repair tool for EUV mask defect imaging. Additional product modules include RPM 3D for tomographic device characterization (co-developed with imec) and a specialized EUV repair module. Revenue derives from capital equipment sales, OEM module integration/licensing, and service contracts; pricing is quote-based and not publicly disclosed.
The go-to-market combines direct enterprise sales for Metron3D with exclusive channel partners in South Korea (WooWon Technology) and Taiwan (Scientech), plus OEM distribution through Zeiss globally. The company is backed by strategic and financial investors including Wonik Investment Partners, Applied Ventures, IMM Investment, Marketech International, and Maverick Silicon (Series B lead in January 2026). A three-year co-development project with ASML and imec was initiated in July 2025 to extend Metron3D into High-NA EUV lithography, hybrid wafer bonding, and CFET transistor metrology. Infinitesima is ISO 9001 certified and was certified as a Great Place to Work in 2023.
Infinitesima Ltd firmographics
Firmographics- Name
- Infinitesima Ltd
- Legal name
- Infinitesima Limited
- Website
- https://infinitesima.com
- Company type
- Private
- Founded year
- 2001
- Operating status
- Operating
- Headcount range
- 11–50 employees
- Short description
- UK-based semiconductor metrology company that has commercialized the Rapid Probe Microscope (RPM), a high-speed 3D atomic force measurement technology, into the Metron3D in-line wafer metrology system sold to leading-edge chip manufacturers including SK hynix and Zeiss.
- Ownership category
- akta.pro rank
Infinitesima Ltd industry classification
Industry- Product category
- Semiconductor Metrology Equipment
- NAICS
- Semiconductor Machinery Manufacturing (333242), Navigational, Measuring, Electromedical, and Control Instruments Manufacturing (33451), Other Measuring and Controlling Device Manufacturing (334519)
- SIC
- Industrial Instruments For Measurement, Display, And Control (3823)
- akta.pro primary industry
- Metrology & Dimensional Measurement (CMMs, laser trackers, gauges, surface/roughness) (IMAGAFAD)
- akta.pro secondary industries
- Metrology Automation & Robotics (Automated Cells, In-Line Gauging) (IMAAAHAH), Metrology, Inspection & Machine Tool Accessories (CMMs, Probing, Gauging) (IMAHADAK)
Keywords
Where Infinitesima Ltd is headquartered
LocationHeadquarters
- HQ city
- Abingdon
- HQ country
- United Kingdom
- HQ region
- Europe
Offices1 record
Markets served
Infinitesima Ltd business model
Business model- GTM type
- B2B
- Offering type
- Hardware or Manufacturing
- Cost components
- Personnel, Technology or R&D, Supply Chain, Operations, Marketing or Sales, Infrastructure
Revenue model
- Metrology Systems Sales: Sale of Metron3D 300mm in-line wafer metrology systems to semiconductor manufacturers for in-line process control applications
- RPM Module Integration: RPM technology integrated as a module into third-party equipment (e.g., Zeiss MeRiT mask repair systems, SEM tools) by leading semiconductor equipment companies
- Service and Support: Sales and service support for RPM standalone systems through regional partners in South Korea and Taiwan, and direct contact for all other regions
Pricing tiers
| Model | Billing | Price |
|---|---|---|
| Other | Multi-year contract | Custom capital equipment pricing |
Go-to-market motion2 records
Distribution channels4 records
Marketing channels4 records
Infinitesima Ltd product offering
Product offeringCore offering
Infinitesima develops, manufactures, and sells the Metron3D, an HVM-ready 300mm in-line wafer metrology system for high-speed 3D process control of nanoscale semiconductor structures. The system is powered by the company's proprietary Rapid Probe Microscope (RPM) technology, which combines photo-thermal actuation with interferometric measurement to deliver sub-nanometer precision at up to 100x the throughput of conventional atomic force microscopy. The company also licenses the RPM Scanner as a modular measurement engine for integration into third-party equipment such as the Zeiss MeRiT neXT photomask repair tool.
Product overview
Infinitesima Ltd offers a portfolio centered on the Rapid Probe Microscope (RPM) technology, a fundamentally different atomic force 3D surface measurement technique. The core product is the Metron3D, a standalone 300mm wafer metrology system that integrates the RPM module for high-throughput in-line semiconductor process control. The RPM Scanner serves as the underlying modular measurement engine, available both as an integrated component within third-party equipment (such as Zeiss MeRiT neXT mask repair systems) and as the basis for the Metron3D platform. Additional specialized modules include the RPM 3D tomographic capability for device characterization and the RPM EUV repair module for advanced EUV mask inspection.
Differentiator
Problem solved
Functional benefit
Brands
- Metron3D: HVM ready metrology system for high speed measurement of challenging nanoscale structures for semiconductor manufacturing, featuring RPM technology.
- RPM (Rapid Probe Microscope)
- RPM Scanner
Products and services
- Metron3D HVM-ready 300mm in-line wafer metrology system for high-speed 3D measurement of nanoscale semiconductor structures. Combines Atomic Force Microscopy with proprietary Rapid Probe Microscope (RPM) technology to deliver up to 100x faster throughput than conventional AFM at sub-nanometer precision, with automated probe exchange and continuous HVM operation for advanced semiconductor process control.
- RPM Scanner Modular Rapid Probe Microscope designed for integration into third-party equipment or for use in dedicated stand-alone metrology platforms. Provides atomic force 3D surface measurement with picometer precision and photo-thermal actuation for high-speed operation. Powers the Metron3D system and is embedded into partners' platforms such as the Zeiss MeRiT neXT photomask repair tool.
- RPM EUV Repair Module Specialized RPM-based module for imaging EUV photomask defects that are invisible to SEM, particularly challenging multilayer defects. Integrated with the Zeiss MeRiT neXT photomask repair system to validate EUV mask repair.
Quantifiable outcome
- Throughput up to 100x faster than conventional AFM technology
- +4 more outcomes
Companies that use Infinitesima Ltd
Customer profileNamed customers4 records
Segments3 records
Ideal customer profiles3 records
Infinitesima Ltd technology and API
TechnologyTechnology focussed Yes
API detail
- Has API
- No
- API docs
- API detail
Core technology
AI maturity
App detail
Integration3 records
Feature8 records
Infinitesima Ltd partnerships and signals
Strategic signalPartnerships
Seven partnerships are on record, tiered core.
- ASMLcoreThree-year development project with partners including ASML to further develop Metron3D capabilities for cutting-edge applications including hybrid bonding, High-NA EUV lithography, and 3D logic device structures (CFETs). System will be sited at IMEC for characterization and development of High-NA EUV resist imaging.
- IMECcoreJoint development program for 3D tomographic metrology. Starting with enabling tip-induced nanoscale tomographic sensing for research and failure analysis applications, expanding to high-speed in-line production metrology. Partners on multiple joint research papers at SPIE and IPFA conferences.
- WooWon TechnologycoreExclusive Sales & Service representative for RPM standalone systems in South Korea. Handles all customer engagement, support, and service for Korean market.
- ScientechcoreExclusive Sales & Service representative for Taiwan region.
- Carl ZeisscoreThe RPM is integrated onto the Zeiss MeRiT neXT photomask repair tool, where it is used for validating mask repair. The RPM is ideal for imaging high aspect ratio structures combined with very high imaging speeds, providing crucial data for devising repair strategy and verifying results. RPM EUV repair module available for EUV masks to image defects invisible to SEM.
- SK hynixcoreAdopted Metron3D 300mm in-line wafer metrology system and released for volume production at their facilities. Extensive evaluation period for characterization across multiple process steps for next-generation memory devices.
- Oreste DonzellacoreFormer EVP and Chief Strategy Officer at KLA, joined Board of Directors. Over three decades of semiconductor manufacturing and capital equipment experience. Brings deep understanding of customer process control challenges and strategic leadership.
Scale indicators5 records
Recent moves6 records
Expansion highlights5 records
Infinitesima Ltd competitors and assessment
Company assessmentBroad incumbents
- Hitachi High-Tech: Supplies CD-SEM, defect review and metrology systems used widely in semiconductor fabs, including hybrid metrology solutions. A broad incumbent competing for the same process control budget as Infinitesima.
- KLA Corporation: Dominant incumbent in semiconductor process control and in-line wafer inspection/metrology. KLA is the primary competitor Infinitesima faces in fab accounts and is also represented on Infinitesima's board via former EVP/CSO Oreste Donzella.
- ASML: Monopoly supplier of advanced lithography systems (including High-NA EUV) and strategic three-year development partner of Infinitesima (July 2025). ASML is also a competitor for advanced-node customer mindshare and process control influence.
- Thermo Fisher Scientific: Provides electron microscopy, AFM and analytical instrumentation for semiconductor R&D and failure analysis. Board member Glyn Davies is currently General Manager at Thermo Fisher, underscoring the relationship and overlap.
Regional players
- Oxford Instruments: UK-based supplier of high-precision analytical and nano-metrology instruments serving semiconductor and advanced materials research; comparable as a UK-headquartered nano-metrology specialist, though less focused on in-line production metrology.
Direct peers
- Onto Innovation: Supplier of process control metrology and inspection tools to advanced semiconductor manufacturers, with overlapping focus on 3D NAND, DRAM, and advanced packaging — the same end applications as Infinitesima's Metron3D.
- Nova Measuring Instruments: Provides in-line optical metrology and process control solutions for semiconductor fabs. Direct competitor to Metron3D for advanced memory and logic process control at leading-edge nodes.
- Park Systems: Leading AFM manufacturer with a semiconductor metrology product line, including tools for advanced node process control. Closely comparable to Infinitesima in core measurement technology (AFM-based).
- Bruker Corporation: Manufactures atomic force microscopes and nano-metrology instruments used in semiconductor failure analysis and process development, competing directly with Infinitesima's core RPM technology in R&D and characterization workflows.
- Carl Zeiss SMT: Infinitesima's OEM partner integrating RPM into the Zeiss MeRiT neXT photomask repair system, but also a broader supplier of semiconductor mask repair and metrology equipment — overlapping in customer accounts.
Market position
Strengths5 records
Weaknesses5 records
Competitive moat5 records
Key risks6 records
Key highlights6 records
Customer concentration
Infinitesima Ltd social profiles
Digital presenceInfinitesima Ltd compliance and trust
Trust signalCompliance1 record
Infinitesima Ltd financial estimates
Financial estimateRevenue estimate
Valuation estimate
Infinitesima Ltd leadership team
Management profileNumber of profiles
Profiles7 records
Infinitesima Ltd funding detail
Funding detailFunding overview
Funding rounds3 records
Investors6 records
Funding detail is available on the Subscription and Enterprise plan.Contact sales →
Infinitesima Ltd M&A and investment
M&A and investmentM&A
Investments
M&A and investment is available on the Subscription and Enterprise plan.Contact sales →
Frequently asked questions about Infinitesima Ltd
What does Infinitesima Ltd do?
Infinitesima develops, manufactures, and sells the Metron3D, an HVM-ready 300mm in-line wafer metrology system for high-speed 3D process control of nanoscale semiconductor structures. The system is powered by the company's proprietary Rapid Probe Microscope (RPM) technology, which combines photo-thermal actuation with interferometric measurement to deliver sub-nanometer precision at up to 100x the throughput of conventional atomic force microscopy. The company also licenses the RPM Scanner as a modular measurement engine for integration into third-party equipment such as the Zeiss MeRiT neXT photomask repair tool.
Is Infinitesima Ltd a public or private company?
Infinitesima Ltd is a private company. It is classified as venture growth investor backed and is currently operating.
When was Infinitesima Ltd founded?
Infinitesima Ltd was founded in 2001. It employs 11 to 50 people.
Where is Infinitesima Ltd based?
Infinitesima Ltd is headquartered in Abingdon, United Kingdom, in the Europe region.
How does Infinitesima Ltd make money?
Three revenue lines are on record. Metrology Systems Sales are the primary driver. The others are RPM Module Integration and service and Support.
Who are Infinitesima Ltd's main competitors?
Broad incumbents on record are Hitachi High-Tech, KLA Corporation, ASML and Thermo Fisher Scientific. Oxford Instruments is listed as a regional player. Direct peers are Onto Innovation, Nova Measuring Instruments, Park Systems, Bruker Corporation and Carl Zeiss SMT.
Does Infinitesima Ltd have an API?
No public API is recorded for Infinitesima Ltd.
What industry is Infinitesima Ltd in?
Infinitesima Ltd's product category is Semiconductor Metrology Equipment. Its primary akta.pro industry code is IMAGAFAD, Metrology & Dimensional Measurement (CMMs, laser trackers, gauges, surface/roughness), with a secondary code of IMAAAHAH, Metrology Automation & Robotics (Automated Cells, In-Line Gauging). Its NAICS code is 333242 and its SIC code is 3823.