What Dr. Eberl MBE-Komponenten GmbH does

Dr. Eberl MBE-Komponenten GmbH is a privately held German manufacturer founded in 1990 and headquartered in Weil der Stadt, Baden-Württemberg, specializing in Molecular Beam Epitaxy (MBE) systems and components for ultra-high vacuum thin-film deposition. The company designs and builds complete OCTOPLUS series MBE systems spanning research-scale (10×10 mm² substrates) to production-scale (300 mm wafer cluster systems) configurations, plus oxide-specific OCTOPLUS-O systems and PVD systems. Its component portfolio is comprehensive and includes effusion cells (reaching 2000°C), electron beam evaporators, valved cracker sources, dopant cells, gas cracker sources, substrate manipulators, and supporting equipment such as beam flux monitors and quartz crystal microbalances.

The company's underlying technology rests on proprietary designs including the patented TCC thermal conduction cooling technique for organic evaporators, GaP decomposition-based phosphorus sources, pyrolytic graphite filaments for carbon doping, and ultra-high temperature tungsten wire filament cells. Several products are developed under license or in collaboration with leading German research institutions, including Forschungszentrum Jülich (hydrogen atom beam source) and the Universities of Jena and Regensburg (atomic carbon and carbon doping sources). The company has delivered more than 5,000 effusion cells and over 80 complete MBE systems to customers worldwide since founding.

Revenue is generated through direct hardware sales of complete systems, individual components, and replacement parts, supplemented by simulation and consulting services. Pricing is quote-based and not publicly disclosed. The company sells through direct engagement from its German headquarters, a global network of distribution partners, and a wholly-owned Chinese subsidiary, Beijing Eberl Instruments Trading Co. Ltd., which has served the Chinese market since 2016. Primary customers are research institutions, universities, and commercial semiconductor manufacturers engaged in compound semiconductor, optoelectronic, quantum materials, and thin-film solar research and production.

Name

Dr. Eberl MBE-Komponenten GmbH

Legal name

Dr. Eberl MBE-Komponenten GmbH

Website

https://mbe-komponenten.de

Company type

Private

Founded year

1990

Operating status

Operating

Headcount range

1–10 employees

Short description

Dr. Eberl MBE-Komponenten GmbH, founded in 1990 in Weil der Stadt, Germany, designs and manufactures Molecular Beam Epitaxy (MBE) systems and ultra-high vacuum deposition components — including effusion cells, e-beam evaporators, valved sources, and dopant cells — serving research institutions, universities, and semiconductor manufacturers worldwide.

Ownership category

akta.pro rank

Product category

Semiconductor Manufacturing Equipment

NAICS

Semiconductor Machinery Manufacturing (333242), Analytical Laboratory Instrument Manufacturing (334516)

SIC

Laboratory Analytical Instruments (3826)

akta.pro primary industry

Deposition Equipment (CVD/PVD/ALD/Epitaxy) (HDAHAEAB)

akta.pro secondary industries

Epitaxy Materials & Services (Epi Wafers/MBE/MOCVD) (HDAHAGAC), Thin-Film Deposition Materials (PVD/CVD/ALD Targets & Precursors) (HDAHAGAH), Process Gases & Gas Delivery Consumables (Specialty/Bulk/UHP) (HDAHAGAL)

Keywords

• Molecular beam epitaxy
• MBE systems
• Thin film deposition
• Semiconductor equipment
• Effusion cells

Headquarters

HQ city

Weil der Stadt, Baden-W��rttemberg

Offices1 record

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Operations, Personnel, Technology or R&D, Supply Chain

Revenue model

1. MBE Systems Sales: Sale of complete MBE systems including OCTOPLUS series systems for semiconductor material growth. Systems range from research-scale to production-scale configurations supporting substrates from 10mm to 300mm wafers.
2. MBE Components and Replacement Parts: Sale of individual components including effusion cells, e-beam evaporators, valved sources, dopant cells, gas sources, crucibles, shutters, cooling shrouds, and control equipment. Components sold as standalone products or as replacement parts for existing systems.
3. Simulation and Consulting Services: Technical consulting and simulation services for flux and uniformity optimization, customer support, and system integration assistance.

Go-to-market motion1 record

Distribution channels2 records

Marketing channels3 records

Core offering

Dr. Eberl MBE-Komponenten GmbH designs, manufactures, and sells Molecular Beam Epitaxy (MBE) systems and components for ultra-high vacuum thin film deposition. The company offers complete MBE systems (OCTOPLUS series for III/V, II/VI, SiGe, oxides, and thin-film solar cells), PVD systems, and a modular component portfolio including effusion cells, e-beam evaporators, valved sources, dopant cells, and gas sources. It also provides simulation and consulting services for flux/uniformity optimization and system integration.

Product overview

Dr. Eberl MBE-Komponenten GmbH offers a comprehensive portfolio of Molecular Beam Epitaxy (MBE) systems and components. The core products include the OCTOPLUS series of MBE systems (OCTOPLUS 200 through OCTOPLUS 1000, plus Cluster Systems) and the OCTOPLUS-O oxide-specific MBE systems, along with PVD systems. The component portfolio encompasses Effusion Cells (WEZ, NTEZ, HTEZ, HTEZ-W, HTS, SUSI, SUKO, SUKO-A, DECO, OME, OREZ, PEZ), E-Beam Evaporators (EBV, EBVM, EBVV), Valved Sources (VCCS, VGCS, VACS, VSS, VCS, VSCS, HGS, AKS), Dopant Cells (DEZ, DDS, SUKO-D, DECO-D, SUSI-D, SUSI-D2, EBVV-B), Gas Sources (HABS, OBS, FMP, RFP), Substrate Manipulation equipment, Source Clusters, Industrial Sources, and Organic Evaporators. Supporting equipment includes annealing systems, beam flux monitors, quartz crystal microbalances, cooling shrouds, control equipment, shutters, cables, and crucibles. The company has delivered over 5000 effusion cells and 80+ MBE systems worldwide since 1990.

Differentiator

Problem solved

Functional benefit

Products and services

• OCTOPLUS Series MBE Systems Complete line of Molecular Beam Epitaxy systems ranging from compact 10x10 mm² substrate systems (OCTOPLUS 200) to 300mm silicon wafer cluster systems (OCTOPLUS 1000), supporting III/V, II/VI, SiGe, topological insulators, oxides, magnetic materials, CIGS, and thin-film solar cell applications. Configurations include OCTOPLUS 200 (10x10 mm², max 6 ports), OCTOPLUS 300 (10x10 mm², max 9 ports), OCTOPLUS 350 (up to 2-inch, max 8 ports), OCTOPLUS 500 (up to 4-inch, max 12 ports), OCTOPLUS 600 (up to 6-inch, max 12 ports), OCTOPLUS 800 (multi-wafer), and OCTOPLUS 1000 (300mm silicon wafer).
• OCTOPLUS-O Series Oxide MBE Systems Specialized MBE systems for oxide materials including OCTOPLUS-O 200 (up to 2-inch substrate, max 8 ports), OCTOPLUS-O 350 (up to 2-inch substrate, max 8 ports), and OCTOPLUS-O 600 (up to 4-inch substrate, max 12 ports). Designed for oxide MBE applications.
• PVD Systems (PVD 350, PVD 550) Physical Vapor Deposition systems including PVD 350 for 100 mm wafers and PVD 550 for 300 mm wafers, for metallization and thin film deposition applications.
• Effusion Cells Wide range of thermal evaporation cells including Standard Effusion Cells WEZ, Low Temperature Effusion Cells NTEZ, High Temperature Effusion Cells HTEZ/HTEZ-W (reaching 2000°C), High Temperature Sources HTS, Silicon Sublimation Sources SUSI, Carbon Sublimation Sources SUKO/SUKO-A, GaP Decomposition Sources DECO, Organic Material Evaporators OME, Oxygen Resistant Effusion Cells OREZ, and Production Effusion Cells PEZ. Thermal evaporation up to 2000°C.
• E-Beam Evaporators Electron beam evaporators including Electron Beam Evaporators EBV (40-1000 cm³ hearth volumes, single-pocket UHV with 270° beam deflection), Multi-pocket Electron Beam Evaporators EBVM (up to 6 pockets, DN200CF/DN250CF), and Vertical Electron Beam Evaporators EBVV (small footprint, DN63CF compatible).
• Valved Sources Valved evaporation sources including Valved Corrosive Material Cracker Source VCCS, Valved GaP Compound Source VGCS (420 cm³ crucible, P2/P4 ratio >150), Valved Arsenic Cracker Source VACS, Valved Sulfur Cracker Source VCS, Valved Selenium Cracking Source VSCS, Valved Sulfur Source VSS, Valved Mercury Evaporation Source HGS, and Valved Alkali Metal Source AKS.
• Dopant Cells Specialized doping sources including Doping Effusion Cells DEZ, Dual Doping Source DDS, Carbon Doping Source SUKO-D (pyrolytic graphite filament reaching 2300°C, achieving record hole mobilities in GaAs/AlGaAs), Phosphorus Doping Source DECO-D, Silicon Sublimation Doping Sources SUSI-D/SUSI-D2, and E-Beam Boron Doping Source EBVV-B (boron doping concentrations up to 10^21/cm³).
• Gas Sources Gas cracker sources including Hydrogen Atom Beam Source HABS (80-98% dissociation efficiency, license from Forschungszentrum Jülich), Oxygen Atom Beam Source OBS, Flexible Microplasma Source FMP, and RF Plasma Source RFP.
• Equipment Supporting equipment including Compact Rapid Annealing Systems AO, Beam Flux Monitor BFM (Bayard-Alpert type ionization gauges), Quartz Crystal Microbalance QCM, Cooling Shrouds CS (water and LN2 cooled), Control Equipment, Shutter Accessories (rotary and linear), Cables and Connectors CA, Refractory Metal Parts RMP, and Crucibles.
• Organic Evaporators Evaporators for volatile organic molecules including Organic Material Evaporators OME with patented Thermal Conduction Cooling (TCC) technique for temperatures 15-300°C with temperature stability better than ±0.02K.
• High Voltage Power Supplies HV Power supply systems for electron beam evaporators including GENIUS evaporator control unit, CARRERA high-voltage power supply (3kW, 5kW, 10kW), and FPS filament power supply.
• Simulation and Consulting Services Technical consulting and simulation services for flux and uniformity optimization, customer support, and system integration assistance for MBE systems and components.

Quantifiable outcome

• Hole mobilities beyond 10^6 cm²/Vs achieved in GaAs/AlGaAs quantum wells using SUKO-D carbon doping source
• +3 more outcomes

Named customers1 record

Segments3 records

Ideal customer profiles3 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature9 records

Partnerships

Five partnerships are on record, tiered core.

• Beijing Eberl Instruments Trading Co. Ltd. (北京埃伯仪器贸易有限公司)coreChannel Partner/ Reseller/ Distributor · 10 May 2016Beijing Eberl Instruments Trading Co. Ltd. serves as the company's exclusive distributor and representative in China, celebrating its 10th Anniversary in May 2026. The subsidiary handles sales, customer service, and technical support for the Chinese market.
• Forschungszentrum Jülich GmbHcoreTechnology or IntegrationDr. Eberl MBE-Komponenten produces and markets the Hydrogen Atom Beam Source HABS under license from Forschungszentrum Jülich GmbH (www.fz-juelich.de). The source was developed and completely characterized by Dr. Karl G. Tschersich from the Institute of Bio- and Nanosystems at Jülich Research Centre.
• Prof. W. Wegscheider, University of RegensburgcoreStrategic or Co-development PartnerThe Carbon Doping Source SUKO-D was thoroughly redesigned in collaboration with Prof. W. Wegscheider, formerly University of Regensburg, Germany. This collaboration resulted in record hole mobilities of 1.2×10^6 cm²/Vs in GaAs/AlGaAs quantum wells.
• University of JenacoreStrategic or Co-development PartnerThe Atomic Carbon Sublimation Source SUKO-A technology was patented by the University of Jena in collaboration with Dr. Eberl MBE-Komponenten GmbH. This partnership developed the refractory metal tube filament technology that produces pure atomic carbon.
• Dr. Karl G. Tschersich, Institute of Bio- and Nanosystems (Jülich Research)coreStrategic or Co-development PartnerThe Oxygen Atom Beam Source OBS was developed in collaboration with Dr. Karl Georg Tschersich of the Institute of Bio- and Nanosystems (formerly Institute of Thin Films and Interfaces) at Jülich Research. Dr. Tschersich developed the hot capillary design and characterization methodology.

Scale indicators4 records

Recent moves6 records

Expansion highlights5 records

Direct peers

• DCA Instruments Oy: DCA Instruments is a Finnish manufacturer of MBE systems and components, specializing in compact and production-scale MBE platforms used in research and compound-semiconductor manufacturing. It directly competes with Dr. Eberl's OCTOPLUS series in both research and small-scale production segments.
• SVT Associates / SVTA: SVT Associates (SVTA) manufactures MBE systems and associated in-situ monitoring tools (RHEED, pyrometers) targeting research institutes and compound-semiconductor producers. It directly competes with Dr. Eberl in MBE clusters and in-situ diagnostics for III-V, II-VI, and oxide epitaxy.
• Omicron NanoTechnology GmbH: Omicron develops UHV-based MBE and surface-science systems, including integrated multi-chamber MBE platforms for surface preparation and epitaxial growth. It overlaps with Dr. Eberl in providing UHV componentry and small-scale MBE systems to research customers in materials science.
• Riber S.A. Riber is the leading global supplier of Molecular Beam Epitaxy (MBE) equipment and components, serving both research and production customers. It is the most direct competitor to Dr. Eberl, offering complete MBE systems and a broad range of effusion cells, sources, and accessories for compound semiconductor research.

Emerging players

• Angstrom Engineering Inc. Angstrom Engineering designs and manufactures PVD (thermal and e-beam evaporation) thin-film deposition systems and components for research and pilot production. Its thermal evaporation and e-beam source portfolio overlaps with Dr. Eberl's PVD systems and EBV/EBVM line.
• Createc Fischer & Co. GmbH: Createc Fischer & Co. is a German manufacturer of MBE components (notably valved cracker cells, e-beam evaporators, and effusion cells) for III-V, II-VI, and oxide MBE. It is a direct component peer to Dr. Eberl's valved-source and effusion-cell product lines.

Broad incumbents

• VON ARDENNE GmbH: VON ARDENNE is a German-based supplier of industrial PVD and deposition systems for large-area coatings, including semiconductor, photovoltaic, and glass applications. As an industrial German PVD platform provider, it is a broader incumbent in adjacent deposition technologies.
• Veeco Instruments Inc. Veeco is a major semiconductor and compound-semiconductor equipment manufacturer with a long-standing MBE product line (including the GENxplor and related systems), and a much broader portfolio spanning MOCVD, ion beam, and other deposition technologies used in LED, power, and photonic device fabs.
• VG Scienta (Scienta Omicron) MBE related: Scienta Omicron is a leading supplier of UHV systems, surface analysis, and MBE-related thin-film deposition platforms for academic and industrial research. It overlaps with Dr. Eberl in MBE cluster tools and high-precision UHV source components.
• Applied Materials Inc. Applied Materials is the largest semiconductor equipment manufacturer globally, with broad thin-film deposition and epitaxy platforms (CVD/PVD/ALD/epitaxy). It represents the broad incumbent that Dr. Eberl's customers sometimes consider for scale-up of MBE-grown devices into high-volume production.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks5 records

Key highlights6 records

Customer concentration

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Revenue estimate

Valuation estimate

Number of profiles

Subsidiaries1 record

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Dr. Eberl MBE-Komponenten GmbH