ODTÜ MEMS Merkezi

What ODTÜ MEMS Merkezi does

ODTÜ MEMS Merkezi (Middle East Technical University Micro-Electro-Mechanical Systems Research and Application Center) is a public research infrastructure operating within METU Technopark in Ankara, Türkiye, qualified under Law No. 6550 as one of the first four National Research Centers in the country. The center operates a 4,500 m² facility with 1,300 m² of Class 100, 1000, and 10000 cleanroom space housing $40 million USD of MEMS fabrication equipment, including rare assets such as the ASML PAS5500 stepper, and supports wafer processing from 3-inch through 8-inch diameters.

The center's core offering is end-to-end MEMS microfabrication services covering thin-film deposition (PVD, CVD, ALD), photolithography, dry and wet etching (RIE, DRIE, vapor HF), wafer-level vacuum packaging (TLP and eutectic bonding, hermetic sealing), and characterization. Service lines include Microfabrication, BioMEMS (biosensors, microfluidics, lab-on-a-chip), RF MEMS (switches, antennas, phase shifters for THz frequencies), Imaging Sensors (microbolometers, Type-II Superlattice Detectors, Colloidal Quantum Dot Detectors), Inertial Sensors (North Finder technology), and Device Packaging. The center holds 53 patents internationally and has supervised 139+ Master's theses and 26+ PhD dissertations since 1998.

Revenue is generated through a hybrid model: usage-based fees for cleanroom access and equipment use (Class 1000 entry at $40/day, Class 10000 at $8/day, equipment ranging $10-232/hour, staff time at $50/hour), professional services for custom R&D, a Multi-Project Wafer (ÇPÜ/MPW) cost-sharing program for microfluidics prototyping, and research project collaborations funded by TÜBİTAK, EU Horizon programs, Turkish defense agencies, and defense industry partners. Customers include the Turkish defense industry (ASELSAN, ROKETSAN, TÜBİTAK SAGE), automotive (TOGG), academic and research institutions, and healthcare/biomedical companies. Distribution is direct via a quotation-request portal, with services delivered at the Ankara facility.

Name

ODTÜ MEMS Merkezi

Legal name

Orta Doğu Teknik Üniversitesi Mikro Elektro Mekanik Sistemler Araştırma ve Uygulama Merkezi

Website

https://mems.metu.edu.tr

Company type

Private

Founded year

2017

Operating status

Operating

Headcount range

51–100 employees

Short description

ODTÜ MEMS Merkezi is a Turkish public research infrastructure within METU Technopark providing end-to-end MEMS microfabrication, BioMEMS, RF MEMS, infrared detector, and packaging services to defense firms, academia, automotive, and healthcare customers through usage-based cleanroom access and R&D collaborations.

Ownership category

akta.pro rank

Product category

Semiconductor MEMS Fabrication Services

NAICS

Search, Detection, Navigation, Guidance, Aeronautical, and Nautical System and Instrument Manufacturing (334511), Commercial and Service Industry Machinery Manufacturing (33331)

SIC

Special Industry Machinery, Nec (3559), Laboratory Apparatus & Furniture (3821)

akta.pro primary industry

Industrial Electronics Manufacturing Services (EMS) (IMAGAGAA)

akta.pro secondary industry

Test, Measurement & Calibration Equipment Manufacturing Services (ATE, DAQ, metrology electronics) (IMAGAGAH)

Keywords

• MEMS microfabrication
• Cleanroom fabrication services
• Semiconductor wafer processing
• MEMS device packaging
• Biosensor development

Headquarters

HQ city

Ankara

HQ country

Türkiye

HQ region

Europe

Offices1 record

Markets served

GTM type

B2B

Offering type

Services

Cost components

Personnel, Technology or R&D, Infrastructure, Operations, Marketing or Sales, Others

Revenue model

1. Cleanroom Access and Device Usage Fees: Hourly fees for cleanroom access (Class 1000 at $40 entry, Class 10000 at $8 entry) and equipment usage charges ranging from $10 to $232 per hour depending on the device. External users pay standard rates while universities, research infrastructures, institutes, SMEs, and technopark companies receive 10% discount. METU and internal projects receive 20% discount.
2. Professional Services and Custom Fabrication: Staff hourly rates at $50/hour for specialized technical support, design services, experiment design, and analysis/reporting services for custom R&D projects and special production work.
3. Multi-Project Wafer (MPW/ÇPÜ) Program: Cost-sharing program where multiple projects share wafer and mask costs for microfluidic prototyping, enabling lower-cost access to fabrication services. Payment terms include 50% upfront and 50% upon delivery.
4. Research Project Collaborations: National and international research projects funded by TÜBİTAK, European Union (Horizon programs), defense industry companies, and government agencies.

Pricing tiers

Go-to-market motion1 record

Distribution channels3 records

Marketing channels5 records

Core offering

ODTÜ MEMS Merkezi operates Turkey's premier MEMS microfabrication facility, offering end-to-end services including thin film deposition, photolithography, dry and wet etching, wafer-level packaging, and device characterization. The center serves defense, academic, and industrial customers through direct cleanroom access (Class 1000 and Class 10000), the ÇPÜ/MPW cost-sharing program, and collaborative R&D projects using $40 million USD of specialized equipment across 1,300 m2 of cleanroom space.

Product overview

ODTÜ MEMS Merkezi is a national research infrastructure offering a comprehensive suite of MEMS (Micro-Electro-Mechanical Systems) fabrication and characterization services. The Center operates a 4,500 m2 facility with 1,300 m2 of Class 1000 cleanroom space and provides external users access to $40 million worth of equipment. The core offerings include Microfabrication Services (mask fabrication, dicing, wafer processing), BioMEMS Services (biosensors, microfluidics, lab-on-a-chip), RF MEMS Services (RF switches, antennas, phase shifters), Imaging Sensor Development (microbolometers, Type-II superlattice detectors), Inertial Sensor Development, and Device Packaging Services. The ÇPÜ/MPW Program provides cost-effective shared wafer production for microfluidics prototyping. All services are accessed through quotation requests and the Center's portal system, with pricing based on hourly equipment rates.

Differentiator

Problem solved

Functional benefit

Products and services

• Microfabrication Services
• BioMEMS Services
• RF MEMS Services
• Imaging Sensor Development
• Inertial Sensor Development
• Device Packaging Services
• Cleanroom Access and Device Usage
• ÇPÜ/MPW (Multi-Project Wafer) Program
• BioMEMS Laboratory Services
• Testing and Characterization Services

Quantifiable outcome

• Products have reached TRL6 (Technology Readiness Level 6) through strong collaborations in infrared detector technology
• +1 more outcomes

Named customers6 records

Segments4 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature8 records

Partnerships

Twelve partnerships are on record, tiered core and minor.

• ERC (European Research Council) - OPERA ProjectcoreStrategic or Co-development Partner · 29 April 2020Prof. Dr. Haluk Külah's OPERA project received ERC Proof of Concept (PoC) 2020 funding support for BioMEMS and Power MEMS research.
• NNFC (National Nanotechnology Research Center)minorStrategic or Co-development Partner · 1 August 2019Collaboration protocol signed August 1, 2019 between ODTÜ, ODTÜ MEMS and NNFC to increase collaboration opportunities and mutual technology transfer.
• ASELSAN A.Ş.coreStrategic or Co-development PartnerDefense industry collaboration for high-precision MEMS gyroscope-based compass development. ASELSAN is Turkey's leading defense electronics company.
• ROKETSAN A.Ş.coreStrategic or Co-development PartnerChip complex manufacturing process development and prototype production project for missile technology applications.
• TOGGminorStrategic or Co-development PartnerMEMS-based touch alcohol detection system development for automotive safety applications.
• IMECcoreTechnology or IntegrationInternational collaboration with IMEC (Belgium), Europe's leading nanoelectronics and nanotechnology research institute.
• Yaşar UniversityminorStrategic or Co-development PartnerAcademic partnership with Yaşar University in Izmir.
• ArçelikminorStrategic or Co-development PartnerCollaboration with Arçelik, Turkey's leading appliance manufacturer, for consumer technology applications.
• Sabancı UniversityminorStrategic or Co-development PartnerAcademic partnership with Sabancı University for joint research.
• İzmir Institute of Technology (IYTE)minorStrategic or Co-development PartnerAcademic partnership with IYTE.
• Yeditepe UniversityminorStrategic or Co-development PartnerAcademic partnership with Yeditepe University.
• TÜBİTAK 1004 - Maestro/Mikro Medikal Teknolojiler PlatformucoreStrategic or Co-development PartnerTÜBİTAK 1004 Excellence Center Support Program focusing on micro-medical technologies.

Scale indicators7 records

Recent moves6 records

Expansion highlights6 records

Direct peers

• CEA-Leti: CEA-Leti is a French public research institute operating MEMS and semiconductor cleanroom infrastructure analogous to ODTÜ MEMS, providing microfabrication services, R&D collaboration, and pilot production to industry and defense clients.
• IMEC: IMEC is Europe's leading independent nanoelectronics and MEMS research center and is listed as a core international partner of ODTÜ MEMS. Both operate as MEMS fabrication and research infrastructures serving academic and industry clients with similar process capabilities.
• MEMSCAP: MEMSCAP is a commercial MEMS provider offering design, fabrication, and foundry services including pressure sensors and BioMEMS — comparable in specialized MEMS service offerings and access model via custom fabrication.
• Silex Microsystems (Murata): Silex Microsystems is a commercial pure-play MEMS foundry acquired by Murata, providing wafer-level MEMS packaging and fabrication services to fabless MEMS companies — competing directly for the same outsourced MEMS production work.
• CSEM: CSEM is a Swiss public R&D center providing MEMS and microsystems fabrication, characterization, and packaging services to industry and academia — closely matching ODTÜ MEMS's service-based, multi-customer model.
• Fraunhofer ISIT: Fraunhofer ISIT operates MEMS and power-electronics fabrication facilities in Germany, offering cleanroom access, prototyping, and small-volume production on similar wafer sizes to industrial and research customers.
• X-FAB Silicon Foundries: X-FAB is a commercial MEMS and analog/mixed-signal foundry offering wafer fabrication including MEMS processes at 6-8 inch on a foundry basis. Comparable in process capability (3-8 inch wafer support) and customer base (industrial, automotive, medical).
• VTT Technical Research Centre of Finland: VTT operates MEMS and microfabrication cleanroom infrastructure in Finland providing R&D services, prototyping, and small-volume production to industry — a European public research center analogous to ODTÜ MEMS.

Broad incumbents

• STMicroelectronics: STMicroelectronics is a global semiconductor incumbent with a large MEMS product portfolio (accelerometers, gyroscopes, microphones) and in-house fabrication. Relevant as a broader incumbent whose MEMS offerings overlap with the device categories being developed at ODTÜ MEMS.
• Robert Bosch (MEMS): Bosch is the world's largest MEMS manufacturer, producing automotive and consumer MEMS sensors at massive scale. Relevant as an incumbent whose inertial-sensor and IMU focus overlaps with ODTÜ MEMS's defense and medical gyroscope work.

Market position

Strengths5 records

Weaknesses5 records

Competitive moat5 records

Key risks5 records

Key highlights7 records

Customer concentration

• Xx.com/MemsOdtu
• LinkedInlinkedin.com/company/odtu-mems-merkezi

Compliance2 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles14 records

Funding overview

Funding rounds

Investors

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M&A

Investments

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Frequently asked questions about ODTÜ MEMS Merkezi