What Axus Technology does

Axus Technology, founded in 2002 and headquartered in Chandler, Arizona, is a private semiconductor equipment manufacturer specializing in Chemical Mechanical Planarization (CMP) and wafer processing tools. Its core product is the Capstone CS200 series, the first new 150/200mm CMP platform introduced in more than three decades, sold in standalone, integrated-cleaner, and multi-load configurations, paired with the Aquarius A200 wafer cleaner, advanced carrier upgrades (Avalon, Crystal, Fulcrum), and slurry delivery systems (Gemini-3, Cosmo-3). The company also sells refurbished legacy CMP and wafer-grinding equipment (Strasbaugh, Applied Materials Mirra, OnTrak scrubbers), spare parts, and process development services run from a class 100 foundry cleanroom. Axus claims leading market share in silicon carbide (SiC) CMP and serves global enterprise customers including SiC device makers in Europe, Asia, and North America, alongside customers in compound semiconductors, microLED, MEMS, and research. In May 2024, the company raised $12.5 million from IntrinSiC Investment LLC to scale SiC-focused production; in December 2025, ASM International N.V. completed the acquisition of Axus Technology, making it a subsidiary within ASM's global equipment portfolio.

Name

Axus Technology

Legal name

Axus Technology

Website

https://axustech.com

Company type

Private

Founded year

2002

Operating status

Acquired

Headcount range

51–100 employees

Short description

Axus Technology is a Chandler, Arizona-based semiconductor equipment maker specializing in Chemical Mechanical Planarization (CMP) and wafer processing tools, most notably the Capstone CS200 series for silicon carbide and compound semiconductor manufacturers globally.

Ownership category

akta.pro rank

Product category

Semiconductor Process Equipment

NAICS

Semiconductor Machinery Manufacturing (333242)

SIC

Metalworkg Machinery & Equipment (3540), Instruments For Meas & Testing Of Electricity & Elec Signals (3825)

akta.pro primary industry

Chemical Mechanical Planarization (CMP) Equipment (HDAHAEAF)

akta.pro secondary industry

CMP Slurries & Pads Chemicals (CMP Consumables Chemicals) (IMAEAKAE)

Keywords

• Chemical mechanical planarization
• CMP equipment
• Wafer processing equipment
• Semiconductor manufacturing equipment
• Wafer thinning grinding

Headquarters

HQ city

Chandler

HQ country

United States

HQ region

North America

Offices2 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Operations, Technology or R&D, Supply Chain, Marketing or Sales

Revenue model

1. CMP Equipment Sales: Sale of next-generation CMP processing equipment including Capstone CS200 series, Aquarius wafer cleaners, and refurbished/remanufactured equipment (Strasbaugh, Applied Materials Mirra)
2. Parts & Services: Spare parts, maintenance, field support for legacy CMP processing tools, carrier rebuild refurbishment, control systems, touchscreen repair
3. Process Development Services: Custom process development services in advanced R&D lab with class 100 foundry cleanroom, including grinding/thinning, wafer cleaning, edge grinding, edge trim, wafer bonding
4. Slurry Delivery Systems: Sale of slurry delivery equipment including Gemini-3, Dynamic Slurry Blend Carts, Temperature Control Slurry Delivery, Cosmo-3 customizable systems

Pricing tiers

Go-to-market motion2 records

Distribution channels4 records

Marketing channels6 records

Core offering

Axus Technology designs, manufactures, and sells Chemical Mechanical Planarization (CMP) processing systems, wafer cleaning equipment, slurry delivery systems, and related wafer thinning/grinding tools for semiconductor manufacturers. Its flagship Capstone CS200 series supports 100mm, 150mm, and 200mm wafer processing, while the company also offers refurbished legacy equipment (Strasbaugh, Applied Materials Mirra), carrier upgrades, and process development/foundry services.

Product overview

Axus Technology is a global OEM company offering modern, flexible CMP processing and cleaning tools for semiconductor manufacturing. The core product portfolio centers on the Capstone CS200 series CMP systems (CS200-sa, CS200-ia, CS200-ma) and Aquarius A200-sa wafer cleaner. Supporting these primary platforms are Axus-designed carrier upgrades (Avalon, Crystal, Fulcrum) for specialized wafer handling, and slurry delivery systems (Gemini-3, Cosmo-3, Dynamic Slurry Blend Carts, Temperature Control Slurry Delivery). The company also sells refurbished CMP equipment (Strasbaugh 6EC/6EG, Applied Materials Mirra), wafer grinders (Strasbaugh 7AF), and wafer cleaning equipment (OnTrak DSS200 Series, OnTrak Synergy/Integra), alongside parts, services, and process development consulting. In December 2025, Axus Technology was acquired by ASM International.

Differentiator

Problem solved

Functional benefit

Brands

• Capstone: Next-generation CMP processing tool series including CS200-sa, CS200-ia, and CS200-ma configurations for wafer polishing
• Aquarius

Products and services

• Capstone CS200-sa Standalone next-generation CMP processing tool with the smallest footprint and most flexible architecture, capable of dual wafer size processing without hardware or software modification. Designed for 100mm, 150mm, and 200mm wafer sizes.
• Capstone CS200-ia Next-generation CMP processing tool with integrated Aquarius cleaner configuration for dry-in, dry-out applications, designed for 100, 150, and 200mm wafer sizes.
• Capstone CS200-ma Multi-load/unload CMP configuration with integrated Aquarius cleaner; can function as standalone CMP polishing system or as fully automated dry-in-dry-out system.
• Aquarius A200-sa Wafer Cleaner Next-generation post-CMP wafer cleaning system providing improvements in defectivity and throughput for 100mm, 150mm, and 200mm wafers, with capability to run two different wafer sizes simultaneously.
• Cosmo-3 Customizable Slurry Delivery System Precision blending and distribution system for high-volume CMP applications with customizable modules including CBU+ blend, CDU drum, and control modules.
• Gemini-3 Dual Slurry/Cleaning Chemistry Delivery System Single or dual slurry/chemical blending and delivery system with twinned-tank arrangement for uninterrupted on-demand slurry delivery.
• Process Development Services CMP process development and foundry services with over 375 years of combined CMP experience, operating an advanced R&D lab with a class 100 foundry cleanroom for grinding/thinning, wafer cleaning, edge grinding, edge trim, and wafer bonding.

Quantifiable outcome

• 40-50% reduction in slurry consumption
• +7 more outcomes

Named customers6 records

Segments5 records

Ideal customer profiles3 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature9 records

Partnerships

Six partnerships are on record, tiered core, major and strategic.

• FraunhofercoreStrategic or Co-development PartnerLong-standing 16+ year partnership with Fraunhofer research organization for CMP research, process development, and wafer services. Fraunhofer runs a research group dedicated to surface treatment including CMP and wet processing, helping customers with process services and CMP development.
• ErzM TechnologiescoreStrategic or Co-development PartnerPartnership with ErzM Technologies (expert for CMP across Europe) combined with Fraunhofer collaboration for over 16 years. Dr. Knut Gottfried from ErzM works with Fraunhofer on CMP research and development.
• Compound Photonics US Corporation (CP Display)majorStrategic or Co-development PartnerPartnership to integrate critical wafer-scale processes for mass-production scale up of CP's 3 µm pixel, 0.26 inch diagonal, 1080p microLED displays for next generation AR glasses. Axus deployed Capstone CMP system for wafer-scale bonding preparation.
• Plessey SemiconductorsmajorStrategic or Co-development PartnerPartnership to bring high-performance GaN-on-Silicon monolithic microLED technology to mass market. Axus provided CMP and scrubber systems for critical wafer planarization and preparation for wafer-scale bonding. Achieved world's first functional wafer-level bonded GaN-on-Si display.
• Mosaic MicrosystemsstrategicStrategic or Co-development PartnerPartnership providing wafer thinning and wafer surface processing for Mosaic Microsystems' thin glass wafer handling solutions to microelectronic packaging.
• GE Research / GE Aviation Systems / InertiaWave, Inc.strategicStrategic or Co-development PartnerCollaboration on production of an innovative single-chip device for the PNT (Positioning, Navigation, and Timing) market, supported by SEMI through MEMS & Sensors Industry Group (MSIG) and FlexTech Group.

Scale indicators3 records

Recent moves6 records

Expansion highlights5 records

Direct peers

• Applied Materials: The dominant global CMP equipment supplier, with its Mirra and Reflexion platforms. Most directly comparable as the legacy CMP incumbent whose installed base Axus is displacing — Axus even refurbishes Applied Mirra tools.
• Ebara Corporation: Japanese manufacturer of CMP polishing and plating equipment, with strong presence in semiconductor CMP. Directly comparable product category (CMP systems) and a focus on advanced-node and specialty-substrate polishing.
• Lam Research: Major semiconductor capital equipment company with a CMP product line (3D Squared and related platforms). Comparable as a broad WFE player with a CMP franchise that competes for the same advanced packaging and substrate polishing customers as Axus.
• Tokyo Electron: One of the largest global semiconductor equipment makers with CMP systems. Comparable as a full-line WFE incumbent with CMP capability serving similar semiconductor manufacturer customers worldwide.

Broad incumbents

• ASM International: Dutch semiconductor equipment company specializing in deposition and epitaxy that acquired Axus Technology in December 2025. Now Axus's parent — comparable as a broader WFE player and the integrating entity for CMP capability.
• KLA Corporation: Dominant semiconductor process control and yield management company. Comparable as a major WFE incumbent operating in adjacent parts of the CMP workflow (inspection, metrology, defectivity control on polished wafers).

Emerging players

• Revasum: US-based semiconductor equipment company focused on CMP and wafer planarization. Comparable as a smaller, emerging CMP specialist pursuing adjacent substrates and emerging fabs.
• ACM Research: US-China semiconductor equipment company with cleaning, CMP, and deposition products. Comparable as a smaller, growth-oriented equipment maker pursuing SiC, advanced packaging, and compound semiconductor adjacencies — a thematic peer in the same end-markets as Axus.

Others

• Onto Innovation: Semiconductor process control and metrology equipment supplier. Comparable as an adjacent WFE participant whose inspection and metrology products interface with CMP output — thematically aligned and serving overlapping customers.
• Veeco Instruments: Semiconductor and compound semi equipment company with strong position in MOCVD and ion beam technologies. Comparable as a focused WFE participant serving compound semiconductor (SiC, GaN, microLED) end-markets that are primary customers for Axus's CMP tools.

Market position

Strengths4 records

Weaknesses4 records

Competitive moat5 records

Key risks5 records

Key highlights7 records

Customer concentration

• Facebookfacebook.com/axustech

Revenue estimate

Valuation estimate

Number of profiles

Profiles5 records

Funding overview

Funding rounds2 records

Investors1 record

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Axus Technology