What Modutek does

Modutek Corporation is a privately held, US-incorporated (California) manufacturer of semiconductor wet process equipment, founded in 1980 and headquartered at a single facility in San Jose, California. The company designs, fabricates, assembles, and tests its products entirely in-house, with no outsourcing of robotic or software development. Its product portfolio spans wet bench systems (manual, semi-automated, fully automated, stainless-steel solvent-rated, fume hood, and dry-to-dry configurations with integrated IPA vapor drying), wet processing components (quartz tanks, quick dump rinsers, silicon nitride etching baths, solvent baths, sub-ambient BOE baths, Teflon tanks, tabletop baths, temperature control circulators), chemical handling equipment (acid fume scrubbers with Lantec packing, acid neutralization systems, chemical carts, collection, delivery, and lift stations), and wafer processing equipment (IPA vapor dryer, megasonic cleaning, quartz tube cleaning, rotary etching, ozone cleaning, vacuum metal etcher, and single-wafer wet processing). Underlying technology combines PLC-based controls, servo motors with encoder feedback, and advanced process control for temperature, chemical delivery, and wafer handling, with proprietary bath designs (QFa, Nb, DR, F, RCe series) refined over 40+ years.

Name

Modutek

Legal name

Modutek Corporation

Website

https://modutek.com

Company type

Private

Founded year

1980

Operating status

Operating

Headcount range

11–50 employees

Short description

Modutek is a privately held San Jose, California manufacturer founded in 1980 that designs, builds, and tests in-house wet bench systems and wet process equipment for semiconductor manufacturers, research labs, and adjacent high-tech industries including aerospace, pharmaceutical, solar, MEMS, and battery.

Ownership category

akta.pro rank

Product category

Semiconductor Wet Process Equipment

NAICS

Other General Purpose Machinery Manufacturing (3339), Industrial and Commercial Fan and Blower and Air Purification Equipment Manufacturing (333413), Measuring, Dispensing, and Other Pumping Equipment Manufacturing (333914)

SIC

Special Industry Machinery (No Metalworking Machinery) (3550), Industrial & Commercial Fans & Blowers & Air Purifing Equip (3564), Pumps & Pumping Equipment (3561)

akta.pro primary industry

Parts Washing & Degreasing Equipment (IMAHALAD)

akta.pro secondary industry

Air Quality & Filtration Equipment (IAQ) (IMAHAKAI)

Keywords

• Wet bench equipment
• Semiconductor manufacturing
• Wafer processing equipment
• Chemical handling systems
• Precision parts cleaning

Headquarters

HQ city

San Jose

HQ country

United States

HQ region

North America

Offices1 record

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Operations, Personnel, Technology or R&D, Supply Chain, Infrastructure, Marketing or Sales

Revenue model

1. Wet Process Equipment Manufacturing and Sales: Modutek generates revenue through the design, manufacture, and sale of wet bench systems, wet processing equipment components, chemical handling equipment, and wafer processing equipment. Products range from manual wet stations to fully automated systems, sold directly to semiconductor manufacturers, research facilities, and universities. The company provides comprehensive support including startup, training, and technical assistance as part of the product offering.
2. Professional Services (Support, Training, Customization): Revenue generated from field service, equipment repairs, custom fabrication, station upgrades, and customer training services. All products come with comprehensive technical support and training including service calls and remote troubleshooting.

Go-to-market motion1 record

Distribution channels1 record

Marketing channels3 records

Core offering

Modutek designs, manufactures, and sells wet bench systems and wet process equipment for semiconductor wafer cleaning, etching, rinsing, and drying. The portfolio spans wet processing equipment components (quartz tanks, quick dump rinsers, etching baths, solvent baths, Teflon tanks, tabletop baths, temperature control circulators), complete wet bench systems from manual stations to fully automated robotic systems, chemical handling equipment (acid fume scrubbers, neutralization systems, chemical carts, delivery and collection systems), and wafer processing equipment (IPA vapor dryers, megasonic cleaners, rotary etchers, ozone cleaners, vacuum metal etchers). All systems are designed, assembled, and tested in-house at the San Jose, California facility with custom configurations tailored to specific customer process requirements.

Product overview

Modutek is a semiconductor wet process equipment manufacturer offering a comprehensive portfolio of wet bench systems and chemical handling equipment. The product portfolio includes: Wet Processing Equipment Components (Quartz Tanks in QFa and Qa series, Quick Dump Rinsers, Silicon Nitride Etching Baths, Solvent Baths, Sub-Ambient Baths, Teflon Tanks, Tabletop Baths, and Temperature Control Circulators); Core Wet Bench Products spanning automation levels from manual stations to fully automated systems including Dry-to-Dry configurations with integrated IPA vapor drying; Chemical Handling Equipment (Acid Fume Scrubbers, Acid Neutralization Systems, Chemical Carts, Chemical Collection Systems, Chemical Delivery Systems, and Chemical Lift Stations); and Wafer Processing Equipment (IPA Vapor Dryers, Megasonic Cleaning, Quartz Tube Cleaning, Rotary Etching, Ozone Cleaning, and Vacuum Metal Etchers). The company designs, builds, and tests all products in-house at their San Jose, California facility, offering both standard configurations and custom solutions tailored to specific customer process requirements.

Differentiator

Problem solved

Functional benefit

Products and services

• QFa Series Quartz Tanks/Baths High Temperature Recirculating Quartz Tanks using an evolutionary bath design with semiconductor-grade quartz vessels and bonded heating elements for etching, stripping, and cleaning applications in semiconductor wet processing.
• Qa Series Quartz Tanks/Baths Constant Temperature Quartz Tanks featuring bonded 5-sided circuit heating elements and redundant safety devices for semiconductor processing.
• DR Series Quick Dump Rinsers High-efficiency process rinsing modules with contoured tank design that eliminates particle entrapment, minimizes rinsing time, and reduces D.I. water consumption.
• Nb Series Silicon Nitride Etching Baths Silicon nitride wet etching baths engineered with two-tiered diagnostic systems that monitor temperature while maintaining acid-to-water ratio through de-ionized water supplementation for safe and controlled nitride etching.
• SFa Series Stainless Steel Solvent Baths Temperature controlled recirculating baths designed for solvent applications, meeting Class 1 Div 2 Group D requirements with electropolished 316L stainless steel construction.
• Sa Series Stainless Steel Constant Temperature Bath Stainless steel constant temperature bath for solvent applications with Class 1 Div 2 safety rating.
• F Series Sub-Ambient Baths for Buffered Oxide Etch Filtered sub-ambient circulation baths providing continuous filtration while reducing acid consumption in BOE or positive resist development processes, with precise temperature control.
• TFa Series PFA Teflon High Temperature Overflow Tanks High temperature overflow tanks with modular design, all-Teflon fluid path, and 360 degree overflow filtration for KOH and TMAH processes.
• TI Series PFA Teflon High Temperature Static Tanks High temperature static baths with all-PFA Teflon construction for chemical compatibility in semiconductor processing.
• TT Series PFA Teflon Tank Ambient Ambient temperature Teflon tanks for processes requiring chemical-resistant containment without heating.
• Wet Processing Tabletop Baths Compact tabletop units for R&D and university labs supporting chemical wet processing including KOH etching, solvent resist strip, and BOE with minimal space requirements.
• RCe Series Temperature Control Circulator Chiller/heater units with all-stainless steel fluid path providing precise temperature stability within ±0.1°C for semiconductor wet processing applications.
• Automated Wet Bench Systems Fully-automated acid/base stations using robotic handling for wafer transfer and programmed recipe execution without operator intervention, designed for high-throughput production environments.
• Semi-Automated Wet Bench Systems Wet processing stations using robotics for automatic wafer movement between chemical baths while operators retain direct control over process parameters like chemical concentrations and temperature.
• Manual Wet Process Stations Chemically rated workstations providing hands-on operator control over wet processing sequences, available in FM4910 construction for acid/base and stainless steel for solvent applications.
• Stainless Steel Wet Bench Systems Solvent-rated process stations built from 304 stainless steel for wet processing with flammable or aggressive solvents such as acetone, IPA, or photoresist-stripping chemistries.
• Dry to Dry Wet Process Systems Integrated wet process systems featuring MVD Series IPA vapor dryer that complete drying within the same system, eliminating the need for separate drying tools and reducing particle exposure.
• Wet Bench Fume Hoods Chemical exhaust hoods providing fume extraction from work environments with FM4910 material construction supporting acid and base applications.
• Acid Fume Scrubbers Fume scrubbers removing acidic mists and vapors from exhaust air using wet-packed bed design with Lantec packing material achieving up to 99% removal efficiency, capacities from 500 to 25,000 CFM.
• Acid Neutralization Systems Wastewater treatment systems adjusting pH of acidic or alkaline wastewater to safe discharge levels, available in continuous-flow or batch configurations sized from 5 to 500 gpm.
• Chemical Carts Mobile units for safe chemical transfer from wet-process stations to holding tanks with all-pneumatic operation eliminating electrical ignition risk around solvents.
• Chemical Collection Systems Systems storing used process chemicals in contained drums or carboys with automatic switchover when containers reach capacity, featuring leak detection and BMS communication.
• Chemical Delivery Systems Automated bulk chemical storage and delivery systems pumping chemicals through contained all-Teflon fluid paths with load cells, level sensors, and dual-drum auto-switchover.
• Chemical Lift Stations Pumping systems for transferring used chemicals and rinse water from process stations to collection or neutralization systems.
• IPA Vapor Dryer (MVD Series) Isopropyl alcohol vapor dryer integrated into dry-to-dry wet process systems for wafer drying without separate drying equipment.
• Megasonic Cleaning Systems High-frequency acoustic energy cleaning systems for sub-micron particle removal from wafer surfaces without mechanical contact.
• Quartz Tube Cleaning Stations Cleaning equipment for quartz tubes used in semiconductor processing.
• Rotary Wafer Etching System Rotary etching systems for wafer reclaim and precision material removal.
• Ozone Cleaning Process Ozone-based surface cleaning and preparation systems for organic contamination removal prior to gate oxide growth.
• Vacuum Metal Etcher Vacuum etching equipment for metal layer processing in semiconductor fabrication.
• Precision Parts Cleaning Systems Automated precision cleaning systems for components requiring exceptional cleanliness in semiconductor manufacturing.

Segments8 records

Ideal customer profiles1 record

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature8 records

Scale indicators3 records

Recent moves6 records

Expansion highlights5 records

Broad incumbents

• Lam Research: Lam Research is a leading semiconductor equipment company offering wet clean products alongside etch and deposition tools. It competes with Modutek in wet processing, especially at high-volume fabs requiring integrated tool sets.
• Tokyo Electron: Tokyo Electron (TEL) is one of the largest global semiconductor equipment OEMs, with coater/developer and wet station products serving fab customers. It competes with Modutek for wet process equipment wallet share, particularly at advanced-node customers.
• Applied Materials: Applied Materials is the largest semiconductor equipment OEM with wet clean and surface preparation systems in its portfolio. While much broader than Modutek, it competes for the same customer wet process capital budgets globally.
• SCREEN Holdings: SCREEN Holdings (formerly Dai Nippon Screen) is a major Japanese semiconductor equipment manufacturer with a broad portfolio that includes wet clean/surface preparation systems. It is a much larger incumbent that overlaps directly with Modutek's wet bench and wafer cleaning equipment offerings.

Direct peers

• RENA Technologies: RENA Technologies is a European manufacturer of wet process equipment for semiconductors, MEMS, and adjacent industries. It is closely comparable to Modutek in product scope (batch wet benches, cleaning, and etching systems) and target customer mix.
• ACM Research: ACM Research (ACMR) is a closely comparable semiconductor wet cleaning equipment specialist selling single-wafer and bench wet clean tools to global fabs. It is the most directly analogous pure-play competitor to Modutek in semiconductor wet processing equipment.
• Ultron Systems: Ultron Systems manufactures wafer wet process and cleaning equipment for semiconductor and related industries. It is a smaller direct competitor comparable to Modutek in scale and product mix.
• AP&S International: AP&S International is a wet process equipment manufacturer serving semiconductor and MEMS customers worldwide. It offers wet benches and wet processing tools comparable to Modutek's portfolio, particularly for back-end and MEMS applications.
• Semsysco: Semsysco is an Austrian wet process equipment maker specializing in wet benches and wet cleaning systems for semiconductor and solar customers. It is a direct peer to Modutek in both technology scope and customer segments.

Regional players

• KoMiCo: KoMiCo is a Korean-based wet bench and wet process equipment supplier serving primarily Asian semiconductor and display customers. It is comparable in product scope to Modutek, with a regional focus that complements rather than directly overlaps Modutek's North American stronghold.

Market position

Strengths4 records

Weaknesses4 records

Competitive moat5 records

Key risks6 records

Key highlights6 records

Customer concentration

• Xx.com/modutek
• Facebookfacebook.com/Modutek-Corporation-562963950427243
• LinkedInlinkedin.com/company/modutek-corporation

Compliance10 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles2 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Modutek