memsstar
memsstar is a UK-based supplier of proprietary ORBIS etch and deposition systems (XERIC, AURIX, MacEtch modules) plus remanufactured Applied Materials, Lam Research, and Novellus equipment, serving MEMS manufacturers, semiconductor fabs, and university research institutes across Europe, North America, and Asia.
- Company typePrivate
- Founded2008
- HeadquartersLivingston, United Kingdom
- Headcount11–50
- GTM typeB2B
- OfferingHardware or Manufacturing
What memsstar does
memsstar is a privately held UK-based supplier of etch and deposition equipment and services for semiconductor and MEMS manufacturers, headquartered in Livingston, Scotland. The company designs and sells the proprietary ORBIS platform family (ORBIS Alpha for R&D, ORBIS 1000 for low-volume production, and ORBIS 3000 for high-volume cluster manufacturing), into which customers install swappable XERIC vapor HF and XeF2 dry release etch modules, AURIX self-assembled monolayer (SAM) coating modules, and (as of late 2025) the vacuum vapour-phase MacEtch process co-developed with Paul Scherrer Institute and Fraunhofer ENAS. Its patented Controlled Continuous Flow Technique (CCFT) and anhydrous HF catalyst approach differentiate its dry release etch offering on metal compatibility, Si3N4 selectivity, and stiction elimination. In parallel, memsstar operates a remanufactured equipment business that refurbishes Applied Materials (Centura, Endura, P5000), Lam Research (Rainbow, Alliance), and Novellus (Concept One/Two) platforms to like-new OEM specifications for legacy 150mm/200mm fabs, complemented by an extensive spare parts catalogue, on-site services, technical training, and end-of-life upgrade kits such as the ASP+ heater and vmPC replacement.
Revenue is generated through direct enterprise sales from the UK headquarters and a network of regional distributors and exclusive channel partners (notably Labtec Sales Inc. for North America and HQ-Dielectrics as a sales representative), covering Europe, the Middle East, Africa, North America, and Asia-Pacific (China, Taiwan, Japan, Korea, India, Israel, Australia, ASEAN). The company serves three primary customer segments: semiconductor manufacturers needing legacy 200mm equipment and upgrades, MEMS manufacturers and foundries requiring advanced dry release etch and SAM deposition, and R&D teams at universities and applied research institutes (e.g., TUM, WMI, University of Freiburg, PSI, Fraunhofer ENAS) working on next-generation MEMS, quantum, and nanostructure devices. Pricing is quote-based and not publicly disclosed, reflecting the enterprise, high-touch sales motion typical of process equipment.
Founded in 2008 and led by CEO Tony McKie, memsstar operates with 11-50 employees, holds multiple patents on its XERIC, AURIX, CCFT, and ORBIS technologies, and represents SMEs on the Governing Board of the ENIAC Joint Undertaking European funding program, anchoring its profile as a niche specialty equipment and process IP company rather than a high-volume OEM.
memsstar firmographics
Firmographics- Name
- memsstar
- Legal name
- memsstar Limited
- Website
- https://memsstar.com
- Company type
- Private
- Founded year
- 2008
- Operating status
- Operating
- Headcount range
- 11–50 employees
- Short description
- memsstar is a UK-based supplier of proprietary ORBIS etch and deposition systems (XERIC, AURIX, MacEtch modules) plus remanufactured Applied Materials, Lam Research, and Novellus equipment, serving MEMS manufacturers, semiconductor fabs, and university research institutes across Europe, North America, and Asia.
- Ownership category
- akta.pro rank
memsstar industry classification
Industry- Product category
- Semiconductor Equipment
- NAICS
- Semiconductor Machinery Manufacturing (333242), Semiconductor and Other Electronic Component Manufacturing (33441)
- SIC
- Instruments For Meas & Testing Of Electricity & Elec Signals (3825), Electrical Industrial Apparatus (3620)
- akta.pro primary industry
- Etch & Strip Equipment (Dry/Wet/Ashing) (HDAHAEAC)
Keywords
Where memsstar is headquartered
LocationHeadquarters
- HQ city
- Livingston
- HQ country
- United Kingdom
- HQ region
- Europe
Offices2 records
Markets served
memsstar business model
Business model- GTM type
- B2B
- Offering type
- Hardware or Manufacturing
- Cost components
- Technology or R&D, Supply Chain, Operations, Personnel, Marketing or Sales
Revenue model
- Proprietary ORBIS Systems Sales: Sale of proprietary ORBIS platform systems (ORBIS Alpha, ORBIS 1000, ORBIS 3000) and associated process modules (XERIC, AURIX) for MEMS etch and deposition applications, from R&D through to high-volume manufacturing.
- Remanufactured Semiconductor Equipment: Remanufacturing and resale of used semiconductor etch and deposition equipment from Applied Materials, Lam Research, and Novellus to like-new OEM specification for semiconductor manufacturers, serving Europe, USA, and Asia.
- Spare Parts Supply: Distribution of semiconductor equipment replacement parts globally at competitive prices, including parts for Lam Research (2300, Rainbow, Alliance), Novellus (C1, C2), and Applied Materials (Endura, Centura, P5000).
- Semiconductor Training Services: Technical training delivered at customer sites by certified trainers, covering platforms from Applied Materials (P5000, Centura, Endura), Lam Research (Rainbow, Alliance), and Novellus (Concept One, Concept Two).
- On-Site Services and Support: On-site services including equipment support, process retargeting, maintenance and warranty, CE compliance testing, and asset management for remanufactured systems.
- Equipment Upgrades and End-of-Life Solutions: Continuous improvement and end-of-life upgrades (e.g., ASP+ heater upgrade kit, vmPC replacement) that keep refurbished wafer manufacturing equipment running efficiently.
- Technology Development Services: Process development, technology development, and expert consulting for semiconductor and MEMS manufacturers, including custom configurations and next-generation process development.
Go-to-market motion3 records
Distribution channels4 records
Marketing channels5 records
memsstar product offering
Product offeringCore offering
memsstar designs, manufactures, and sells proprietary etch and deposition equipment for semiconductor and MEMS manufacturing under its ORBIS platform family (ORBIS Alpha, ORBIS 1000, ORBIS 3000) with interchangeable XERIC vapor-phase HF/XeF2 dry release etch modules and AURIX SAM coating modules. The company also remanufactures used Applied Materials, Lam Research, and Novellus etch and deposition systems to OEM specifications, supported by spare parts supply, on-site services, training, and technology development.
Product overview
memsstar is a provider of etch and deposition equipment for semiconductors and MEMS manufacturing. The product portfolio is organized as a platform-plus-modules architecture centered on the proprietary ORBIS™ platform family (ORBIS 3000, ORBIS 1000, ORBIS ALPHA) which supports swappable process modules including XERIC™ (vapor HF and XeF2 dry release etch) and AURIX™ (SAM coatings). The company also remanufactures Applied Materials, Lam Research, and Novellus semiconductor equipment to OEM specifications, complemented by spare parts, training, and on-site support services. The technology enables dry processing for MEMS from R&D through high-volume manufacturing.
Differentiator
Problem solved
Functional benefit
Products and services
- ORBIS 3000 Automated wafer handling and cluster platform providing full process integration for volume MEMS production. Supports up to three XERIC or AURIX process modules with proven high-volume production capability and compact cleanroom footprint.
- ORBIS 1000 Single-wafer vacuum loadlock system for low-volume MEMS production environments. Features automated single wafer handling and an upgrade path to the ORBIS 3000 system without losing original process module investment.
- ORBIS Alpha Low-cost, small-footprint self-contained R&D platform delivering XERIC oxide and silicon etch processes. Designed for institutional and academic markets, handling sample sizes to 200mm wafers with integrated process monitoring and endpoint control.
- XERIC Oxide Etch (Vapor HF) Patented vapor-phase dry release process using anhydrous hydrogen fluoride (HF) that eliminates stiction in a single process step. Compatible with a wide range of metals including Al/alloy for MEMS mirrors and electrical contacts, offering market-leading selectivities towards Si3N4 using H2O as catalyst.
- XERIC Silicon Etch (XeF2) Patented vapor-phase dry release etch using xenon difluoride (XeF2), highly selective to SiO2, Si3N4, aluminum, and photoresist. Isotropic etching enables large undercuts with no degradation in etch rate, using the proprietary Controlled Continuous Flow Technique (CCFT).
- AURIX SAM Coatings Vapor-phase self-assembled monolayer (SAM) coating system with anti-stiction precursors (MTOS, DDMS, FDTS, FOTS), hydrophilic precursors (mPEG, AECTS), and bio-compatible precursors (PEG, PMMA). Enables in-line integration with release etch for stiction protection.
- Vacuum Vapour-Phase Metal-Assisted Chemical Etching (MacEtch) Plasma-free, scalable silicon etching using patterned metal catalysts (e.g., platinum) with vacuum vapour-phase control. Delivers highly directional etching with reduced porosity, improved uniformity, and exceptional suitability for high aspect ratio nanostructures, targeting MEMS, microfluidics, photonics, and advanced semiconductor packaging applications.
- Remanufactured Applied Materials Equipment Remanufactured Applied Materials etch, CVD, PVD, RTP, and Epi systems including Centura 5200, Endura 5500, and P5000 platforms. Refurbished to OEM specifications with ISO-certified build and test procedures and CE compliance for semiconductor manufacturers worldwide.
- Remanufactured Lam Research Equipment Remanufactured Lam Research Alliance and Rainbow etch platforms refurbished to OEM specifications for legacy node and MEMS applications on wafer sizes up to 200mm.
- Remanufactured Novellus Equipment Remanufactured Novellus Concept One and Concept Two deposition platforms refurbished to OEM specifications for PECVD and CVD applications.
- ASP+ Heater Upgrade Kit Upgrade kit for Applied Materials Centura and P5000 platforms that replaces the original 14-lamp module assembly with a resistively driven aluminium heater, improving reliability, process stability, lowering energy costs, and delivering 2x higher mean time between calls (MTBC).
- vmPC Replacement Plug-and-play replacement PC hardware for Lam Research Rainbow and Alliance etch platforms running Lam Envision software, requiring no downtime or requalification with low investment and fast ROI.
- Semiconductor Training Services Professional technical training delivered at customer sites by certified trainers, covering Applied Materials (P5000, Centura, Endura), Lam Research (Rainbow, Alliance), and Novellus (Concept One, Concept Two) platforms for equipment operators, maintenance technicians, process engineers, and health & safety practitioners.
- Semiconductor Support Services On-site semiconductor support services including equipment support, chamber additions and moves, wafer size changes, process retargeting and applications design, maintenance and warranty, CE compliance testing, and asset management for remanufactured and OEM systems.
- Semiconductor Equipment Spare Parts Extensive global inventory of semiconductor equipment spare parts including Lam Research parts (2300, Rainbow, Alliance), Novellus C1 and C2 parts, and Applied Materials parts (Endura PVD, CVD, Centura Etch, CVD, RPD, P5000).
- Technology Development Services Process development, technology development, and expert consulting for semiconductor and MEMS manufacturers, including custom configurations and next-generation process development.
Quantifiable outcome
- Excellent uniformity and repeatability (<5% 1σ) for both oxide and silicon etch processes
- +6 more outcomes
Companies that use memsstar
Customer profileNamed customers5 records
Segments5 records
Ideal customer profiles3 records
memsstar technology and API
TechnologyTechnology focussed Yes
API detail
- Has API
- No
- API docs
- API detail
Core technology
AI maturity
App detail
Feature10 records
memsstar partnerships and signals
Strategic signalPartnerships
Eight partnerships are on record, tiered core and minor.
- Technical University of Munich (TUM)corememsstar installed its ORBIS Alpha Xeric Oxide Etch system at TUM's Department of Quantum Networks in Garching, Germany. The system is used to develop next-generation quantum devices including micromechanical structuring of silicon nanostructures from single chips to 200mm wafers using vapour-phase HF etching for photonic crystal release and silicon nanophotonic resonator fabrication for quantum communications.
- Paul Scherrer Institute (PSI)corememsstar co-developed vacuum vapour-phase metal-assisted chemical etching (MacEtch) technology with PSI. The collaboration demonstrated plasma-free, scalable silicon etching for micro- and nanoscale architectures, achieving uniform etch profiles across 4-inch wafers and nanowire structures with aspect ratios exceeding 430:1. PSI contributed expertise in X-ray optics and silicon nanowire fabrication.
- Fraunhofer ENAScoreCo-developed vacuum vapour-phase MacEtch technology with Fraunhofer ENAS. Fraunhofer ENAS also extended its cooperation with memsstar on reactive ion etching process quality assurance. The partnership has demonstrated first vacuum-gas-controlled metal-assisted chemical etching at 8-inch wafer scale.
- HQ-Dielectricsminormemsstar was named sales representative for HQ-Dielectrics, expanding market reach for advanced semiconductor processing solutions. HQ-Dielectrics is a provider of advanced dielectric materials and solutions for semiconductor manufacturing.
- Labtec Sales, Inc.corememsstar signed Labtec Sales Inc. as its exclusive North American distributor for the full line of ORBIS systems for MEMS manufacturing and R&D. Labtec Sales is based in El Dorado Hills, California and represents memsstar's proprietary ORBIS platforms to semiconductor and MEMS customers across the United States and Canada.
- Walther-Meißner-Institut (WMI)minormemsstar shipped an ORBIS Alpha XERIC MEMS oxide etch system to the Walther-Meißner-Institut for Low-Temperature Research for next-generation quantum device research and development.
- University of Freiburg (PROMYS Project)minormemsstar shipped an ORBIS 3000 MEMS production system to the University of Freiburg in support of the PROMYS project, a collaborative research initiative requiring advanced MEMS fabrication capabilities.
- SEMI (MEMS and Sensors Industry Group)minormemsstar maintains corporate membership of SEMI's MEMS and Sensors Industry Group and represents SME's on the Governing Board of the ENIAC Joint Undertaking European funding program.
Scale indicators5 records
Recent moves5 records
Expansion highlights5 records
memsstar competitors and assessment
Company assessmentDirect peers
- Plasma-Therm: Specialty manufacturer of plasma etch and deposition equipment for semiconductor, MEMS, photonics, and thin-film applications. Closely comparable to memsstar in targeting MEMS dry etch and serving similar R&D-to-production customer profiles.
- SPTS Technologies (KLA): Provides plasma etch and deposition equipment for MEMS, power devices, photonics, and advanced packaging as part of KLA. Directly comparable in vapor-phase and plasma etch process offerings for MEMS manufacturers.
- Oxford Instruments (Plasma Technology): Supplies plasma etch and deposition systems for semiconductors, MEMS, photonics, and quantum research. Comparable to memsstar in serving research institutions and commercial MEMS foundries with modular process tools.
- Samco Inc. Japanese specialty equipment maker focused on CVD, plasma etch, and surface treatment systems for MEMS, semiconductor, and compound semiconductor applications. Similar niche specialization and R&D-oriented customer mix as memsstar.
- SENTECH Instruments: German manufacturer of plasma etch, PECVD, and ALD equipment for MEMS, photonics, and compound semiconductors. Comparable European-based specialty equipment peer with similar R&D and process-module product structure.
- Trion Technology: Provides plasma etch and deposition equipment primarily for MEMS, compound semiconductor, and photonic device fabrication. Overlaps with memsstar in dry etch for MEMS release and R&D/small-volume production customers.
Broad incumbents
- ULVAC: Diversified Japanese vacuum and semiconductor equipment manufacturer offering etch, deposition, and packaging tools. Overlaps with memsstar on vapor-phase and dry etch processes but serves a much broader customer and process portfolio.
- Applied Materials: Global leader in wafer fab equipment across etch, CVD, PVD, CMP, and inspection. memsstar remanufactures Applied Materials' Centura, Endura, and P5000 platforms, illustrating deep product overlap and an OEM-partner relationship.
- Lam Research: Major global etch and deposition equipment supplier serving logic, memory, and specialty semiconductor fabs. memsstar remanufactures Lam's Rainbow and Alliance platforms, reflecting direct product and customer overlap.
Emerging players
- Advanced Micro-Fabrication Equipment (AMEC): China-based plasma etch equipment manufacturer scaling into advanced semiconductor and MEMS applications. A fast-growing emerging competitor with overlapping etch product positioning and rapidly expanding global footprint.
Market position
Strengths5 records
Weaknesses5 records
Competitive moat6 records
Key risks6 records
Key highlights6 records
Customer concentration
memsstar social profiles
Digital presencememsstar financial estimates
Financial estimateRevenue estimate
Valuation estimate
memsstar leadership team
Management profileNumber of profiles
Profiles2 records
memsstar funding detail
Funding detailFunding overview
Funding rounds1 record
Investors1 record
Funding detail is available on the Subscription and Enterprise plan.Contact sales →
memsstar M&A and investment
M&A and investmentM&A
Investments
M&A and investment is available on the Subscription and Enterprise plan.Contact sales →
Frequently asked questions about memsstar
What does memsstar do?
memsstar designs, manufactures, and sells proprietary etch and deposition equipment for semiconductor and MEMS manufacturing under its ORBIS platform family (ORBIS Alpha, ORBIS 1000, ORBIS 3000) with interchangeable XERIC vapor-phase HF/XeF2 dry release etch modules and AURIX SAM coating modules. The company also remanufactures used Applied Materials, Lam Research, and Novellus etch and deposition systems to OEM specifications, supported by spare parts supply, on-site services, training, and technology development.
Is memsstar a public or private company?
memsstar is a private company. It is classified as founder individual operated bootstrapped and is currently operating.
When was memsstar founded?
memsstar was founded in 2008. It employs 11 to 50 people.
Where is memsstar based?
memsstar is headquartered in Livingston, United Kingdom, in the Europe region.
How does memsstar make money?
Seven revenue lines are on record. Proprietary ORBIS Systems Sales are the primary driver. The others are remanufactured Semiconductor Equipment, spare Parts Supply, semiconductor Training Services, on-Site Services and Support, equipment Upgrades and End-of-Life Solutions and technology Development Services.
Who are memsstar's main competitors?
Direct peers on record are Plasma-Therm, SPTS Technologies (KLA), Oxford Instruments (Plasma Technology), Samco Inc., SENTECH Instruments and Trion Technology. Broad incumbents are ULVAC, Applied Materials and Lam Research. Advanced Micro-Fabrication Equipment (AMEC) is listed as an emerging player.
Does memsstar have an API?
No public API is recorded for memsstar.
What industry is memsstar in?
memsstar's product category is Semiconductor Equipment. Its primary akta.pro industry code is HDAHAEAC, Etch & Strip Equipment (Dry/Wet/Ashing). Its NAICS code is 333242 and its SIC code is 3825.