Aurion

What Aurion does

Aurion Anlagentechnik GmbH is a German manufacturer of plasma treatment and coating systems and radio-frequency (RF) components, founded in 1994 and headquartered in Seligenstadt with a branch office in Berlin. The company sells engineered equipment - including atmospheric pressure plasma sources, reactive ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), sputtering, and microwave plasma systems - alongside the proprietary PRODIK series of automatic impedance matching networks (300 W to 30 kW) and ACCELOS RF systems for particle accelerators. Its KIVOS modular platform allows customers to configure systems from interchangeable cubic chamber modules, supporting applications ranging from wafer processing to 3D-metallization via the 3DWire atmospheric sputtering system.

The customer base spans semiconductor and microelectronics manufacturers, flat panel display producers, photovoltaic and sensor companies, research institutions such as CERN, and industrial manufacturers requiring atmospheric pressure surface treatment. Distribution is direct in the DACH region and handled through exclusive partners - Phicom Asia-Pacific for China, Singapore, Malaysia, Thailand and the Philippines, and Aultimut International for the USA.

The revenue model combines one-time capital sales of custom-configured plasma systems and RF components, professional services (consulting, application laboratory testing, EMC measurements, training), and recurring after-sales service and predictive maintenance contracts. Pricing is quote-based with multi-year project cycles; the company is DIN EN ISO 9001 certified, holds a German Forschungszulage research allowance certification, and is privately held with no disclosed external funding. The management team consists of Managing Directors Michael Schneider and Joachim Scherer, and the company is a member of industry associations including EFDS, Materials Valley, and INPLAS.

Name

Aurion

Legal name

Aurion Anlagentechnik GmbH

Website

https://aurion.de

Company type

Private

Founded year

1994

Operating status

Operating

Headcount range

11–50 employees

Short description

Aurion Anlagentechnik GmbH is a German manufacturer of custom plasma treatment and coating systems plus RF components, serving semiconductor, display, photovoltaic, sensor, research, and industrial customers through direct sales and exclusive distributors in Asia-Pacific and the USA.

Ownership category

akta.pro rank

Product category

Plasma Surface Treatment Equipment

SIC

Electronic Coils, Transformers & Other Inductors (3677)

akta.pro primary industry

Thermal Spray & Metallizing (HVOF/Plasma/Arc) (IMAIAKAF)

akta.pro secondary industry

Welding & Plasma Power Supplies (Industrial welders, cutting power sources) (IMAGADAI)

Keywords

• Plasma surface treatment
• Radio frequency components
• Impedance matching networks
• Reactive ion etching
• PECVD coating systems

Headquarters

HQ city

Seligenstadt

HQ country

Germany

HQ region

Europe

Offices2 records

Markets served

GTM type

B2B

Offering type

Hardware or Manufacturing

Cost components

Personnel, Technology or R&D, Operations, Infrastructure, Marketing or Sales, Supply Chain

Revenue model

1. Plasma Systems Sales: Sale of plasma treatment and coating systems including atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems. Custom-designed systems based on customer requirements with modular configurations.
2. RF Components Sales: Sale of radio frequency components including automatic impedance matching networks (PRODIK series), switches, filters, power splitters, phase shifters, and RF systems for particle accelerators (ACCELOS series).
3. Consulting and Technical Services: Technology consulting for surface treatment and coating process selection, electrode design, field calculations and simulations. Cost of ownership and amortization calculations. Technical investigations using application laboratory including profilometry, ellipsometry, IR spectroscopy, optical density and contact angle measurements.
4. After-Sales Service and Maintenance: After-sales service with quick response times. Remote control and predictive maintenance solutions. Individual maintenance and care.

Pricing tiers

Go-to-market motion2 records

Distribution channels3 records

Marketing channels4 records

Core offering

Aurion designs, manufactures, and sells plasma systems for surface treatment and coating (including atmospheric pressure plasma, RIE, PECVD, microwave downstream plasma, and PVD sputtering) as well as radio frequency components such as automatic impedance matching networks, switches, filters, and power splitters. The company combines plasma systems with RF components into complete solutions, including ACCELOS RF systems for particle accelerators, and supports customers with consulting, application laboratory testing, EMC measurements, and after-sales service.

Product overview

Aurion Anlagentechnik GmbH is a German industrial equipment manufacturer specializing in plasma and radio frequency technology. The product portfolio consists of plasma systems for surface treatment and coating (including atmospheric pressure plasma, RIE, PECVD, sputtering, and microwave systems), RF components (primarily the PRODIK series impedance matching networks ranging 300W-30kW, plus switches, filters, power splitters, and phase shifters), ACCELOS RF systems for particle accelerators, and associated services including consulting, application laboratory testing, EMC measurements, and after-sales support. The KIVOS concept provides a modular platform approach allowing customers to configure systems with interchangeable plasma sources, pumps, and accessories. Systems are controlled via proprietary CAN-Bus technology with RS232/Profibus interfaces and ETHOS configuration software.

Differentiator

Problem solved

Functional benefit

Brands

• PRODIK: Automatic impedance matching networks (matchboxes) for RF plasma applications, available in various power ranges from 300W to 30kW
• ACCELOS
• KIVOS
• CYLOS
• 3DWire
• COMPACT-MW
• PIKNOS

Products and services

• PRODIK Series Automatic Impedance Matching Networks Automatic impedance matching networks (matchboxes) for plasma impedance matching at 13.56 MHz, available in power ranges from 300W to 30kW (PRODIK-T 25, T 50, T 90, T 130, T 160, T 300, and PRODIK-N 35 variants). Features L-, T-, Pi-, and N-circuit configurations with decentralized CAN-Bus control and proprietary logarithmic-amplifier measurement technology for high precision and dynamic range. Used by semiconductor, display, and industrial plasma system operators.
• ACCELOS RF Systems for Particle Accelerators Integrated RF systems for particle accelerators, including bunch compressor systems with HF amplifier, cavity, and beam tube. Features tetrode-based amplifiers with push-pull operation and ultra-high vacuum (XHV) beam tubes with end pressure below 1E-10 hPa. Designed for research institutions operating particle accelerators such as CERN.
• RF Switches, Power Splitters, Phase Shifters, Filters, Measurement Technology, ACAS Autotuning, and ETHOS Software Supporting RF components for plasma systems including cathode switching up to 60A, modular switching matrices, generator switching in 50 Ohm systems, cost-effective power splitters for operating multiple cathodes from a single supply, 2-channel and 6-channel phase shifters, RF interference filters, and DC potential/plasma detection/RF voltage and current/impedance measurement capabilities. Includes ACAS computing autotuning system and ETHOS configuration software for matching network setup and parameter evaluation. Used by industrial plasma system operators.
• KIVOS Modular Plasma System Platform Flexible, modular plasma system platform for surface cleaning, activation, RIE, PECVD, and PVD applications. Uses cubic stainless steel vacuum chamber frames with interchangeable modules. Available in chamber sizes KIVOS 350 (350x350x350mm, 0.043m³), KIVOS 500 (500x500x500mm, 0.125m³, 1-3 cathodes), and KIVOS 750 (750x750x750mm, 0.422m³, 1/3/5 cathodes) with RIE and PECVD configurations. Used by semiconductor, display, photovoltaics, and research customers.
• CYLOS RIE Systems Reactive Ion Etching (RIE) systems including CYLOS 160/RIE with 160mm cathode diameter for small substrate processing and CYLOS 350/RIE with 220mm cathode diameter, 0.015m³ chamber volume, and 35m³/h pumping speed. Used for semiconductor wafer processing including surface cleaning, activation, photoresist ashing, and circuit structuring.
• KIVOS RIE Systems (KIVOS 500/RIE and KIVOS 750/RIE) Reactive Ion Etching systems based on the KIVOS platform: KIVOS 500/RIE with 400x400mm cathode area and up to 3 cathodes (0-600W for 1 cathode or 0-1600W for 3 cathodes), and KIVOS 750/RIE with 500x500mm cathode area supporting 1, 3, or 5 cathodes with power up to 2500W for 5 cathodes. Used by semiconductor manufacturers requiring high-throughput wafer etching.
• KIVOS Combined RIE+PECVD Systems Combined RIE and PECVD systems based on KIVOS 350 and KIVOS 500 platforms for plasma-enhanced chemical vapor deposition thin film applications, including flat panel display manufacturing.
• Microwave Plasma Systems (COMPACT-MW and PIKNOS) Microwave plasma systems including the COMPACT-MW with minimal footprint, high plasma densities, plasma array and 2D gas inlet for optimized homogeneity, and PIKNOS 30 MW with 30L chamber volume, 2.45GHz frequency, 2kW output (pulsed 4kW), and 1.0x0.8x1.8m dimensions. Designed for short process times in industrial coating and surface treatment.
• 3DWire Atmospheric Pressure Sputtering System Fully automatic atmospheric pressure sputtering system for 3D-metallization of complex geometries. Deposits wire leads and bond pads directly on insulators, supporting Au, Pt, Pd, and Ag coatings, without requiring vacuum equipment. Reduces manufacturing cost for sensor housings and industrial parts.
• Custom Sputtering Systems Custom-designed sputtering systems including small laboratory units with round cathodes, batch systems with rectangular cathodes, and inline systems for various coating applications.
• Cluster and Inline Multi-Chamber Systems Multi-chamber plasma systems with vacuum substrate handling. Cluster systems include load-lock chambers, transfer chambers, and process modules for sputtering and RIE processes. Inline systems include load-lock chambers, pretreatment chambers, and sputtering chambers in vertical or horizontal orientation for high-throughput production.
• Technology Consulting Services Technology consulting covering surface treatment and coating process selection, plasma system design including electrode design for capacitive and inductive plasma sources, field calculations and simulations, and profitability (cost of ownership and amortization) calculations.
• Application Laboratory and EMC Measurement Services Technical investigations and measurements using the Aurion application laboratory including profilometry, ellipsometry, IR spectroscopy, optical density, and contact angle measurements for surface energy determination, plus EMC measurements (E-field and H-field) for equipment and RF components compliance with personnel protection requirements.
• After-Sales Service and Training Classes Rapid after-sales support with unbureaucratic and flexible assistance to minimize customer economic losses, including remote control and predictive maintenance solutions. Also includes training classes in plasma technology and RF technology for customer skill development.

Quantifiable outcome

• Throughput of over 100,000 wafers per year achievable with certain RIE systems
• +2 more outcomes

Named customers3 records

Segments6 records

Ideal customer profiles4 records

Technology focussed Yes

API detail

Has API

No

API docs

API detail

Core technology

AI maturity

App detail

Feature5 records

Partnerships

Five partnerships are on record, tiered regional and minor.

• Phicom Asia-Pacific Co., Ltd.regionalChannel Partner/ Reseller/ DistributorExclusive distributor for China, Singapore, Malaysia, Thailand, and Philippines. Located in Hong Kong at Room 1606, 16/F, Abba Commercial Building, 223 Aberdeen Main Road, Aberdeen.
• Aultimut International, Inc.regionalChannel Partner/ Reseller/ DistributorExclusive distributor for USA market. Located in Capistrano Beach, California. Contact person: Sundarajan Mutialu.
• EFDS (eFlow)minorOthersIndustry association member. The company is a member of EFDS (eFlow).
• Materials ValleyminorOthersIndustry association member. The company is a member of Materials Valley cluster.
• INPLASminorOthersIndustry association member. The company is a member of INPLAS plasma technology network.

Scale indicators2 records

Recent moves6 records

Expansion highlights6 records

Direct peers

• Oxford Instruments: UK-based manufacturer of plasma etch and deposition systems, ion beam tools, and RF subsystems serving semiconductor, research, and industrial customers. Direct overlap with Aurion's KIVOS RIE/PECVD systems and PRODIK impedance matching networks across similar end-markets including particle physics and materials research.
• Plasma-Therm: US-based specialist in plasma etch and PECVD deposition equipment for semiconductor, MEMS, photonics, and research applications. Closely comparable product portfolio to Aurion's KIVOS RIE and PECVD systems, including custom-engineered chamber configurations.
• SPTS Technologies (KLA): Plasma etch and PVD sputtering equipment supplier for semiconductor, MEMS, photonics, and power device markets, now part of KLA. Direct competitor in the same plasma-based wafer processing and surface treatment categories as Aurion's RIE and sputtering systems.
• MKS Instruments: US-listed provider of RF power delivery systems, impedance matching networks, plasma sources, and gas delivery subsystems for semiconductor and industrial plasma applications. Direct overlap with Aurion's PRODIK matching networks and broader RF/plasma subsystem portfolio.
• Advanced Energy Industries: Manufacturer of RF power generators, impedance matching networks, and plasma power subsystems for semiconductor, display, and industrial coating applications. Highly comparable to Aurion's PRODIK series and the RF component side of the business.
• Comet Group: Swiss-listed manufacturer of RF power generators, impedance matching networks, and plasma control subsystems (formerly Comet Plasma Control Technologies / Comet Yxlon). Direct competitor to Aurion's RF components and plasma subsystem offerings in semi and industrial coating markets.

Broad incumbents

• TRUMPF: German industrial laser and machine tool manufacturer that acquired Hüttinger Elektronik (now TRUMPF Hüttinger), one of the largest RF generator and impedance matching suppliers for plasma applications. Broad incumbent with overlapping RF/plasma subsystems portfolio to Aurion's PRODIK line.
• Applied Materials: Largest global semiconductor equipment manufacturer with broad etch, deposition, and surface treatment product lines. While not a direct niche competitor to Aurion's specialty systems, Applied Materials defines the competitive baseline in the etch/PECVD/PVD markets where Aurion sells.
• Tokyo Electron: Major Japanese semiconductor equipment manufacturer with extensive plasma etch, deposition, and surface treatment product lines. Sets the competitive context for Aurion's semi-targeted plasma systems across display and semiconductor applications.

Emerging players

• SÜSS MicroTec: German-headquartered specialist in lithography, bonding, and plasma processing equipment for semiconductor, MEMS, and advanced packaging. Geographic and segment overlap with Aurion as a fellow German specialty equipment supplier to semiconductor and research customers.

Market position

Strengths4 records

Weaknesses4 records

Competitive moat5 records

Key risks5 records

Key highlights6 records

Customer concentration

• LinkedInlinkedin.com/company/aurion-anlagentechnik-gmbh

Compliance2 records

Revenue estimate

Valuation estimate

Number of profiles

Profiles2 records

Funding overview

Funding rounds

Investors

Funding detail is available on the Subscription and Enterprise plan.Contact sales →

M&A

Investments

M&A and investment is available on the Subscription and Enterprise plan.Contact sales →

Frequently asked questions about Aurion