E+H Metrology
E+H Metrology GmbH, founded in 1968 in Karlsruhe, Germany, designs and manufactures capacitive-sensor measurement systems for subnanometer-precision wafer geometry and electrical characterization, serving semiconductor, photovoltaic, and research customers globally through direct sales and a 35+ country distributor network.
- Company typePrivate
- Founded1968
- HeadquartersKarlsruhe, Germany
- Headcount11–50
- GTM typeB2B
- OfferingHardware or Manufacturing
What E+H Metrology does
E+H Metrology GmbH is a privately held German Mittelstand company founded in 1968 and headquartered in Karlsruhe. It develops and manufactures capacitive-sensor-based measurement systems for subnanometer-precision characterization of wafer geometry, thickness, flatness, bow, warp, sori, film stress, resistivity, sheet resistance, and surface properties. The core technology is a proprietary capacitive sensor platform refined over more than 40 years, paired with in-house distance meters, measuring cables, and OEM-integrated modules. Software (MX-NT V2 operating software, EH-Master, and WaferStudio visualization) is developed and maintained in-house, and the platform supports SECS/GEM and S³O automation interfaces for semiconductor factory integration.
The product portfolio spans manual gauges (MX 10/20/30/60/70 series covering 50mm to 450mm wafers), OEM integrated tools (MX 152/153, MX 3014-Z), automated belt and robot sorters (throughputs up to 1,000 wafers per hour), a sensor and cable component family, and services including contract measurement and factory calibration. Revenue is generated through capital-equipment sales, software licenses, calibration services, and measurement-as-a-service. Pricing is quote-based and tailored to customer specifications, reflecting the high customization of most systems.
Customers are reached through a direct sales model backed by regional distributors covering more than 35 countries across Europe, North America, and Asia. End markets include semiconductor and MEMS manufacturing, photovoltaic/solar wafer production, wafer reclaim, technical ceramics, mechanical engineering, and research institutions. The company operates with approximately 50 employees under independent ownership led by CEO Daniel Raseghi and CSO/CTO Dr. Michael Jörger, with no external investment, parent company, or public listing.
E+H Metrology firmographics
Firmographics- Name
- E+H Metrology
- Legal name
- E+H Metrology GmbH
- Website
- https://eh-metrology.com
- Company type
- Private
- Founded year
- 1968
- Operating status
- Operating
- Headcount range
- 11–50 employees
- Short description
- E+H Metrology GmbH, founded in 1968 in Karlsruhe, Germany, designs and manufactures capacitive-sensor measurement systems for subnanometer-precision wafer geometry and electrical characterization, serving semiconductor, photovoltaic, and research customers globally through direct sales and a 35+ country distributor network.
- Ownership category
- akta.pro rank
E+H Metrology industry classification
Industry- Product category
- Semiconductor Metrology Equipment
- NAICS
- Other Measuring and Controlling Device Manufacturing (334519), Instrument Manufacturing for Measuring and Testing Electricity and Electrical Signals (334515), Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables (334513)
- SIC
- Instruments For Meas & Testing Of Electricity & Elec Signals (3825), Measuring & Controlling Devices, Nec (3829), Industrial Instruments For Measurement, Display, And Control (3823)
- akta.pro primary industry
- Metrology, Inspection & Machine Tool Accessories (CMMs, Probing, Gauging) (IMAHADAK)
- akta.pro secondary industries
- Metrology & Dimensional Measurement (CMMs, laser trackers, gauges, surface/roughness) (IMAGAFAD), Metrology, Inspection & Process Control Equipment (HDAHAEAH), Metrology Automation & Robotics (Automated Cells, In-Line Gauging) (IMAAAHAH)
Keywords
Where E+H Metrology is headquartered
LocationHeadquarters
- HQ city
- Karlsruhe
- HQ country
- Germany
- HQ region
- Europe
Offices1 record
Markets served
E+H Metrology business model
Business model- GTM type
- B2B
- Offering type
- Hardware or Manufacturing
- Cost components
- Personnel, Technology or R&D, Operations, Marketing or Sales, Supply Chain
Revenue model
- Measurement Equipment Sales: Sale of manual tools (MX 10/20/30/60/70 series), automated tools (robot sorters, belt sorters), OEM integrated modules, and sensor systems. Products are highly customized with long service lifespans and low maintenance requirements.
- Software Licenses and Updates: Operating software (MX-NT V2, EH-Master) and visualization software (WaferStudio) with continuous updates and support.
- Wafer Calibration Services: Reference wafers for thickness/resistivity, calibration services for E+H instruments and third-party equipment, periodic recalibrations.
- Contract Measurements: Measurement services for wafers of various sizes and materials, measurement strategy consulting, data analysis and 3D visualization.
Go-to-market motion1 record
Distribution channels2 records
Marketing channels4 records
E+H Metrology product offering
Product offeringCore offering
E+H Metrology designs, manufactures, and sells high-precision capacitive measurement systems for the semiconductor and microelectronics industry. The portfolio spans manual MX-series measurement gauges, OEM-integrated modules, automated belt and robot sorters, capacitive sensor systems, and supporting software (MX-NT V2, EH-Master, WaferStudio), complemented by contract measurement and wafer calibration services for clients globally.
Product overview
E+H Metrology is a German company (founded 1968) specializing in high-precision capacitive measurement systems for semiconductor and microelectronics manufacturing. The product portfolio centers on the MX Series measurement gauges combined with capacitive sensor technology for subnanometer-scale wafer characterization. Manual Tools (MX 10/20/30/60/70 Series) provide spot measurements across wafer sizes from 50mm to 450mm. OEM Integrated Tools (MX 152/153, MX 3014-Z) enable inline integration into automated production lines. Automated Solutions include Belt Sorters (MX 202 WaferStream) and Robot Sorters for high-throughput sorting (up to 1000 WPH) with integrated measurement. Sensor Systems comprise Standard Sensors (AW 210 series), Distance Meters (MW 210/MW-V series), Measuring Cables (L13/L33), and Customized Sensors. Software includes MX-NT V2 Operating Software for system control, EH-Master for smaller tools, and WaferStudio for 3D/2D data visualization and analysis. Services cover Contract Measurements and Wafer Calibration. All components can be combined to form complete sensor systems for measuring thickness, flatness, bow, warp, stress, resistivity, and surface properties.
Differentiator
Problem solved
Functional benefit
Products and services
- MX 10 Series Manual Tools Manual wafer measurement tools supporting thickness, flatness, geometry, resistivity and surface characterization for wafer sizes from 50mm to 450mm, intended for semiconductor and microelectronics laboratory and production use.
- MX 20 Series Manual Tools High-precision manual geometry gauges for thickness, deformation, bow, warp, and stress measurements with multiple sensor configurations covering 100mm to 300mm wafers.
- MX 30 Series Manual Tools Simple one-point manual thickness gauges for quick measurements on semiconducting and metallic materials covering 30mm to 300mm wafer sizes.
- MX 60 Series Manual Tools Combined thickness and resistivity gauges with P/N dotation sensors for 2-inch to 300mm silicon wafers, also available in solar variants for photovoltaic applications.
- MX 70 Series Manual Tools High-resolution thickness and surface profilers for nanotopography, waviness, and roughness measurements on 300mm and 450mm wafers after wire sawing or etching.
- MX 152/153 OEM Integrated Tools OEM inline modules for automated thickness, flatness (TTV), resistivity, and P/N dotation measurement on belt-transported wafers from 125mm to 230mm, designed for integration into third-party production equipment.
- MX 3014-Z OEM Integrated Tool OEM inline thickness gauge module for 100-200mm silicon and insulating wafers, providing on-the-fly measurement between automated manufacturing process steps.
- Belt Sorters (MX 202 WaferStream) Modular belt sorter systems for high-throughput wafer handling, sorting, and measurement, including the MX 202 WaferStream with speeds up to 1000 wafers per hour.
- Robot Sorters Custom modular robot sorter systems with integrated MX measurement modules, robotic handling, aligners, and cassette stations for up to 200 wafers per hour throughput.
- Integrated Optical Measurement Technologies Integrated optical measurement technologies including XRD and lifetime analysis for advanced wafer characterization, complementing the capacitive measurement portfolio.
- AW 210 Standard Sensors High-resolution capacitive sensors for contactless distance, thickness, deformation, and tolerance measurements with ranges from 50µm to 10,000µm, suitable for vacuum and high temperature environments.
- MW 210 / MW-V Distance Meters Standalone distance meters for processing capacitive sensor signals with single to eight-channel configurations, multiple frequency options, and cable lengths up to 6 meters.
- MZ1-M Pre-amplifier External pre-amplifier enabling extended cable lengths up to 20 meters between the measurement site and evaluation electronics in capacitive measurement setups.
- Measuring Cables (L13/L33 Series) Specialized sensor cables in 1m and 3m lengths with standard, mini, or angle plug configurations for different capacitive measuring ranges.
- Customized Sensors Custom capacitive sensors tailored to specific requirements including radiation resistance, extreme temperatures, cryogenic applications, ultra-high vacuum, custom electrode shapes, threaded housings, and integrated cables.
- MX-NT V2 Operating Software Windows-based operating software for controlling E+H measurement systems with data acquisition, evaluation, workflow design, customizable visualization, SQL database storage, and SECS/GEM and S³O automation interfaces.
- EH-Master Software Maintenance and operating software tailored to smaller E+H measurement tools including the MX 152/153, MX 30 series, MX 601, and MX 604.
- WaferStudio 3D and 2D wafer map visualization and data analysis software featuring seven interpolation methods including pykophylatic interpolation developed by E+H, contour lines, 2D cut tool, site TIR calculations, measurement comparison, and drag-and-drop import.
- Contract Measurements Professional wafer measurement services using E+H expertise and equipment for semiconductor wafers in all sizes and various materials including non-conductive substrates, including measurement strategy consulting and 3D data visualization.
- Wafer Calibration Services Factory calibration services providing reference wafers for thickness and resistivity, periodic recalibrations, and calibration of customer-provided materials for both E+H instruments and third-party equipment.
Quantifiable outcome
- Throughput up to 1000 wafers per hour for automated belt sorter systems
- +4 more outcomes
Companies that use E+H Metrology
Customer profileNamed customers3 records
Segments7 records
Ideal customer profiles3 records
E+H Metrology technology and API
TechnologyTechnology focussed Yes
API detail
- Has API
- No
- API docs
- API detail
Core technology
AI maturity
App detail
Feature4 records
E+H Metrology partnerships and signals
Strategic signalPartnerships
14 partnerships are on record, tiered core and minor.
- J P Kummer Semiconductor Technology GmbHcoreExclusive distributor for Germany, Austria, Netherlands, Liechtenstein, Switzerland (German speaking), and Eastern Europe. Located at Steinerne Furt 78, 86167 Augsburg, Germany. Provides local sales support and technical consultation.
- John P. Kummer SAScoreDistributor for France, Italy, Spain, Portugal, Belgium, Luxembourg, and Switzerland (French speaking). Located at 37 rue du Bois Chaland, 91090 Lisses, France.
- John P. Kummer Ltd.coreDistributor for Great Britain, Ireland, Sweden, Norway, Finland, and Denmark. Located at 6 Woodstock Court, Blenheim Road, Marlborough SN8 4AN, United Kingdom.
- Hologenix Inc.coreDistributor for USA and Canada. Located at 11088 Trask Ave, Suite 110, Garden Grove, CA 92843, USA.
- JC's Chunson Ltd.coreRepresentative for Taiwan. Located at 17 F., No. 216, Jian 8th Rd., Zhong-He, New Taipei City, Taiwan.
- QES Group of CompaniescoreE+H Representative covering Malaysia, Singapore, Thailand, Philippines, and Vietnam. Head Office at No. 9, Jalan Juruukur U1/19, Hicom Glenmarie Industrial Park, Seksyen U1, 40150 Shah Alam, Selangor, Malaysia.
- Hywing Technology Ltd.coreE+H Representative for China. Located at Room 1018, Jinghui Building, No. 8 Wuzhong Road, Shanghai 200336, PRC China.
- Winifred International Technology Ltd.coreAdditional representation for China. Located at Rm 201, Bldg 25, No.588 Xinjun Ring Rd., Pujiang Hi-tech Park, Minhang, Shanghai 201114, PRC China.
- QES ShanghaicoreE+H Representative for China (Shanghai region). Located at Unit 502, King Tower No28, Xin Jingqiao Road, Pudong, 201206 Shanghai, PRC China.
- Enssel CorporationcoreE+H Sales Partner for Korea. Located at 2F, Bldg.A, Sungnamdaero 393, Bundang, Sungnam, Kyungkido 13555, Korea.
- Correns CorporationcoreE+H Sales Partner for Japan. Located at MFPR Roppongi Azabudai Building 3F, 1-8-7 Roppongi, Minato-ku, Tokyo 106-0032, Japan.
- Faco IsraelcoreE+H Sales Partner for Israel. Located at 4 Sira st., Timrat 36576, Israel.
- SEMI InternationalminorIndustry association membership (SEMI Member ID 4817) providing industry standards alignment, networking, and market visibility in the semiconductor manufacturing supply chain.
- SolarUnited (formerly IPVEA)minorTrade association membership focusing on PV technology, providing industry visibility and standards participation in the photovoltaic sector.
Scale indicators3 records
Recent moves9 records
Expansion highlights5 records
E+H Metrology competitors and assessment
Company assessmentDirect peers
- Onto Innovation: Formed from the merger of Nanometrics and Rudolph Technology, Onto Innovation is a direct competitor in wafer metrology (thickness, TTV, bow/warp, resistivity) targeting the same semiconductor and adjacent customers with overlap on macro defect and film metrology.
- Nova Measuring Instruments: Israeli provider of in-line metrology and process control for semiconductor manufacturers; offers optical and X-ray-based wafer measurement that competes with E+H's capacitive systems in similar fab use cases.
- Lasertec Corporation: Specialist in semiconductor photomask and wafer inspection equipment; serves the same fab customer base and competes for share of advanced-node metrology budgets that drive E+H's opportunity set.
- Rigaku Corporation: Provides X-ray metrology and inspection equipment used by semiconductor and thin-film manufacturers; competes with E+H in wafer and film characterization, particularly for advanced packaging and PV.
Regional players
- SÜSS MicroTec: German-headquartered supplier of equipment for semiconductor and MEMS manufacturing processes including wafer-level packaging and metrology; geographical and customer-base overlap with E+H, though focused on adjacent process tools.
Broad incumbents
- Bruker Corporation: Bruker's semiconductor metrology division offers X-ray and other measurement tools used by fabs and research institutions; broader instrument maker but with overlapping wafer characterization capabilities and customer base.
- Hitachi High-Tech: Major semiconductor metrology and inspection equipment maker serving the same fab customers; offers CD-SEM, optical inspection, and other tools overlapping with E+H's wafer geometry and surface measurement focus.
- KLA Corporation: Global leader in semiconductor process control and yield management, including wafer inspection and metrology. Directly comparable as a metrology supplier to the same fab customers E+H serves, with much broader scale and product breadth.
Market position
Strengths5 records
Weaknesses5 records
Competitive moat4 records
Key risks6 records
Key highlights7 records
Customer concentration
E+H Metrology social profiles
Digital presenceE+H Metrology financial estimates
Financial estimateRevenue estimate
Valuation estimate
E+H Metrology leadership team
Management profileNumber of profiles
Profiles8 records
E+H Metrology funding detail
Funding detailFunding overview
Funding rounds
Investors
Funding detail is available on the Subscription and Enterprise plan.Contact sales →
E+H Metrology M&A and investment
M&A and investmentM&A
Investments
M&A and investment is available on the Subscription and Enterprise plan.Contact sales →
Frequently asked questions about E+H Metrology
What does E+H Metrology do?
E+H Metrology designs, manufactures, and sells high-precision capacitive measurement systems for the semiconductor and microelectronics industry. The portfolio spans manual MX-series measurement gauges, OEM-integrated modules, automated belt and robot sorters, capacitive sensor systems, and supporting software (MX-NT V2, EH-Master, WaferStudio), complemented by contract measurement and wafer calibration services for clients globally.
Is E+H Metrology a public or private company?
E+H Metrology is a private company. It is classified as management employee owned and is currently operating.
When was E+H Metrology founded?
E+H Metrology was founded in 1968. It employs 11 to 50 people.
Where is E+H Metrology based?
E+H Metrology is headquartered in Karlsruhe, Germany, in the Europe region.
How does E+H Metrology make money?
Four revenue lines are on record. Measurement Equipment Sales are the primary driver. The others are software Licenses and Updates, wafer Calibration Services and contract Measurements.
Who are E+H Metrology's main competitors?
Direct peers on record are Onto Innovation, Nova Measuring Instruments, Lasertec Corporation and Rigaku Corporation. SÜSS MicroTec is listed as a regional player. Broad incumbents are Bruker Corporation, Hitachi High-Tech and KLA Corporation.
Does E+H Metrology have an API?
No public API is recorded for E+H Metrology.
What industry is E+H Metrology in?
E+H Metrology's product category is Semiconductor Metrology Equipment. Its primary akta.pro industry code is IMAHADAK, Metrology, Inspection & Machine Tool Accessories (CMMs, Probing, Gauging), with a secondary code of IMAGAFAD, Metrology & Dimensional Measurement (CMMs, laser trackers, gauges, surface/roughness). Its NAICS code is 334519 and its SIC code is 3825.